JPH07188901A - Coated hard alloy - Google Patents

Coated hard alloy

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Publication number
JPH07188901A
JPH07188901A JP34996993A JP34996993A JPH07188901A JP H07188901 A JPH07188901 A JP H07188901A JP 34996993 A JP34996993 A JP 34996993A JP 34996993 A JP34996993 A JP 34996993A JP H07188901 A JPH07188901 A JP H07188901A
Authority
JP
Japan
Prior art keywords
film
coating
solid solution
hard alloy
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP34996993A
Other languages
Japanese (ja)
Other versions
JP3546967B2 (en
Inventor
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP34996993A priority Critical patent/JP3546967B2/en
Publication of JPH07188901A publication Critical patent/JPH07188901A/en
Application granted granted Critical
Publication of JP3546967B2 publication Critical patent/JP3546967B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PURPOSE:To reduce the residual compressive stress of an alloy, to increase the adhesiveness of a film, furthermore to improve the peeling resistance of a coated tool and simultaneously to thicken the film by adding elements having hardness lower than that of TiN and TiAlN and allowing the same to enter into solid solution. CONSTITUTION:In the case the compsn. of a film of a film hard alloy of coating hard metal in which a part of Ti in the hard film with 0.5 to 10mum film thickness consisting essentially of Ti and Al and/or the nitrides and carbides of the solid solution thereof is substituted by Fe-based metal and/or Cr is expressed by (TiaAlbFe-based cCrd), (a), (b), (c), (d) and (x) are respectively regulated to the ranges of a+b+c+d=1, a; 0.3 to 0.7, b; 0.3 to 0.7, c; 0.01 to 0.2, d; 0 to 0.1 and x; 0 to 1. Thus, the defect of the high residual stress of a PVD film is improved, by which the service life of a coated cutting tool can be prolonged.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本願発明は、耐摩耗性、耐欠損性
に優れる切削工具として用いられる被覆切削工具部材及
び耐摩耗工具として用いられる被覆耐摩部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coated cutting tool member used as a cutting tool having excellent wear resistance and fracture resistance and a coated wear resistant member used as a wear resistant tool.

【0002】[0002]

【従来の技術】従来PVD法による硬質皮膜は、TiN
が主流であったが、最近TiCN膜があるいは(TiA
l)Nといった新しい種類の皮膜が開発され注目されて
きている。TiCNはビッカース硬さが3000近くあ
り、TiNのビッカース硬さ2200に比べ格段に硬く
耐摩耗性を著しく高める効果も持つ。一方(TiAl)
NはTiとAlの比率により異なるが、概略2300〜
2800のビッカース硬さを有し、TiNに比べ耐摩耗
性を高める一方耐酸化性が著しく優れるため刃先が高温
になる切削条件下などで優れた特性を発揮するものであ
る。
2. Description of the Related Art Conventional hard coatings made by PVD are made of TiN.
Was the mainstream, but recently the TiCN film was replaced by (TiA
l) A new type of coating such as N has been developed and has been attracting attention. TiCN has a Vickers hardness of about 3000, which is significantly harder than the Vickers hardness of 2200 of TiN, and also has the effect of significantly increasing wear resistance. On the other hand (TiAl)
N varies depending on the ratio of Ti and Al, but is generally 2300
Since it has a Vickers hardness of 2800 and improves wear resistance as compared with TiN, but has extremely excellent oxidation resistance, it exhibits excellent characteristics under cutting conditions where the cutting edge has a high temperature.

【0003】又、(TiAl)N膜の皮膜の改善として
Ti/Alの比率を限定した特公平5−67705号
や、(TiAlZr)N、(TiAlV)Nといった更
に多元系の皮膜にした米国特許4871434号等が提
案され、更に改善が計られている。しかしながらこれら
の新しい皮膜は、上述の長所を有するものの皮膜に残留
する圧縮応力がTiN皮膜の1.5倍以上と高く、次の
ような種々の問題点を有するものである。
Further, in order to improve the film of the (TiAl) N film, Japanese Patent Publication No. 5-67705 in which the ratio of Ti / Al is limited, and further multi-component films such as (TiAlZr) N and (TiAlV) N are used in US patents. No. 4,871,434 has been proposed and further improvements are being made. However, these new coatings have the above-mentioned advantages, but the residual compressive stress in the coating is as high as 1.5 times or more that of the TiN coating, and they have the following various problems.

