JPH0729627Y2 - 縦型構造の炉芯管 - Google Patents

縦型構造の炉芯管

Info

Publication number
JPH0729627Y2
JPH0729627Y2 JP1988168240U JP16824088U JPH0729627Y2 JP H0729627 Y2 JPH0729627 Y2 JP H0729627Y2 JP 1988168240 U JP1988168240 U JP 1988168240U JP 16824088 U JP16824088 U JP 16824088U JP H0729627 Y2 JPH0729627 Y2 JP H0729627Y2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
peripheral wall
inner diameter
quartz glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988168240U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0289826U (OSRAM
Inventor
吉明 伊勢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP1988168240U priority Critical patent/JPH0729627Y2/ja
Publication of JPH0289826U publication Critical patent/JPH0289826U/ja
Application granted granted Critical
Publication of JPH0729627Y2 publication Critical patent/JPH0729627Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988168240U 1988-12-28 1988-12-28 縦型構造の炉芯管 Expired - Lifetime JPH0729627Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988168240U JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988168240U JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Publications (2)

Publication Number Publication Date
JPH0289826U JPH0289826U (OSRAM) 1990-07-17
JPH0729627Y2 true JPH0729627Y2 (ja) 1995-07-05

Family

ID=31457244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988168240U Expired - Lifetime JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Country Status (1)

Country Link
JP (1) JPH0729627Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5347319B2 (ja) * 2008-04-30 2013-11-20 信越半導体株式会社 縦型熱処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101025A (ja) * 1985-10-28 1987-05-11 Toshiba Corp 半導体製造治具
JPS62162835U (OSRAM) * 1986-04-03 1987-10-16

Also Published As

Publication number Publication date
JPH0289826U (OSRAM) 1990-07-17

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