JPH0720102Y2 - 円板移し替え装置 - Google Patents

円板移し替え装置

Info

Publication number
JPH0720102Y2
JPH0720102Y2 JP1031187U JP1031187U JPH0720102Y2 JP H0720102 Y2 JPH0720102 Y2 JP H0720102Y2 JP 1031187 U JP1031187 U JP 1031187U JP 1031187 U JP1031187 U JP 1031187U JP H0720102 Y2 JPH0720102 Y2 JP H0720102Y2
Authority
JP
Japan
Prior art keywords
tray
disk
transfer section
disc
discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1031187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63119537U (enExample
Inventor
英一 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1031187U priority Critical patent/JPH0720102Y2/ja
Publication of JPS63119537U publication Critical patent/JPS63119537U/ja
Application granted granted Critical
Publication of JPH0720102Y2 publication Critical patent/JPH0720102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP1031187U 1987-01-26 1987-01-26 円板移し替え装置 Expired - Lifetime JPH0720102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1031187U JPH0720102Y2 (ja) 1987-01-26 1987-01-26 円板移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1031187U JPH0720102Y2 (ja) 1987-01-26 1987-01-26 円板移し替え装置

Publications (2)

Publication Number Publication Date
JPS63119537U JPS63119537U (enExample) 1988-08-02
JPH0720102Y2 true JPH0720102Y2 (ja) 1995-05-10

Family

ID=30796485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1031187U Expired - Lifetime JPH0720102Y2 (ja) 1987-01-26 1987-01-26 円板移し替え装置

Country Status (1)

Country Link
JP (1) JPH0720102Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4538883B2 (ja) * 2000-02-25 2010-09-08 株式会社ニコン 平面基板観察装置
JP5999268B2 (ja) * 2013-09-06 2016-09-28 株式会社島津製作所 基板装着姿勢判定装置及び基板装着姿勢判定方法

Also Published As

Publication number Publication date
JPS63119537U (enExample) 1988-08-02

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