JPH0726362Y2 - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPH0726362Y2
JPH0726362Y2 JP326989U JP326989U JPH0726362Y2 JP H0726362 Y2 JPH0726362 Y2 JP H0726362Y2 JP 326989 U JP326989 U JP 326989U JP 326989 U JP326989 U JP 326989U JP H0726362 Y2 JPH0726362 Y2 JP H0726362Y2
Authority
JP
Japan
Prior art keywords
vacuum
rod
air cylinder
side valve
lever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP326989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0294252U (enExample
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP326989U priority Critical patent/JPH0726362Y2/ja
Publication of JPH0294252U publication Critical patent/JPH0294252U/ja
Application granted granted Critical
Publication of JPH0726362Y2 publication Critical patent/JPH0726362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP326989U 1989-01-13 1989-01-13 真空処理装置 Expired - Lifetime JPH0726362Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP326989U JPH0726362Y2 (ja) 1989-01-13 1989-01-13 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP326989U JPH0726362Y2 (ja) 1989-01-13 1989-01-13 真空処理装置

Publications (2)

Publication Number Publication Date
JPH0294252U JPH0294252U (enExample) 1990-07-26
JPH0726362Y2 true JPH0726362Y2 (ja) 1995-06-14

Family

ID=31204757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP326989U Expired - Lifetime JPH0726362Y2 (ja) 1989-01-13 1989-01-13 真空処理装置

Country Status (1)

Country Link
JP (1) JPH0726362Y2 (enExample)

Also Published As

Publication number Publication date
JPH0294252U (enExample) 1990-07-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term