JPH0729446Y2 - Position detector - Google Patents

Position detector

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Publication number
JPH0729446Y2
JPH0729446Y2 JP1990099053U JP9905390U JPH0729446Y2 JP H0729446 Y2 JPH0729446 Y2 JP H0729446Y2 JP 1990099053 U JP1990099053 U JP 1990099053U JP 9905390 U JP9905390 U JP 9905390U JP H0729446 Y2 JPH0729446 Y2 JP H0729446Y2
Authority
JP
Japan
Prior art keywords
nozzle
throttle means
detection
air
fixed throttle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990099053U
Other languages
Japanese (ja)
Other versions
JPH0457708U (en
Inventor
隆 斉藤
Original Assignee
日本空圧システム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本空圧システム株式会社 filed Critical 日本空圧システム株式会社
Priority to JP1990099053U priority Critical patent/JPH0729446Y2/en
Publication of JPH0457708U publication Critical patent/JPH0457708U/ja
Application granted granted Critical
Publication of JPH0729446Y2 publication Critical patent/JPH0729446Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は、機械加工等に際して被加工物品の固定位置を
検出するなどに使用される位置検出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a position detection device used for detecting a fixed position of a workpiece during machining or the like.

(従来の技術) 従来、工作機械やプレス機械等に被加工物(以下ワーク
という)を固定するに当って、ワークが所定位置に正確
に着座したか否かを判定するための位置検出装置とし
て、ワークの端面などに近接した所定位置に検知ノズル
を設け、これを減圧または加圧空気源に接続しておくと
共に検知ノズルの元側の空気圧力を検出できるものを用
い、ワークがノズル先端から、たとえば0.05mm以内まで
接近したときにノズルを通過する空気の抵抗が変化する
ことによる検知ノズル元側の空気圧力の変化を検出し、
ワークの位置の検知を行うことが行われている。
(Prior Art) Conventionally, as a position detection device for determining whether or not a work is accurately seated at a predetermined position when fixing a workpiece (hereinafter referred to as a work) to a machine tool, a press machine, or the like. , A detection nozzle is provided at a predetermined position close to the end face of the work, etc., which is connected to a reduced pressure or pressurized air source and can detect the air pressure on the original side of the detection nozzle. , For example, when the proximity of 0.05mm or less, the change in the air pressure on the nozzle side is detected due to the change in the resistance of the air passing through the nozzle.
The position of the work is detected.

このような検知ノズル元側の空気圧力の変化を迅速かつ
鋭敏に検出するために、第3図に示すような構造の空気
ブリッジ回路を有する位置検出装置が用いられていた。
すなわち、この位置検出装置は、空気源1から第1固定
絞り手段3と可変絞り手段5とを経て器外に通ずる比較
空気通路aと、空気源1から第2固定絞り手段2と近接
位置検知ノズル4とを経て外部に通ずる検知空気通路b
と、第1固定絞り手段3と可変絞り手段5との中間位置
7から差圧センサ8の比較圧力導入口81に通ずる比較圧
力通路cと、第2固定絞り手段2と近接位置検知ノズル
4との中間位置6から差圧センサ8の検知圧力導入口82
に通ずる検知圧力通路dとからなる空気ブリッジ回路を
備えているものである。なおWはワークである。
In order to detect such a change in the air pressure on the detection nozzle base side quickly and sharply, a position detecting device having an air bridge circuit having a structure as shown in FIG. 3 has been used.
That is, this position detecting device includes a comparative air passage a communicating from the air source 1 through the first fixed throttle means 3 and the variable throttle means 5 to the outside of the device, and the air source 1 to the second fixed throttle means 2 and the proximity position detection. Detection air passage b communicating with the outside through the nozzle 4
A comparative pressure passage c leading from the intermediate position 7 between the first fixed throttle means 3 and the variable throttle means 5 to the comparative pressure inlet 81 of the differential pressure sensor 8, the second fixed throttle means 2 and the proximity position detection nozzle 4. From the intermediate position 6 of the detection pressure introducing port 82 of the differential pressure sensor 8
It is provided with an air bridge circuit consisting of a detection pressure passage d leading to the. Note that W is a work.

