JPH073311Y2 - 半導体差圧測定装置 - Google Patents

半導体差圧測定装置

Info

Publication number
JPH073311Y2
JPH073311Y2 JP14041588U JP14041588U JPH073311Y2 JP H073311 Y2 JPH073311 Y2 JP H073311Y2 JP 14041588 U JP14041588 U JP 14041588U JP 14041588 U JP14041588 U JP 14041588U JP H073311 Y2 JPH073311 Y2 JP H073311Y2
Authority
JP
Japan
Prior art keywords
sensor chip
semiconductor
diaphragm
liquid contact
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14041588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260838U (US20110009641A1-20110113-C00116.png
Inventor
賢一 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP14041588U priority Critical patent/JPH073311Y2/ja
Publication of JPH0260838U publication Critical patent/JPH0260838U/ja
Application granted granted Critical
Publication of JPH073311Y2 publication Critical patent/JPH073311Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14041588U 1988-10-27 1988-10-27 半導体差圧測定装置 Expired - Lifetime JPH073311Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14041588U JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14041588U JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Publications (2)

Publication Number Publication Date
JPH0260838U JPH0260838U (US20110009641A1-20110113-C00116.png) 1990-05-07
JPH073311Y2 true JPH073311Y2 (ja) 1995-01-30

Family

ID=31404562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14041588U Expired - Lifetime JPH073311Y2 (ja) 1988-10-27 1988-10-27 半導体差圧測定装置

Country Status (1)

Country Link
JP (1) JPH073311Y2 (US20110009641A1-20110113-C00116.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016003994A (ja) * 2014-06-18 2016-01-12 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005027365A1 (de) * 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung
DE102008021091A1 (de) * 2008-04-28 2009-10-29 Epcos Ag Drucksensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016003994A (ja) * 2014-06-18 2016-01-12 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体

Also Published As

Publication number Publication date
JPH0260838U (US20110009641A1-20110113-C00116.png) 1990-05-07

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