JPH0717153Y2 - 静電チャック装置 - Google Patents

静電チャック装置

Info

Publication number
JPH0717153Y2
JPH0717153Y2 JP1988093775U JP9377588U JPH0717153Y2 JP H0717153 Y2 JPH0717153 Y2 JP H0717153Y2 JP 1988093775 U JP1988093775 U JP 1988093775U JP 9377588 U JP9377588 U JP 9377588U JP H0717153 Y2 JPH0717153 Y2 JP H0717153Y2
Authority
JP
Japan
Prior art keywords
electrostatic chuck
electrode
wafer
chuck device
ground potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988093775U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215735U (OSRAM
Inventor
篤 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1988093775U priority Critical patent/JPH0717153Y2/ja
Publication of JPH0215735U publication Critical patent/JPH0215735U/ja
Application granted granted Critical
Publication of JPH0717153Y2 publication Critical patent/JPH0717153Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Jigs For Machine Tools (AREA)
  • Wire Bonding (AREA)
JP1988093775U 1988-07-15 1988-07-15 静電チャック装置 Expired - Lifetime JPH0717153Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988093775U JPH0717153Y2 (ja) 1988-07-15 1988-07-15 静電チャック装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988093775U JPH0717153Y2 (ja) 1988-07-15 1988-07-15 静電チャック装置

Publications (2)

Publication Number Publication Date
JPH0215735U JPH0215735U (OSRAM) 1990-01-31
JPH0717153Y2 true JPH0717153Y2 (ja) 1995-04-19

Family

ID=31318250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988093775U Expired - Lifetime JPH0717153Y2 (ja) 1988-07-15 1988-07-15 静電チャック装置

Country Status (1)

Country Link
JP (1) JPH0717153Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103222043B (zh) * 2010-09-08 2016-10-12 恩特格林斯公司 一种高传导静电夹盘

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142654A (ja) * 1986-12-04 1988-06-15 Sumitomo Metal Ind Ltd 静電吸着装置

Also Published As

Publication number Publication date
JPH0215735U (OSRAM) 1990-01-31

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