JPH0333355U - - Google Patents
Info
- Publication number
- JPH0333355U JPH0333355U JP9400689U JP9400689U JPH0333355U JP H0333355 U JPH0333355 U JP H0333355U JP 9400689 U JP9400689 U JP 9400689U JP 9400689 U JP9400689 U JP 9400689U JP H0333355 U JPH0333355 U JP H0333355U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- light
- inspection device
- thin film
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989094006U JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989094006U JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0333355U true JPH0333355U (enrdf_load_stackoverflow) | 1991-04-02 |
| JPH0726692Y2 JPH0726692Y2 (ja) | 1995-06-14 |
Family
ID=31643349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989094006U Expired - Lifetime JPH0726692Y2 (ja) | 1989-08-09 | 1989-08-09 | 薄膜状塗布剤の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726692Y2 (enrdf_load_stackoverflow) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630650A (en) * | 1979-08-22 | 1981-03-27 | Hitachi Ltd | Automatic chemical analyzer |
| JPS6162844A (ja) * | 1984-09-05 | 1986-03-31 | Sumitomo Bakelite Co Ltd | 半導体樹脂封止成形品の外観表面検査方法 |
| JPS61242666A (ja) * | 1985-04-18 | 1986-10-28 | Sunstar Giken Kk | 薄膜状塗布剤検査装置 |
| JPH01110365U (enrdf_load_stackoverflow) * | 1988-01-19 | 1989-07-25 |
-
1989
- 1989-08-09 JP JP1989094006U patent/JPH0726692Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630650A (en) * | 1979-08-22 | 1981-03-27 | Hitachi Ltd | Automatic chemical analyzer |
| JPS6162844A (ja) * | 1984-09-05 | 1986-03-31 | Sumitomo Bakelite Co Ltd | 半導体樹脂封止成形品の外観表面検査方法 |
| JPS61242666A (ja) * | 1985-04-18 | 1986-10-28 | Sunstar Giken Kk | 薄膜状塗布剤検査装置 |
| JPH01110365U (enrdf_load_stackoverflow) * | 1988-01-19 | 1989-07-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726692Y2 (ja) | 1995-06-14 |