JPH0719139Y2 - 気相成長装置の冷却装置 - Google Patents

気相成長装置の冷却装置

Info

Publication number
JPH0719139Y2
JPH0719139Y2 JP13488685U JP13488685U JPH0719139Y2 JP H0719139 Y2 JPH0719139 Y2 JP H0719139Y2 JP 13488685 U JP13488685 U JP 13488685U JP 13488685 U JP13488685 U JP 13488685U JP H0719139 Y2 JPH0719139 Y2 JP H0719139Y2
Authority
JP
Japan
Prior art keywords
bell jar
cooling
inert gas
cooler
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13488685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244434U (enrdf_load_stackoverflow
Inventor
公弟 岩田
重次 松永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP13488685U priority Critical patent/JPH0719139Y2/ja
Publication of JPS6244434U publication Critical patent/JPS6244434U/ja
Application granted granted Critical
Publication of JPH0719139Y2 publication Critical patent/JPH0719139Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP13488685U 1985-09-03 1985-09-03 気相成長装置の冷却装置 Expired - Lifetime JPH0719139Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13488685U JPH0719139Y2 (ja) 1985-09-03 1985-09-03 気相成長装置の冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13488685U JPH0719139Y2 (ja) 1985-09-03 1985-09-03 気相成長装置の冷却装置

Publications (2)

Publication Number Publication Date
JPS6244434U JPS6244434U (enrdf_load_stackoverflow) 1987-03-17
JPH0719139Y2 true JPH0719139Y2 (ja) 1995-05-01

Family

ID=31036552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13488685U Expired - Lifetime JPH0719139Y2 (ja) 1985-09-03 1985-09-03 気相成長装置の冷却装置

Country Status (1)

Country Link
JP (1) JPH0719139Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171388A (ja) * 2008-12-25 2010-08-05 Hitachi Kokusai Electric Inc 基板処理装置及び半導体装置の製造方法及び基板処理用反応管

Also Published As

Publication number Publication date
JPS6244434U (enrdf_load_stackoverflow) 1987-03-17

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