【0004】[0004]

【発明が解決しようとする課題】皮膜の密着力は、皮膜
の残留圧縮応力が高くなるほど弱くなるものであり、こ
れら新しい皮膜はその密着性がTiNに比べ劣るもので
ある。又、この残留応力が高いことは皮膜の密着性を悪
くするだけでなく、膜厚が厚くなるに従い残留応力が増
加するため皮膜の厚膜化への技術上の障害ともなり厚膜
化が実現されていないのも現状である。
The adhesion of the coating becomes weaker as the residual compressive stress of the coating becomes higher, and the adhesion of these new coatings is inferior to that of TiN. In addition, the high residual stress not only deteriorates the adhesion of the film, but also increases the residual stress as the film thickness increases, which is a technical obstacle to thickening the film and realizes thickening. The current situation is that it has not been done.

【0005】残留圧縮応力を低減する最も簡単な方法
は、被覆工程における被覆パラメーターを変更すること
が考えられる。本発明者は、アークイオン放電法により
鋼基板上へTiNを3μm成膜する場合、被覆パラメー
ターである窒系分圧、バイアス電圧の残留圧縮応力を調
べてみたところ、バイアス電圧−50Vにおいては−2
GPa、同一−100Vにおいては−5GPaの残留圧
縮応力を示した。又、窒系分圧を10-1Pa下において
は−1GPa、同100Paにおいては−2GPaの残
留圧縮応力を示した。この様に皮膜パラメーターを変え
ることにより容易に残留圧縮応力は変更可能ではある
が、アークイオン放電法やホロカリートほう等において
は、それぞれの最適なパラメーターの範囲を有するこ
と、及びパラメーターの変更により成膜される皮膜の膜
特性が全く異なってしまうことの理由により、事実上、
パラメーターを変更することにより残留圧縮応力を低減
することは不可能であった。
The simplest way to reduce the residual compressive stress is to modify the coating parameters in the coating process. The inventors of the present invention have examined the nitrogen partial pressure and the residual compressive stress of the bias voltage, which are coating parameters, when TiN is deposited to a thickness of 3 μm on a steel substrate by the arc ion discharge method. Two
The residual compressive stress of −5 GPa was exhibited at the same GPa of −100 V. Further, in the 10 -1 Pa under the窒系partial pressure -1 GPa, in the 10 0 Pa showed residual compressive stress of -2GPa. Although the residual compressive stress can be easily changed by changing the film parameters in this way, the arc ion discharge method and the holocalitate method have the respective optimum parameter ranges and the film formation by changing the parameters. Due to the fact that the film properties of the applied film are completely different,
It was not possible to reduce the residual compressive stress by changing the parameters.

【0006】[0006]

【本発明の目的】本発明は上述の残留圧縮応力が高い欠
点を改善し、残留圧縮応力を低減することにより皮膜の
密着性を高め、強いては被覆工具の耐剥離性を改善する
と同時に厚膜化をも可能とする技術を提供するものであ
る。
The object of the present invention is to improve the above-mentioned drawbacks of high residual compressive stress, improve the adhesion of the coating by reducing the residual compressive stress, and at the same time improve the peeling resistance of the coated tool and at the same time increase the thickness of the thick film It provides a technology that makes it possible.

【0007】[0007]

【課題を解決するための手段】そこで本発明は、(Ti
Al)Nを基本にこれに各種元素を添加する検討を行っ
た結果、次のような知見を得た。表1は3μm(TiA
l)N皮膜をアークイオンプレーティング法により、バ
イアス電圧120V窒系圧力10-1Paの条件下で成膜
するときに種々の元素を添加した場合の残留圧縮応力を
3μmのTiNの残留圧縮応力を1とした場合のそれぞ
れの残留圧縮応力を示す。
Therefore, the present invention is based on (Ti
As a result of studying addition of various elements to Al) N as a basis, the following findings were obtained. Table 1 shows 3 μm (TiA
l) The residual compressive stress when various elements are added when the N film is formed by the arc ion plating method under the condition of bias voltage of 120 V and nitrogen pressure of 10 -1 Pa. The respective residual compressive stress when 1 is set to 1 are shown.

