JPH0726855Y2 - エキシマレーザ装置 - Google Patents

エキシマレーザ装置

Info

Publication number
JPH0726855Y2
JPH0726855Y2 JP1987166297U JP16629787U JPH0726855Y2 JP H0726855 Y2 JPH0726855 Y2 JP H0726855Y2 JP 1987166297 U JP1987166297 U JP 1987166297U JP 16629787 U JP16629787 U JP 16629787U JP H0726855 Y2 JPH0726855 Y2 JP H0726855Y2
Authority
JP
Japan
Prior art keywords
electrode pair
laser
main
preionization
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987166297U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0171457U (cs
Inventor
多見男 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1987166297U priority Critical patent/JPH0726855Y2/ja
Publication of JPH0171457U publication Critical patent/JPH0171457U/ja
Application granted granted Critical
Publication of JPH0726855Y2 publication Critical patent/JPH0726855Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP1987166297U 1987-10-30 1987-10-30 エキシマレーザ装置 Expired - Lifetime JPH0726855Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987166297U JPH0726855Y2 (ja) 1987-10-30 1987-10-30 エキシマレーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987166297U JPH0726855Y2 (ja) 1987-10-30 1987-10-30 エキシマレーザ装置

Publications (2)

Publication Number Publication Date
JPH0171457U JPH0171457U (cs) 1989-05-12
JPH0726855Y2 true JPH0726855Y2 (ja) 1995-06-14

Family

ID=31453555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987166297U Expired - Lifetime JPH0726855Y2 (ja) 1987-10-30 1987-10-30 エキシマレーザ装置

Country Status (1)

Country Link
JP (1) JPH0726855Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182880A (ja) * 1987-01-26 1988-07-28 Toshiba Corp ガスレ−ザ発振装置

Also Published As

Publication number Publication date
JPH0171457U (cs) 1989-05-12

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