この従来の位置検出装置においては、第1固定絞り手段
3および第2固定絞り手段2としてオリフィスまたはキ
ャピラリなどが用いられ、また可変絞り手段5としては
第4図に示すような半固定型のニードルバルブが用いら
れていた。ここで、51はバルブ本体でニードル53の周囲
に設けた雄ねじ部54と螺合する雌ねじ部52が設けてあ
り、ニードル53の後端部に形成した割り溝55にドライバ
ーを当てて回転させることにより空気の流通抵抗が加減
できるようになっているものであった。
In this conventional position detecting device, orifices or capillaries are used as the first fixed throttle means 3 and the second fixed throttle means 2, and the variable throttle means 5 is a semi-fixed needle as shown in FIG. A valve was used. Here, 51 is a valve body, which is provided with a female screw portion 52 which is screwed with a male screw portion 54 provided around the needle 53, and a screwdriver 55 is applied to a split groove 55 formed at the rear end of the needle 53 to rotate. The flow resistance of the air can be adjusted by this.

(考案が解決しようとする課題) 上記のような空気ブリッジ回路を備えた従来の位置検出
装置は、構造が比較的に簡単で小型に構成できるところ
から、小型で精密な空気抵抗調整ができるニードルバル
ブを用いることによって比較圧力を調節し、これによっ
て位置検出装置の検出位置を調整することができるよう
にしていた。
(Problems to be Solved by the Invention) The conventional position detecting device including the air bridge circuit as described above has a relatively simple structure and can be configured in a small size. The valve is used to adjust the comparison pressure, and thereby the detection position of the position detection device can be adjusted.

しかしながらニードルバルブは小型であるとその構造精
度を極度に高めなければならず、高価なものとなる不利
があった。そしてまた検出位置を大幅に変えようとする
と検出精度が低下するという問題もあった。
However, if the needle valve is small, its structural accuracy must be extremely increased, which is disadvantageous in that it becomes expensive. There is also a problem that the detection accuracy is lowered when the detection position is changed significantly.

そこで本考案は、検出位置を大幅に変更しても検出精度
を高く維持でき、しかも検出位置の変更が極めて簡単に
正確に行える位置検出装置を安価に提供することを目的
とした。
Therefore, an object of the present invention is to provide at low cost a position detection device that can maintain high detection accuracy even if the detection position is significantly changed and that can change the detection position very easily and accurately.

(課題を解決するための手段) 前記の目的を達成するために本考案においては、空気源
から第1固定絞り手段と可変絞り手段とを経て器外に通
ずる比較空気通路と、該空気源から第2固定絞り手段と
近接位置検知ノズル接続口とを経て器外に通ずる検知空
気通路と、該第1固定絞り手段と該可変絞り手段との中
間位置から差圧センサの比較圧力導入口に通ずる比較圧
力通路と、該第2固定絞り手段と該近接位置検知ノズル
接続口との中間位置から該差圧センサの検知圧力導入口
に通ずる検知圧力通路とからなる空気ブリッジ回路を有
し、前記可変絞り手段が、ノズルと、該ノズルに対向す
るフラッパ面と目盛とを周りに設けた回転ダイヤル体で
あってその回転角度に対応して該ノズルと該フラッパ面
との間隙が変化するように形成されたものとからなり、
前記回転ダイヤル体の外周の一部が器外に露出している
ように、位置検出装置を構成した。
(Means for Solving the Problem) In order to achieve the above-mentioned object, in the present invention, a comparison air passage communicating from the air source to the outside through the first fixed throttle means and the variable throttle means, and the air source From the intermediate position between the first fixed throttle means and the variable throttle means to the comparative pressure introduction port of the differential pressure sensor, the detection air passage leading to the outside of the device via the second fixed throttle means and the proximity position detection nozzle connection port. An air bridge circuit having a comparison pressure passage and a detection pressure passage communicating from a middle position between the second fixed throttle means and the proximity position detection nozzle connection port to the detection pressure introduction port of the differential pressure sensor, The throttle means is a rotary dial body around which a nozzle, a flapper surface facing the nozzle, and a scale are provided, and is formed such that the gap between the nozzle and the flapper surface changes in accordance with the rotation angle. What was done Consists of
The position detection device is configured such that a part of the outer circumference of the rotary dial body is exposed to the outside of the device.

(作用) 本考案の位置検出装置は、ダイヤルを回転させることに
よって可変絞り手段のノズルとフラッパ面との距離を連
続的に変化させ、これによって可変絞り手段の空気流通
抵抗を連続的に変化させるようにしたものである。
(Operation) The position detecting device of the present invention continuously changes the distance between the nozzle of the variable throttle means and the flapper surface by rotating the dial, thereby continuously changing the air flow resistance of the variable throttle means. It was done like this.