【0008】[0008]

【表1】 [Table 1]

【0009】表1より(TiAl)N皮膜中に軟質金属
を分散、または固溶体化させることにより、膜中の残留
応力が減少する傾向があることがわかる。よって、本願
発明は、主成分としてTiとAl及び/またはその固溶
体の窒化物、炭窒化物より構成された0.5〜10μm
の膜厚から成る硬質皮膜のTiの1部をFe族金属及び
/またはCrで置換した被覆硬質合金の該皮膜組成をモ
ル比において、(Tia Alb Fe族c Crd)Cx
1-xと表した場合、a、b、c、d、xがそれぞれ a+b+c+d=1 0.3 ≦a≦0.7 0.3 ≦b≦0.7 0.01≦c≦0.2 0 ≦d≦0.1 0 ≦x≦1 より成る皮膜であり、さらにそれらの皮膜を5層以上の
多層にして、厚膜化を達成したものである。
It can be seen from Table 1 that the residual stress in the film tends to decrease by dispersing the soft metal in the (TiAl) N film or by making it into a solid solution. Therefore, in the present invention, 0.5 to 10 μm composed of Ti and Al and / or their solid solution nitrides and carbonitrides as main components.
In a molar ratio, the coating composition of the coated hard alloy in which a part of Ti of the hard coating having the film thickness of 1 is replaced by Fe group metal and / or Cr is (Ti a Al b Fe group c Cr d ) C x N
When expressed as 1-x , a, b, c, d, and x are respectively a + b + c + d = 1 0.3 ≤ a ≤ 0.7 0.3 ≤ b ≤ 0.7 0.01 ≤ c ≤ 0.2 0 ≦ d ≦ 0.1 0 ≦ x ≦ 1 and the film is made thicker by forming the film into a multilayer of 5 or more layers.

【0010】[0010]

【作用】(TiAl)化合物の皮膜中にFe族、Crを
添加することにより、膜中の残留応力を減少させ、膜の
耐衝撃性、特に断続切削等の機械的な衝撃に対しても剥
離しにくい膜となる。さらに、Fe族の場合には合金化
したターゲットを使用するとAlの一部を(CoA
l)、(NiAl)等の化合物として形成でき皮膜の耐
摩耗性、耐酸化性等をも合わせて改善できる。Cr族の
場合も同様な効果があり耐酸化性・耐熱性等が改善され
る。以下、数値限定した理由に付いて説明する。
[Function] By adding Fe group and Cr to the (TiAl) compound film, the residual stress in the film is reduced, and the film is also resistant to impact, especially against mechanical impact such as intermittent cutting. It becomes a film that is difficult to do. Furthermore, in the case of the Fe group, a part of Al (CoA
It can be formed as a compound such as l) or (NiAl), and the wear resistance and oxidation resistance of the film can be improved together. The same effect can be obtained in the case of the Cr group, and the oxidation resistance and heat resistance are improved. The reason for limiting the numerical values will be described below.

【0011】(TiAl)化合物膜中に固溶体/混合体
として添加するFe族は、0.01未満では残留応力を
低減するのに十分な効果がなく、0.2を越えると皮膜
中のFe族の量が多くなりすぎ耐摩耗性、耐溶着性等が
劣化するため0.01≦c≦0.2の範囲とした。ま
た、(TiAl)化合物膜中に固溶体/混合体として添
加するCrはFe族の含有量とも相関するが、Fe族と
合金化させてその耐酸化性等を高めるものであり、0.
1を越えて添加すると皮膜中のCrの量が多くなりすぎ
残留応力の低減に十分な効果がなくなるため0≦d≦
0.1の範囲とした。尚、上記の元素はターゲット材と
して固溶体化しても、また各元素を個別のターゲットと
して蒸着時に成分を調整してもさらに固溶体ターゲット
と個別ターゲットを組み合わせても同様の効果をそうす
る。
If the Fe group added as a solid solution / mixture in the (TiAl) compound film is less than 0.01, there is no sufficient effect to reduce the residual stress, and if it exceeds 0.2, the Fe group in the film is present. Therefore, the wear resistance, the welding resistance and the like are deteriorated, so that 0.01 ≦ c ≦ 0.2 is set. Further, although Cr added as a solid solution / mixture in the (TiAl) compound film correlates with the Fe group content, it is alloyed with the Fe group to enhance its oxidation resistance and the like.
If it is added in excess of 1, the amount of Cr in the film becomes too large and there is no sufficient effect for reducing the residual stress, so 0 ≦ d ≦
The range was 0.1. The same effect can be obtained even when the above-mentioned elements are made into a solid solution as a target material, or when each element is used as an individual target to adjust the components at the time of vapor deposition, or when the solid solution target and the individual target are further combined.

