JPH0714864Y2 - 半導体耐久試験用の液槽式前処理装置 - Google Patents
半導体耐久試験用の液槽式前処理装置Info
- Publication number
- JPH0714864Y2 JPH0714864Y2 JP1990103033U JP10303390U JPH0714864Y2 JP H0714864 Y2 JPH0714864 Y2 JP H0714864Y2 JP 1990103033 U JP1990103033 U JP 1990103033U JP 10303390 U JP10303390 U JP 10303390U JP H0714864 Y2 JPH0714864 Y2 JP H0714864Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- storage tank
- test
- chamber
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990103033U JPH0714864Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990103033U JPH0714864Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0459451U JPH0459451U (enrdf_load_stackoverflow) | 1992-05-21 |
JPH0714864Y2 true JPH0714864Y2 (ja) | 1995-04-10 |
Family
ID=31847759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990103033U Expired - Lifetime JPH0714864Y2 (ja) | 1990-09-27 | 1990-09-27 | 半導体耐久試験用の液槽式前処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0714864Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5769653B2 (ja) * | 2012-03-12 | 2015-08-26 | 三菱電機株式会社 | 熱処理装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60263836A (ja) * | 1984-06-12 | 1985-12-27 | Nippon Saamic:Kk | 液槽式熱衝撃試験装置 |
JP2690970B2 (ja) * | 1988-10-03 | 1997-12-17 | タバイエスペック株式会社 | 液槽式環境試験装置 |
-
1990
- 1990-09-27 JP JP1990103033U patent/JPH0714864Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0459451U (enrdf_load_stackoverflow) | 1992-05-21 |
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