このような可変絞り手段を比較空気通路に設けた空気ブ
リッジ回路においては、空気源の空気圧力を少々変動し
ても近接位置検知ノズルの検知感度が殆ど影響を受けな
いという利点はそのまま維持しながら、検知感度やワー
クの近接位置の調整を極めて容易かつ再現性よく行うこ
とができるようにしたものである。
In the air bridge circuit provided with such variable throttle means in the comparison air passage, the advantage that the detection sensitivity of the proximity position detection nozzle is hardly affected even if the air pressure of the air source is slightly changed is maintained. The detection sensitivity and the proximity position of the work can be adjusted extremely easily and with good reproducibility.

(実施例) 第1図に、本考案の位置検出装置の構造を示した。(Embodiment) FIG. 1 shows the structure of the position detecting device of the present invention.

図において、空気ブリッジ回路の構成は基本的には第3
図に示したものと同等であるが、9は本考案の可変絞り
手段であって、91がノズル、92が回転ダイヤル体、93は
回転ダイヤル体の周上に形成されたフラッパ面、94は回
転ダイヤル体の回転軸である。この可変絞り手段9の構
造を、説明の便のために第2図に模式的に示した。また
10は近接位置検知ノズル4(図示せず)への延長空気配
管を接続するための接続口である。
In the figure, the configuration of the air bridge circuit is basically the third
Although it is equivalent to that shown in the figure, 9 is a variable diaphragm means of the present invention, 91 is a nozzle, 92 is a rotary dial body, 93 is a flapper surface formed on the circumference of the rotary dial body, and 94 is It is the axis of rotation of the rotary dial body. The structure of the variable diaphragm means 9 is schematically shown in FIG. 2 for convenience of explanation. Also
Reference numeral 10 is a connection port for connecting an extended air pipe to the proximity position detection nozzle 4 (not shown).

このように構成された本考案の位置検出装置において、
空気源1に、たとえばゲージ圧が、0.3kg/cm2の圧縮空
気ラインを接続すると、器内の空気は第1固定絞り手段
3と比較空気通路aを通ってノズル91とフラッパ面93と
の間隙Xから吐出される。
In the position detecting device of the present invention configured as described above,
For example, when a compressed air line having a gauge pressure of 0.3 kg / cm 2 is connected to the air source 1, the air inside the chamber passes through the first fixed throttle means 3 and the comparative air passage a and then the nozzle 91 and the flapper surface 93. It is discharged from the gap X.

このときのノズル91とフラッパ面93の間隙Xの大きさに
対応してノズル91の背後側、すなわちノズル91と第1固
定絞り手段との中間位置7に正の比較圧力が発生する。
A positive comparison pressure is generated at the back side of the nozzle 91, that is, at the intermediate position 7 between the nozzle 91 and the first fixed throttle means, corresponding to the size of the gap X between the nozzle 91 and the flapper surface 93 at this time.

一方、接続口10に接続された延長空気配管の先に設けら
れた近接位置検知ノズル4でも、ワークW等の接近によ
って空気の流出抵抗が増加し、前記と同様に検知空気通
路bの中間位置6に正の検知圧力が発生する。
On the other hand, also in the proximity position detection nozzle 4 provided at the tip of the extension air pipe connected to the connection port 10, the outflow resistance of the air increases due to the approach of the work W or the like, and the intermediate position of the detection air passage b is the same as above. Positive detection pressure is generated at 6.

この比較圧力と検知圧力とは、それぞれ比較圧力通路c
と検知圧力通路dとを経て差圧センサ8の比較圧力導入
口81と検知圧力導入口82とへそれぞれ導かれ、検知圧力
が比較圧力より高いか低いかによって、近接位置検知ノ
ズル4にワークWが着座したか否かの信号が差圧センサ
8から出力されることになる。
The comparison pressure and the detected pressure are respectively the comparison pressure passage c.
And the detection pressure passage d and are guided to the comparison pressure introduction port 81 and the detection pressure introduction port 82 of the differential pressure sensor 8, respectively. Depending on whether the detection pressure is higher or lower than the comparison pressure, the workpiece W is placed on the proximity position detection nozzle 4. A signal indicating whether or not the person is seated is output from the differential pressure sensor 8.