【0012】皮膜中のCNの比率は、0≦x≦1、すな
わち炭化物、窒化物、炭窒化物の範囲としたのは、(T
iAl)膜中に固溶体/混合体として添加したFe族、
Crの効果により応力が緩和されるため、硬さの高い炭
化物でも十分に使用でき、また硬さのやや低い窒化物、
炭窒化物においてもFe族、Crの量を調整することに
より十分な性能を有するため0≦x≦1の範囲とした。
以下、実施例により本願発明を詳細に説明する。
The ratio of CN in the film is 0 ≦ x ≦ 1, that is, the range of carbides, nitrides and carbonitrides is (T
iAl) Fe group added as a solid solution / mixture in the film,
Since the stress is relaxed by the effect of Cr, even carbides with high hardness can be sufficiently used, and nitrides with slightly lower hardness,
The carbonitride also has sufficient performance by adjusting the amounts of Fe group and Cr, so the range was set to 0 ≦ x ≦ 1.
Hereinafter, the present invention will be described in detail with reference to Examples.

【0013】[0013]

【実施例】84WC−3TiC−1TiN−3TaC−
9Coの組成になるよう市販の2.5μmのWC粉末、
1.5μmのTiC粉末、同TiN粉末、1.2μmの
TaC粉末をボールミルにて96時間混合し、乾燥造粒
の後、SNMA432のTAインサートをプレスし、焼
結後、所定の形状に加工した。この超硬合金基体上にP
VD法により、各種合金ターゲット、各元素単独のター
ゲットを用意し、表2に示すような皮膜を形成した。
尚、比較のため従来例で記載した膜に付いても行った。
次いで、これらの皮膜をスクラッチテスターにより、0
から徐々に荷重を上げ、引っかいていき、膜が剥離する
荷重を求めた。それらの結果を表2に示す。
EXAMPLE 84WC-3TiC-1TiN-3TaC-
Commercially available 2.5 μm WC powder with a composition of 9Co,
1.5 μm TiC powder, the same TiN powder and 1.2 μm TaC powder were mixed in a ball mill for 96 hours, dried and granulated, and then the TA insert of SNMA432 was pressed, sintered and processed into a predetermined shape. . P on this cemented carbide substrate
Various alloy targets and targets containing each element alone were prepared by the VD method, and the coatings shown in Table 2 were formed.
For comparison, the film described in the conventional example was also attached.
Then, these coatings are scratched with a scratch tester.
Then, the load was gradually increased and scratched, and the load for peeling the film was determined. The results are shown in Table 2.

【0014】[0014]

【表2】 [Table 2]

【0015】叉、下記に示す工具が繰り返し衝撃を受け
る切削条件にて切削テストを行い最大摩耗が0.2mm
に達するまでの寿命時間を求め、その結果を表2に示
す。 切削条件 被削材 (4つ溝付き丸棒)S50C
Hs32 切削速度 200m/min 送り 0.15mm/rev 切込み 2mm 切削油 なし
In addition, a cutting test was conducted under the cutting conditions in which the following tools were repeatedly subjected to impact, and the maximum wear was 0.2 mm.
The service life time until the temperature reaches the value is obtained, and the results are shown in Table 2. Cutting conditions Work material (round bar with 4 grooves) S50C
Hs32 Cutting speed 200m / min Feed 0.15mm / rev Depth of cut 2mm No cutting oil

【0016】表2の結果により、スクラッチ荷重におい
ては明確に違いがでていないが、機械的衝撃が加わる耐
衝撃性の試験では使用初期に剥離を生じて、異状摩耗を
きたしたことが分かる。なお、実施例では窒化物の皮膜
を使用したが、蒸着時の雰囲気を窒素、メタン等の分圧
を調整することにより様々な組成比率の炭窒化物の製作
も可能である。
From the results shown in Table 2, it can be seen that there is no clear difference in the scratch load, but in the impact resistance test in which a mechanical impact is applied, peeling occurred at the initial stage of use, causing abnormal wear. Although a nitride film was used in the examples, carbonitrides having various composition ratios can be manufactured by adjusting the partial pressure of nitrogen, methane, etc. in the atmosphere during vapor deposition.

