JPH0719015Y2 - Ｉｃ試験用恒温槽装置 - Google Patents

Ｉｃ試験用恒温槽装置

Info

Publication number
JPH0719015Y2
JPH0719015Y2 JP14671389U JP14671389U JPH0719015Y2 JP H0719015 Y2 JPH0719015 Y2 JP H0719015Y2 JP 14671389 U JP14671389 U JP 14671389U JP 14671389 U JP14671389 U JP 14671389U JP H0719015 Y2 JPH0719015 Y2 JP H0719015Y2
Authority
JP
Japan
Prior art keywords
constant temperature
head
tray
tested
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14671389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0385586U (enExample
Inventor
信行 千葉
釼平 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP14671389U priority Critical patent/JPH0719015Y2/ja
Publication of JPH0385586U publication Critical patent/JPH0385586U/ja
Application granted granted Critical
Publication of JPH0719015Y2 publication Critical patent/JPH0719015Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14671389U 1989-12-20 1989-12-20 Ｉｃ試験用恒温槽装置 Expired - Lifetime JPH0719015Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14671389U JPH0719015Y2 (ja) 1989-12-20 1989-12-20 Ｉｃ試験用恒温槽装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14671389U JPH0719015Y2 (ja) 1989-12-20 1989-12-20 Ｉｃ試験用恒温槽装置

Publications (2)

Publication Number Publication Date
JPH0385586U JPH0385586U (enExample) 1991-08-29
JPH0719015Y2 true JPH0719015Y2 (ja) 1995-05-01

Family

ID=31693260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14671389U Expired - Lifetime JPH0719015Y2 (ja) 1989-12-20 1989-12-20 Ｉｃ試験用恒温槽装置

Country Status (1)

Country Link
JP (1) JPH0719015Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2010007653A1 (ja) * 2008-07-14 2012-01-05 株式会社アドバンテスト ソケットガイド、ソケット、プッシャおよび電子部品試験装置

Also Published As

Publication number Publication date
JPH0385586U (enExample) 1991-08-29

Similar Documents

Publication Publication Date Title
CN1920585B (zh) 基板检查装置
US7046025B2 (en) Test apparatus for testing substrates at low temperatures
KR100542126B1 (ko) 반도체 소자 테스트 핸들러
CN107431039A (zh) 基板保持方法、基板保持装置、处理方法和处理装置
JPH07239362A (ja) 浮動機構つき吸着ハンドおよび搬送接触機構
JP2002303650A (ja) 半導体素子テストハンドラーのインデックスヘッド
CN102445573A (zh) 晶片检查装置和探针卡的预热方法
JPH10227828A (ja) Ｉｃ試験装置
US10605829B2 (en) Transfer unit and prober
JP7267111B2 (ja) 位置決め機構及び位置決め方法
KR20210130204A (ko) 기판 보지 장치 및 기판 흡착 방법
US8933703B2 (en) Systems and methods for facilitating use of a universal test connection for a plurality of different devices
JPH0719015Y2 (ja) Ｉｃ試験用恒温槽装置
JPS63148623A (ja) 基板温度測定装置
KR102012797B1 (ko) 열풍을 이용한 프로브 카드 예열이 가능한 웨이퍼 프로버
US20150008948A1 (en) Prober for testing devices in a repeat structure on a substrate
KR100411296B1 (ko) 핸들러용 디바이스 발열 보상장치
JP2016180680A (ja) プローブカード型温度センサ
JPH0652225B2 (ja) 複合環境試験装置
CN100554952C (zh) 集成电路检测机
KR102662419B1 (ko) 온도 조절 모듈 및 이를 포함하는 테스트 핸들러
JP3035216B2 (ja) シール着脱式振動環境試験装置
TWI405983B (zh) Substrate inspection device and substrate inspection method
JP2003042852A (ja) 基板の接触式温度測定装置およびそれを備えた基板の熱処理装置
JPS63237285A (ja) 磁気バブルメモリ素子用試験装置