JPH0729446Y2 - 位置検出装置 - Google Patents

位置検出装置

Info

Publication number
JPH0729446Y2
JPH0729446Y2 JP1990099053U JP9905390U JPH0729446Y2 JP H0729446 Y2 JPH0729446 Y2 JP H0729446Y2 JP 1990099053 U JP1990099053 U JP 1990099053U JP 9905390 U JP9905390 U JP 9905390U JP H0729446 Y2 JPH0729446 Y2 JP H0729446Y2
Authority
JP
Japan
Prior art keywords
nozzle
throttle means
detection
air
fixed throttle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990099053U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457708U (cs
Inventor
隆 斉藤
Original Assignee
日本空圧システム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本空圧システム株式会社 filed Critical 日本空圧システム株式会社
Priority to JP1990099053U priority Critical patent/JPH0729446Y2/ja
Publication of JPH0457708U publication Critical patent/JPH0457708U/ja
Application granted granted Critical
Publication of JPH0729446Y2 publication Critical patent/JPH0729446Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP1990099053U 1990-09-25 1990-09-25 位置検出装置 Expired - Lifetime JPH0729446Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990099053U JPH0729446Y2 (ja) 1990-09-25 1990-09-25 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990099053U JPH0729446Y2 (ja) 1990-09-25 1990-09-25 位置検出装置

Publications (2)

Publication Number Publication Date
JPH0457708U JPH0457708U (cs) 1992-05-18
JPH0729446Y2 true JPH0729446Y2 (ja) 1995-07-05

Family

ID=31840700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990099053U Expired - Lifetime JPH0729446Y2 (ja) 1990-09-25 1990-09-25 位置検出装置

Country Status (1)

Country Link
JP (1) JPH0729446Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117923B4 (de) * 2000-04-14 2007-03-15 Disco Corp. Halbleiterwaferschneidmaschine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6443871B1 (ja) * 2018-03-28 2018-12-26 日本空圧システム株式会社 隙間調整型ノズル弁及び隙間調整型ノズル弁を用いた位置検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0239049Y2 (cs) * 1981-02-26 1990-10-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117923B4 (de) * 2000-04-14 2007-03-15 Disco Corp. Halbleiterwaferschneidmaschine

Also Published As

Publication number Publication date
JPH0457708U (cs) 1992-05-18

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