【0017】[0017]

【発明の効果】本発明の被覆硬質合金は、従来のTi
N、TiAlNに比べ、硬さの低い元素を添加/固溶さ
せることにより、耐摩耗性・耐機械的衝撃性に優れ、格
段に長い工具寿命が得られるものである。また、本発明
は超硬合金を主に説明してきたがTiCN基サーメット
に適用した場合にも優れた効果を現すことは自明であ
る。
The coated hard alloy of the present invention is the same as the conventional Ti alloy.
By adding / solid-solving an element having a lower hardness than N and TiAlN, the wear resistance and mechanical shock resistance are excellent, and a significantly long tool life can be obtained. Further, although the present invention has mainly described cemented carbide, it is self-evident that the present invention also exhibits excellent effects when applied to a TiCN-based cermet.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 主成分としてTiとAl及び/またはそ
の固溶体の窒化物、炭窒化物より構成された0.5〜1
0μmの膜厚から成る硬質皮膜のTiの1部をFe族金
属及び/またはCrで置換した被覆硬質合金の該皮膜組
成をモル比において、 (Tia Alb Fe族c Crd)Cx1-x と表した場合、a、b、c、d、xがそれぞれ a+b+c+d=1 0.3 ≦a≦0.7 0.3 ≦b≦0.7 0.01≦c≦0.2 0 ≦d≦0.1 0 ≦x≦1 より成る範囲の皮膜であることを特徴とする被覆硬質合
金。
1. 0.5 to 1 composed mainly of nitride and carbonitride of Ti and Al and / or a solid solution thereof.
In a molar ratio, the coating composition of the coating hard alloy obtained by substituting a part of Ti of the hard coating having a thickness of 0 μm with the Fe group metal and / or Cr is (Ti a Al b Fe group c Cr d ) C x N When expressed as 1-x , a, b, c, d, and x are respectively a + b + c + d = 1 0.3 ≤ a ≤ 0.7 0.3 ≤ b ≤ 0.7 0.01 ≤ c ≤ 0.2 0 A coated hard alloy, which is a coating in the range of ≦ d ≦ 0.1 0 ≦ x ≦ 1.
【請求項2】 請求項1記載の被覆硬質合金において、
Tiの一部をFe及び/またはCrで置換された(Ti
FeCr)の窒化物、炭窒化物の層とAlの窒化物から
成る層を5層以上の多層にしたことを特徴とする被覆硬
質合金。
2. The coated hard alloy according to claim 1, wherein
A part of Ti is replaced with Fe and / or Cr (Ti
FeCr) nitride, carbonitride layer and Al nitride layer are formed into a multilayer of 5 or more layers.
JP34996993A 1993-12-28 1993-12-28 Coated hard alloy Expired - Fee Related JP3546967B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publications (2)

Publication Number Publication Date
JPH07188901A true JPH07188901A (en) 1995-07-25
JP3546967B2 JP3546967B2 (en) 2004-07-28

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Country Status (1)

Country Link
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KR100391501B1 (en) * 2001-07-20 2003-07-12 한국야금 주식회사 A TiAlN origin multi-layer coated to cemented carbide tool
US6824601B2 (en) 2000-12-28 2004-11-30 Kobe Steel, Ltd. Hard film for cutting tools, cutting tool coated with hard film, process for forming hard film, and target used to form hard film
JP2007229919A (en) * 2007-04-10 2007-09-13 Oc Oerlikon Balzers Ag Tool having protection layer system
US7732066B2 (en) 2001-12-26 2010-06-08 Sumitomo Electric Industries, Ltd. Surface-coated machining tools
US7838132B2 (en) 2004-09-10 2010-11-23 Sandvik Intellectual Property Ab PVD-coated cutting tool insert
US8304098B2 (en) 2007-10-12 2012-11-06 Hitachi Tool Engineering, Ltd. Hard-coated member, and its production method

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JPH09256138A (en) * 1996-03-19 1997-09-30 Kobe Steel Ltd Titanium-base alloy member excellent in oxidation resistance and wear resistance
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US7186324B2 (en) 2000-12-28 2007-03-06 Kabushiki Kaisha Kobe Seiko Sho Hard film cutting tools, cutting tool coated with hard film, process for forming hard film and target used to form hard film
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