JPH0729636Y2 - 半導体ウェハー検査装置 - Google Patents
半導体ウェハー検査装置Info
- Publication number
- JPH0729636Y2 JPH0729636Y2 JP1989134997U JP13499789U JPH0729636Y2 JP H0729636 Y2 JPH0729636 Y2 JP H0729636Y2 JP 1989134997 U JP1989134997 U JP 1989134997U JP 13499789 U JP13499789 U JP 13499789U JP H0729636 Y2 JPH0729636 Y2 JP H0729636Y2
- Authority
- JP
- Japan
- Prior art keywords
- test head
- semiconductor wafer
- performance board
- contact
- wafer inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 32
- 239000004065 semiconductor Substances 0.000 title claims description 21
- 239000000523 sample Substances 0.000 description 15
- 238000005259 measurement Methods 0.000 description 14
- 230000005856 abnormality Effects 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 244000144985 peep Species 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000593 degrading effect Effects 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989134997U JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989134997U JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373446U JPH0373446U (enrdf_load_stackoverflow) | 1991-07-24 |
| JPH0729636Y2 true JPH0729636Y2 (ja) | 1995-07-05 |
Family
ID=31682290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989134997U Expired - Lifetime JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729636Y2 (enrdf_load_stackoverflow) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3560907A (en) * | 1968-05-17 | 1971-02-02 | Peter V N Heller | Test connector for microminiature circuits |
| JPS57103062A (en) * | 1980-12-19 | 1982-06-26 | Fujitsu Ltd | Probe test device |
| JPS6143854A (ja) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | 搬送波再生回路 |
| JPS6178135A (ja) * | 1984-09-25 | 1986-04-21 | Mitsubishi Electric Corp | 半導体ウエ−ハの測定装置 |
-
1989
- 1989-11-21 JP JP1989134997U patent/JPH0729636Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3560907A (en) * | 1968-05-17 | 1971-02-02 | Peter V N Heller | Test connector for microminiature circuits |
| JPS57103062A (en) * | 1980-12-19 | 1982-06-26 | Fujitsu Ltd | Probe test device |
| JPS6143854A (ja) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | 搬送波再生回路 |
| JPS6178135A (ja) * | 1984-09-25 | 1986-04-21 | Mitsubishi Electric Corp | 半導体ウエ−ハの測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0373446U (enrdf_load_stackoverflow) | 1991-07-24 |
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