JPH0726692Y2 - 薄膜状塗布剤の検査装置 - Google Patents
薄膜状塗布剤の検査装置Info
- Publication number
- JPH0726692Y2 JPH0726692Y2 JP1989094006U JP9400689U JPH0726692Y2 JP H0726692 Y2 JPH0726692 Y2 JP H0726692Y2 JP 1989094006 U JP1989094006 U JP 1989094006U JP 9400689 U JP9400689 U JP 9400689U JP H0726692 Y2 JPH0726692 Y2 JP H0726692Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- coating
- detection
- coated
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011248 coating agent Substances 0.000 title claims description 40
- 238000007689 inspection Methods 0.000 title claims description 26
- 238000009501 film coating Methods 0.000 title claims description 5
- 239000010409 thin film Substances 0.000 title claims description 5
- 238000001514 detection method Methods 0.000 claims description 53
- 238000000576 coating method Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 22
- 238000002834 transmittance Methods 0.000 description 14
- 239000000919 ceramic Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 10
- 239000005357 flat glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989094006U JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989094006U JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0333355U JPH0333355U (enrdf_load_stackoverflow) | 1991-04-02 |
| JPH0726692Y2 true JPH0726692Y2 (ja) | 1995-06-14 |
Family
ID=31643349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989094006U Expired - Lifetime JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726692Y2 (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630650A (en) * | 1979-08-22 | 1981-03-27 | Hitachi Ltd | Automatic chemical analyzer |
| JPS6162844A (ja) * | 1984-09-05 | 1986-03-31 | Sumitomo Bakelite Co Ltd | 半導体樹脂封止成形品の外観表面検査方法 |
| JPS61242666A (ja) * | 1985-04-18 | 1986-10-28 | Sunstar Giken Kk | 薄膜状塗布剤検査装置 |
| JPH01110365U (enrdf_load_stackoverflow) * | 1988-01-19 | 1989-07-25 |
-
1989
- 1989-08-09 JP JP1989094006U patent/JPH0726692Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333355U (enrdf_load_stackoverflow) | 1991-04-02 |
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