JPH0733862Y2 - 真空チャンバのガス供給装置 - Google Patents
真空チャンバのガス供給装置Info
- Publication number
- JPH0733862Y2 JPH0733862Y2 JP1990068283U JP6828390U JPH0733862Y2 JP H0733862 Y2 JPH0733862 Y2 JP H0733862Y2 JP 1990068283 U JP1990068283 U JP 1990068283U JP 6828390 U JP6828390 U JP 6828390U JP H0733862 Y2 JPH0733862 Y2 JP H0733862Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum chamber
- cooling
- container
- closed container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 57
- 238000001816 cooling Methods 0.000 claims description 54
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 66
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000012535 impurity Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000008014 freezing Effects 0.000 description 4
- 238000007710 freezing Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
Landscapes
- Filtering Materials (AREA)
- Drying Of Gases (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990068283U JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426016U JPH0426016U (enrdf_load_stackoverflow) | 1992-03-02 |
| JPH0733862Y2 true JPH0733862Y2 (ja) | 1995-08-02 |
Family
ID=31602586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990068283U Expired - Lifetime JPH0733862Y2 (ja) | 1990-06-27 | 1990-06-27 | 真空チャンバのガス供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733862Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4584428B2 (ja) * | 2000-08-31 | 2010-11-24 | アルバック・クライオ株式会社 | ドライエアー製造装置 |
| JP5489428B2 (ja) * | 2008-07-01 | 2014-05-14 | 三菱重工コンプレッサ株式会社 | ドレインセパレータ及び冷却・除湿ユニット |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4735941U (enrdf_load_stackoverflow) * | 1971-05-17 | 1972-12-21 | ||
| JPS5666685U (enrdf_load_stackoverflow) * | 1979-10-23 | 1981-06-03 | ||
| JPS56108501A (en) * | 1980-01-31 | 1981-08-28 | Ckd Corp | Refrigerator for compressed air |
| JPS58170501A (ja) * | 1982-03-30 | 1983-10-07 | Mitsubishi Electric Corp | 蒸気除去装置 |
| JPS6042330U (ja) * | 1983-09-02 | 1985-03-25 | エスエムシ−株式会社 | 空気除湿機 |
-
1990
- 1990-06-27 JP JP1990068283U patent/JPH0733862Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0426016U (enrdf_load_stackoverflow) | 1992-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101744953B1 (ko) | 저노점 저온 제습 기능을 구비하는 efem | |
| KR100478550B1 (ko) | 분자 오염 제어 시스템 | |
| JP5707491B2 (ja) | 高純度液化炭酸ガス製造方法及び装置 | |
| JP5669658B2 (ja) | クライオポンプシステム、圧縮機、及びクライオポンプの再生方法 | |
| EP1817095A2 (en) | Fluid purification system with low temperature purifier | |
| EP1190759A2 (en) | Method and apparatus for collecting rare gas | |
| KR19980063312A (ko) | 배출 시스템 | |
| JP2004085167A (ja) | 酸素の製造方法と装置 | |
| GB2555447A (en) | Compressed gas drying system | |
| US5072592A (en) | Gas cleaner | |
| JP3606854B2 (ja) | 高湿度燃料ガスの圧縮供給装置 | |
| JPH0733862Y2 (ja) | 真空チャンバのガス供給装置 | |
| KR100718692B1 (ko) | 콜드트랩 | |
| JP4285885B2 (ja) | オゾン生成装置 | |
| JP2017044107A (ja) | クライオポンプの再生方法、クライオポンプ及び真空装置 | |
| JP2001522982A (ja) | ガス混合物からのガス成分の凍結分離 | |
| CN112334720A (zh) | 增强的制冷净化系统 | |
| JP2012011343A (ja) | 低露点空気発生装置 | |
| JP5307507B2 (ja) | 局所密閉型清浄化装置 | |
| JP4246343B2 (ja) | ガス雰囲気形成装置及びガス雰囲気形成方法 | |
| JP4796688B2 (ja) | 希ガス回収方法及び希ガス回収装置 | |
| JP2003062419A (ja) | ガス混合物の分離方法及びその装置 | |
| JPH0534743Y2 (enrdf_load_stackoverflow) | ||
| JPH0733861Y2 (ja) | ガス浄化装置 | |
| JPH06244145A (ja) | 真空形成方法および真空形成装置 |