JPH0735292Y2 - イオン処理装置 - Google Patents

イオン処理装置

Info

Publication number
JPH0735292Y2
JPH0735292Y2 JP1988113946U JP11394688U JPH0735292Y2 JP H0735292 Y2 JPH0735292 Y2 JP H0735292Y2 JP 1988113946 U JP1988113946 U JP 1988113946U JP 11394688 U JP11394688 U JP 11394688U JP H0735292 Y2 JPH0735292 Y2 JP H0735292Y2
Authority
JP
Japan
Prior art keywords
sample
magnetic field
filaments
ion
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988113946U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236150U (enrdf_load_stackoverflow
Inventor
義孝 笹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988113946U priority Critical patent/JPH0735292Y2/ja
Publication of JPH0236150U publication Critical patent/JPH0236150U/ja
Application granted granted Critical
Publication of JPH0735292Y2 publication Critical patent/JPH0735292Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1988113946U 1988-08-30 1988-08-30 イオン処理装置 Expired - Fee Related JPH0735292Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988113946U JPH0735292Y2 (ja) 1988-08-30 1988-08-30 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988113946U JPH0735292Y2 (ja) 1988-08-30 1988-08-30 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH0236150U JPH0236150U (enrdf_load_stackoverflow) 1990-03-08
JPH0735292Y2 true JPH0735292Y2 (ja) 1995-08-09

Family

ID=31354243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988113946U Expired - Fee Related JPH0735292Y2 (ja) 1988-08-30 1988-08-30 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0735292Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6186699A (ja) * 1984-10-05 1986-05-02 日本電信電話株式会社 収束性高速原子線源
JPS61156625A (ja) * 1984-12-27 1986-07-16 Fuji Electric Co Ltd イオン加工器

Also Published As

Publication number Publication date
JPH0236150U (enrdf_load_stackoverflow) 1990-03-08

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