JPH02133858U - - Google Patents

Info

Publication number
JPH02133858U
JPH02133858U JP4238289U JP4238289U JPH02133858U JP H02133858 U JPH02133858 U JP H02133858U JP 4238289 U JP4238289 U JP 4238289U JP 4238289 U JP4238289 U JP 4238289U JP H02133858 U JPH02133858 U JP H02133858U
Authority
JP
Japan
Prior art keywords
semi
stopper
fixed stopper
processing apparatus
ion processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4238289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720839Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4238289U priority Critical patent/JPH0720839Y2/ja
Publication of JPH02133858U publication Critical patent/JPH02133858U/ja
Application granted granted Critical
Publication of JPH0720839Y2 publication Critical patent/JPH0720839Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP4238289U 1989-04-10 1989-04-10 イオン処理装置 Expired - Lifetime JPH0720839Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4238289U JPH0720839Y2 (ja) 1989-04-10 1989-04-10 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4238289U JPH0720839Y2 (ja) 1989-04-10 1989-04-10 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH02133858U true JPH02133858U (enExample) 1990-11-07
JPH0720839Y2 JPH0720839Y2 (ja) 1995-05-15

Family

ID=31553879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4238289U Expired - Lifetime JPH0720839Y2 (ja) 1989-04-10 1989-04-10 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0720839Y2 (enExample)

Also Published As

Publication number Publication date
JPH0720839Y2 (ja) 1995-05-15

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