JPH072615Y2 - 化合物半導体単結晶成長装置 - Google Patents

化合物半導体単結晶成長装置

Info

Publication number
JPH072615Y2
JPH072615Y2 JP364290U JP364290U JPH072615Y2 JP H072615 Y2 JPH072615 Y2 JP H072615Y2 JP 364290 U JP364290 U JP 364290U JP 364290 U JP364290 U JP 364290U JP H072615 Y2 JPH072615 Y2 JP H072615Y2
Authority
JP
Japan
Prior art keywords
crystal growth
single crystal
heat
compound semiconductor
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP364290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0396354U (cs
Inventor
昌治 中森
秀夫 山田
三千則 和地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP364290U priority Critical patent/JPH072615Y2/ja
Publication of JPH0396354U publication Critical patent/JPH0396354U/ja
Application granted granted Critical
Publication of JPH072615Y2 publication Critical patent/JPH072615Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP364290U 1990-01-18 1990-01-18 化合物半導体単結晶成長装置 Expired - Fee Related JPH072615Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP364290U JPH072615Y2 (ja) 1990-01-18 1990-01-18 化合物半導体単結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP364290U JPH072615Y2 (ja) 1990-01-18 1990-01-18 化合物半導体単結晶成長装置

Publications (2)

Publication Number Publication Date
JPH0396354U JPH0396354U (cs) 1991-10-02
JPH072615Y2 true JPH072615Y2 (ja) 1995-01-25

Family

ID=31507453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP364290U Expired - Fee Related JPH072615Y2 (ja) 1990-01-18 1990-01-18 化合物半導体単結晶成長装置

Country Status (1)

Country Link
JP (1) JPH072615Y2 (cs)

Also Published As

Publication number Publication date
JPH0396354U (cs) 1991-10-02

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