JPH0720839Y2 - イオン処理装置 - Google Patents
イオン処理装置Info
- Publication number
- JPH0720839Y2 JPH0720839Y2 JP4238289U JP4238289U JPH0720839Y2 JP H0720839 Y2 JPH0720839 Y2 JP H0720839Y2 JP 4238289 U JP4238289 U JP 4238289U JP 4238289 U JP4238289 U JP 4238289U JP H0720839 Y2 JPH0720839 Y2 JP H0720839Y2
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- semi
- movable
- fixed stopper
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 42
- 238000010884 ion-beam technique Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4238289U JPH0720839Y2 (ja) | 1989-04-10 | 1989-04-10 | イオン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4238289U JPH0720839Y2 (ja) | 1989-04-10 | 1989-04-10 | イオン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02133858U JPH02133858U (enExample) | 1990-11-07 |
| JPH0720839Y2 true JPH0720839Y2 (ja) | 1995-05-15 |
Family
ID=31553879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4238289U Expired - Lifetime JPH0720839Y2 (ja) | 1989-04-10 | 1989-04-10 | イオン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720839Y2 (enExample) |
-
1989
- 1989-04-10 JP JP4238289U patent/JPH0720839Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02133858U (enExample) | 1990-11-07 |
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