このような位置検出装置の作動状態において回転ダイヤ
ル体92を指などで回転軸94のまわりに回転させると、回
転ダイヤル体92の周囲にそって渦巻線にならう形状に形
成されたフラッパ面93は回転軸94との距離が回転位置に
対応して変化するようになっているので、ノズル91とフ
ラッパ面93との間隙Xは徐々に変化する。従って、たと
えばノズル91の先端形状を近接位置検知ノズル4の先端
形状と等しく形成しておけば、近接位置検知ノズル4に
対するワークWの距離がノズル91とフラッパ面93の間隙
Xと等しくなったときにワークWの検出信号を出力させ
るようにすることができる。
When the rotary dial body 92 is rotated around the rotary shaft 94 with a finger or the like in such an operating state of the position detecting device, the flapper surface 93 formed along the periphery of the rotary dial body 92 and shaped like a spiral. Since the distance from the rotary shaft 94 changes according to the rotational position, the gap X between the nozzle 91 and the flapper surface 93 gradually changes. Therefore, for example, if the tip shape of the nozzle 91 is formed to be the same as the tip shape of the proximity position detection nozzle 4, when the distance of the work W to the proximity position detection nozzle 4 becomes equal to the gap X between the nozzle 91 and the flapper surface 93. It is possible to output the work W detection signal.

具体的には、8の差圧センサ室中のダイヤフラム83上に
金属片84を設置しておき、その真上に近接スイッチ12を
設け、検知圧力が比較圧力より大きくなったとき、すな
わち、ダイヤフラム83が下から押されて上にふくれ上が
り、金属片84が近接スイッチ12に近づいたとき、近接ス
イッチのランプが点灯するようにしておく。
Specifically, the metal piece 84 is installed on the diaphragm 83 in the differential pressure sensor chamber 8 and the proximity switch 12 is installed directly above the metal piece 84, and when the detected pressure becomes higher than the comparative pressure, that is, the diaphragm. When the metal piece 84 is pushed up from the bottom and bulges up and the metal piece 84 approaches the proximity switch 12, the lamp of the proximity switch is kept lit.

このようにしておいて、実際の作業の場合は、あらかじ
め近接位置検知ノズル4とワークWの距離が0.05mmにな
ったとき、近接スイッチ12のランプが点灯するように回
転ダイヤル体92のフラッパ面93とノズル91の間隙Xを調
整して固定しておく。この準備をした後、作業を始めワ
ークWを所定の位置に近づけていけば、近接スイッチの
ランプが点灯した時点で、ワークが正確に所定の位置に
着座したことを感知することができる。
In this way, in the actual work, when the distance between the proximity position detection nozzle 4 and the work W is 0.05 mm in advance, the flapper surface of the rotary dial body 92 is turned on so that the lamp of the proximity switch 12 is turned on. The gap X between 93 and the nozzle 91 is adjusted and fixed. After this preparation, if work is started and the work W is brought closer to a predetermined position, it can be sensed that the work is accurately seated at the predetermined position when the lamp of the proximity switch is turned on.

このような回転ダイヤル体92に、間隙Xに相当する値の
目盛を刻んで視認できるようにすることによって、前記
のような作動距離設定が極めて容易となり、また回転ダ
イヤル体92の回転角に対して間隙Xの変化量を小さく取
ることによって更に作動距離の設定精度を高めることも
できる。あるいはまた、複数の設定値付近でそれぞれ精
度の高い位置検出を行うことも可能となるものである。
By engraving a scale having a value corresponding to the gap X on the rotary dial body 92 and making it visible, it becomes extremely easy to set the working distance as described above, and the rotation angle of the rotary dial body 92 can be adjusted. By setting the change amount of the gap X to be small, it is possible to further improve the setting accuracy of the working distance. Alternatively, it is also possible to perform highly accurate position detection in the vicinity of a plurality of set values.

(考案の効果) 本考案の位置検出装置は、空気ブリツジ回路における比
較空気通路にノズルとフラッパ面とを備えた特殊な可変
絞り手段を器外から操作できるように設けたものであっ
て、物品の位置検出精度を高めることができるばかりで
なく、検出位置の設定が極めて容易となり、しかもかか
る高性能の位置検出装置を経済的に量産することが可能
であるという特長がある。
(Advantages of the Invention) The position detecting device of the present invention is provided with a special variable throttle means having a nozzle and a flapper surface in the comparison air passage in the air bridge circuit so that it can be operated from the outside. Not only can the position detection accuracy be improved, but the detection position can be set very easily, and the high-performance position detecting device can be economically mass-produced.

