JPH0726363Y2 - インライン式成膜装置 - Google Patents

インライン式成膜装置

Info

Publication number
JPH0726363Y2
JPH0726363Y2 JP7576489U JP7576489U JPH0726363Y2 JP H0726363 Y2 JPH0726363 Y2 JP H0726363Y2 JP 7576489 U JP7576489 U JP 7576489U JP 7576489 U JP7576489 U JP 7576489U JP H0726363 Y2 JPH0726363 Y2 JP H0726363Y2
Authority
JP
Japan
Prior art keywords
substrate
cart
chamber
shield plate
line type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7576489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314148U (no
Inventor
佳興 横山
正義 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7576489U priority Critical patent/JPH0726363Y2/ja
Publication of JPH0314148U publication Critical patent/JPH0314148U/ja
Application granted granted Critical
Publication of JPH0726363Y2 publication Critical patent/JPH0726363Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7576489U 1989-06-28 1989-06-28 インライン式成膜装置 Expired - Lifetime JPH0726363Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7576489U JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7576489U JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0314148U JPH0314148U (no) 1991-02-13
JPH0726363Y2 true JPH0726363Y2 (ja) 1995-06-14

Family

ID=31616628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7576489U Expired - Lifetime JPH0726363Y2 (ja) 1989-06-28 1989-06-28 インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0726363Y2 (no)

Also Published As

Publication number Publication date
JPH0314148U (no) 1991-02-13

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