JPH0730674Y2 - カーボン蒸着装置 - Google Patents

カーボン蒸着装置

Info

Publication number
JPH0730674Y2
JPH0730674Y2 JP1989039819U JP3981989U JPH0730674Y2 JP H0730674 Y2 JPH0730674 Y2 JP H0730674Y2 JP 1989039819 U JP1989039819 U JP 1989039819U JP 3981989 U JP3981989 U JP 3981989U JP H0730674 Y2 JPH0730674 Y2 JP H0730674Y2
Authority
JP
Japan
Prior art keywords
carbon
timer
time
large current
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989039819U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02132654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
勝人 後藤
孝 島谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyu Denshi Co Ltd
Original Assignee
Sanyu Denshi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyu Denshi Co Ltd filed Critical Sanyu Denshi Co Ltd
Priority to JP1989039819U priority Critical patent/JPH0730674Y2/ja
Publication of JPH02132654U publication Critical patent/JPH02132654U/ja
Application granted granted Critical
Publication of JPH0730674Y2 publication Critical patent/JPH0730674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1989039819U 1989-04-04 1989-04-04 カーボン蒸着装置 Expired - Lifetime JPH0730674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989039819U JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989039819U JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Publications (2)

Publication Number Publication Date
JPH02132654U JPH02132654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-05
JPH0730674Y2 true JPH0730674Y2 (ja) 1995-07-12

Family

ID=31549057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989039819U Expired - Lifetime JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Country Status (1)

Country Link
JP (1) JPH0730674Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08359Y2 (ja) * 1990-12-12 1996-01-10 サンユー電子株式会社 カーボン蒸着装置
JPH08360Y2 (ja) * 1991-02-19 1996-01-10 サンユー電子株式会社 カーボン自動膜厚蒸着装置
JP4984154B2 (ja) * 2007-09-14 2012-07-25 学校法人立命館 炭素被覆金属微粒子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS612447U (ja) * 1984-06-06 1986-01-09 三菱電機株式会社 真空蒸着装置
JPS612447A (ja) * 1984-06-15 1986-01-08 Hitachi Ltd ル−プ伝送系の迂回路構成方式
JPS61142862A (ja) * 1984-12-17 1986-06-30 Fujitsu Ltd 撮像装置
JPS61186472A (ja) * 1985-02-15 1986-08-20 Hironobu Sato 蒸着非結晶膜製造装置
JPS61142862U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-02-22 1986-09-03

Also Published As

Publication number Publication date
JPH02132654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term