JPH0719733Y2 - 真空内搬送機構 - Google Patents

真空内搬送機構

Info

Publication number
JPH0719733Y2
JPH0719733Y2 JP1988129764U JP12976488U JPH0719733Y2 JP H0719733 Y2 JPH0719733 Y2 JP H0719733Y2 JP 1988129764 U JP1988129764 U JP 1988129764U JP 12976488 U JP12976488 U JP 12976488U JP H0719733 Y2 JPH0719733 Y2 JP H0719733Y2
Authority
JP
Japan
Prior art keywords
sample
shaft
pin
slit
slide plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988129764U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249923U (enrdf_load_stackoverflow
Inventor
統徳 坂本
仁志 川浪
昌行 志村
和徳 安藤
研二 大村
茂 脇山
Original Assignee
工業技術院長
株式会社小坂研究所
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, 株式会社小坂研究所, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1988129764U priority Critical patent/JPH0719733Y2/ja
Publication of JPH0249923U publication Critical patent/JPH0249923U/ja
Application granted granted Critical
Publication of JPH0719733Y2 publication Critical patent/JPH0719733Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP1988129764U 1988-10-03 1988-10-03 真空内搬送機構 Expired - Lifetime JPH0719733Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988129764U JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988129764U JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Publications (2)

Publication Number Publication Date
JPH0249923U JPH0249923U (enrdf_load_stackoverflow) 1990-04-06
JPH0719733Y2 true JPH0719733Y2 (ja) 1995-05-10

Family

ID=31384341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988129764U Expired - Lifetime JPH0719733Y2 (ja) 1988-10-03 1988-10-03 真空内搬送機構

Country Status (1)

Country Link
JP (1) JPH0719733Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094486U (ja) * 1983-12-02 1985-06-27 三菱重工業株式会社 ハンド自動交換装置

Also Published As

Publication number Publication date
JPH0249923U (enrdf_load_stackoverflow) 1990-04-06

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