【図面の簡単な説明】[Brief description of drawings]

第1図は本考案の位置検出装置の例の構造図であり、第
2図はその可変絞り手段の部分の構造および機能を説明
するための模式図である。 第3図は従来公知の位置検出装置における空気ブリッジ
回路を示す図であり、第4図は従来の空気ブリッジ回路
用の可変絞り手段であるニードルバルブの構造図であ
る。 1……空気源、2……第2固定絞り手段、3……第1固
定絞り手段、4……近接位置検知ノズル、5……可変絞
り手段、51……バルブ本体、52……雌ねじ部、53……ニ
ードル、54……雄ねじ部、55……割り溝、8……差圧セ
ンサ、81……比較圧力導入口、82……検知圧力導入口、
83……ダイアフラム、84……金属片、9……可変絞り手
段、91……ノズル、92……回転ダイヤル体、93……フラ
ッパ面、94……回転軸、10……延長空気配管接続口、12
……近接スイッチ、a……比較空気通路、b……検知空
気通路、c……比較圧力通路、d……検知圧力通路、W
……ワーク、X……間隙。
FIG. 1 is a structural diagram of an example of the position detecting device of the present invention, and FIG. 2 is a schematic diagram for explaining the structure and function of the variable diaphragm means. FIG. 3 is a view showing an air bridge circuit in a conventionally known position detecting device, and FIG. 4 is a structural diagram of a needle valve which is a variable throttle means for a conventional air bridge circuit. 1 ... Air source, 2 ... Second fixed throttle means, 3 ... First fixed throttle means, 4 ... Proximity position detection nozzle, 5 ... Variable throttle means, 51 ... Valve body, 52 ... Female thread , 53 ... Needle, 54 ... Male thread, 55 ... Split groove, 8 ... Differential pressure sensor, 81 ... Comparative pressure inlet, 82 ... Detection pressure inlet,
83 …… Diaphragm, 84 …… Metal piece, 9 …… Variable throttle means, 91 …… Nozzle, 92 …… Rotary dial body, 93 …… Flapper surface, 94 …… Rotary shaft, 10 …… Extended air piping connection port , 12
...... Proximity switch, a …… Comparison air passage, b …… Detection air passage, c …… Comparison pressure passage, d …… Detection pressure passage, W
…… Work, X …… Gap.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】空気源から第1固定絞り手段と可変絞り手
段とを経て器外に通ずる比較空気通路と、該空気源から
第2固定絞り手段と近接位置検知ノズル接続口とを経て
器外に通ずる検知空気通路と、該第1固定絞り手段と該
可変絞り手段との中間位置から差圧センサの比較圧力導
入口に通ずる比較圧力通路と、該第2固定絞り手段と該
近接位置検知ノズル接続口との中間位置から該差圧セン
サの検知圧力導入口に通ずる検知圧力通路とからなる空
気ブリッジ回路を有し、前記可変絞り手段が、ノズル
と、該ノズルに対向するフラッパ面と目盛とを周りに設
けた回転ダイヤル体であってその回転角度に対応して該
ノズルと該フラッパ面との間隙が変化するように形成さ
れたものとからなり、前記回転ダイヤル体の外周の一部
が器外に露出していることを特徴とする位置検出装置。
1. A comparison air passage communicating from an air source to the outside of a device via a first fixed throttle means and a variable throttle means, and an outside of the device from the air source to a second fixed throttle means and a proximity position detection nozzle connection port. To the differential pressure sensor from the intermediate position between the first fixed throttle means and the variable throttle means, the second fixed throttle means and the proximity position detection nozzle. The variable throttle means has a nozzle, a flapper surface facing the nozzle, and a scale, the air bridge circuit having a detection pressure passage communicating with a detection pressure introduction port of the differential pressure sensor from an intermediate position with respect to the connection port. And a rotary dial body formed around the nozzle so that the gap between the nozzle and the flapper surface changes according to the rotation angle of the rotary dial body. Exposed outside Position detecting device, characterized in that.
JP1990099053U 1990-09-25 1990-09-25 Position detector Expired - Lifetime JPH0729446Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990099053U JPH0729446Y2 (en) 1990-09-25 1990-09-25 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990099053U JPH0729446Y2 (en) 1990-09-25 1990-09-25 Position detector

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JPH0457708U JPH0457708U (en) 1992-05-18
JPH0729446Y2 true JPH0729446Y2 (en) 1995-07-05

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JP1990099053U Expired - Lifetime JPH0729446Y2 (en) 1990-09-25 1990-09-25 Position detector

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117923B4 (en) * 2000-04-14 2007-03-15 Disco Corp. Semiconductor wafer cutting machine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6443871B1 (en) * 2018-03-28 2018-12-26 日本空圧システム株式会社 Gap adjustment type nozzle valve and position detection device using gap adjustment type nozzle valve

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0239049Y2 (en) * 1981-02-26 1990-10-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10117923B4 (en) * 2000-04-14 2007-03-15 Disco Corp. Semiconductor wafer cutting machine

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JPH0457708U (en) 1992-05-18

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