JPH07139919A - 二面の平行度を測定する方法及び装置 - Google Patents
二面の平行度を測定する方法及び装置Info
- Publication number
- JPH07139919A JPH07139919A JP6164917A JP16491794A JPH07139919A JP H07139919 A JPH07139919 A JP H07139919A JP 6164917 A JP6164917 A JP 6164917A JP 16491794 A JP16491794 A JP 16491794A JP H07139919 A JPH07139919 A JP H07139919A
- Authority
- JP
- Japan
- Prior art keywords
- reflected
- light beam
- beam portion
- reflected beam
- parallelism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 17
- 238000005259 measurement Methods 0.000 title 1
- 238000009877 rendering Methods 0.000 claims description 2
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US082647 | 1993-06-28 | ||
| US08/082,647 US5461472A (en) | 1993-06-28 | 1993-06-28 | Method and apparatus for measuring the parallelism of two surfaces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07139919A true JPH07139919A (ja) | 1995-06-02 |
Family
ID=22172491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6164917A Pending JPH07139919A (ja) | 1993-06-28 | 1994-06-24 | 二面の平行度を測定する方法及び装置 |
Country Status (5)
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6301007B1 (en) * | 1998-05-29 | 2001-10-09 | The Regents Of The University Of California | Machine tool locator |
| US6633387B1 (en) * | 1999-10-07 | 2003-10-14 | Mitutoyo Corporation | Method and apparatus for measuring opposite surfaces |
| RU2180727C2 (ru) * | 2000-03-22 | 2002-03-20 | Серов Владимир Георгиевич | Фотоэлектрический автоколлимационный датчик крена |
| US6674521B1 (en) * | 2000-05-12 | 2004-01-06 | The Regents Of The University Of Michigan | Optical method and system for rapidly measuring relative angular alignment of flat surfaces |
| KR20020033297A (ko) * | 2000-10-30 | 2002-05-06 | 남희영 | 게임영역 확장형 바둑게임 관리 유니트 및 이를 이용한바둑게임 관리방법 |
| US7298487B2 (en) * | 2002-04-15 | 2007-11-20 | Delta Dansk Elektronik, Lys & Akustik | Method and apparatus for measuring light reflections of an object |
| JP2004317424A (ja) * | 2003-04-18 | 2004-11-11 | Pioneer Electronic Corp | オートコリメータ |
| US7327452B2 (en) * | 2004-08-09 | 2008-02-05 | Credence Systems Corporation | Light beam apparatus and method for orthogonal alignment of specimen |
| RU2384811C1 (ru) * | 2008-11-17 | 2010-03-20 | Федеральное государственное унитарное предприятие Научно-исследовательский институт комплексных испытаний оптико-электронных приборов и систем (ФГУП НИИКИ ОЭП) | Автоколлиматор для измерения угла скручивания |
| US8467054B2 (en) * | 2009-01-23 | 2013-06-18 | University Of Washington | Virtual core flow cytometry |
| RU2408840C1 (ru) * | 2009-10-29 | 2011-01-10 | Российская Федерация, от имени которой выступает Министерство обороны Российской Федерации | Устройство определения пространственной ориентации объектов |
| KR101371945B1 (ko) | 2013-02-05 | 2014-03-12 | 순천대학교 산학협력단 | 롤 평행도 측정 장치 |
| WO2018109218A1 (en) | 2016-12-16 | 2018-06-21 | Universität Basel | Apparatus and method for determining the orientation and position of two rigid bodies |
| US10855981B2 (en) * | 2018-09-07 | 2020-12-01 | Trw Automotive U.S. Llc | Testing module for fixed focus camera module evaluation |
| CN109387162A (zh) * | 2018-12-08 | 2019-02-26 | 中国航空工业集团公司洛阳电光设备研究所 | 一种平面平行度批量测量方法 |
| CN110207623A (zh) * | 2019-06-27 | 2019-09-06 | 东莞市宇瞳光学科技股份有限公司 | 平行度测量装置及方法、打压机平行度测量系统及方法 |
| KR102155059B1 (ko) | 2019-09-24 | 2020-09-11 | 한국생산기술연구원 | 대상물 평행도 교정장치 및 이의 작동방법 |
| CN111426334A (zh) * | 2020-03-25 | 2020-07-17 | 中船九江精达科技股份有限公司 | 一种实现工作台面高精密水平基准调平方法及其调平装置 |
| IL309527B2 (en) * | 2021-07-26 | 2024-09-01 | Lumus Ltd | Methods and systems for validating parallelism between internal facets |
| GB2614526A (en) * | 2021-11-16 | 2023-07-12 | Element Six Tech Ltd | Method and apparatus for processing diamond surface |
| KR20230167994A (ko) | 2022-06-03 | 2023-12-12 | 삼성전자주식회사 | 평행도 측정용 광학 어셈블리, 이를 포함한 광학 장치, 다이 본딩 시스템 및 이를 이용한 다이 본딩 방법 |
| CN115683578B (zh) * | 2022-10-12 | 2025-09-02 | 河南驭波科技有限公司 | 一种非接触测量不透光光学平面零件平行和垂直的方法 |
| CN119223166B (zh) * | 2024-12-04 | 2025-03-14 | 杭州泓芯微半导体有限公司 | 轨道式端板尺寸跳动检测装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0055884A3 (en) * | 1980-09-16 | 1983-03-30 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Optical instrument for measuring the divergence of two approximately colinear optical axes |
| US4560274A (en) * | 1983-04-27 | 1985-12-24 | Rca Corporation | Optical alignment for workpiece |
| JPS60220807A (ja) * | 1984-04-17 | 1985-11-05 | Agency Of Ind Science & Technol | ロ−リングも測定できるオ−トコリメ−タ用反射鏡 |
| DE3624253A1 (de) * | 1986-07-18 | 1988-01-21 | Krupp Gmbh | Fotoelektrisch abgetasteter kollimator |
| US4774405A (en) * | 1987-05-26 | 1988-09-27 | The United States Of America As Represented By The Secretary Of The Air Force | Real time autocollimator device for aligning two surfaces in parallel |
| FR2627874B1 (fr) * | 1988-02-29 | 1995-06-16 | Framatome Sa | Systeme d'alignement d'un faisceau de puissance |
| FR2657959B1 (fr) * | 1990-02-06 | 1992-04-30 | Superba Sa | Procede et dispositif pour mesurer la torsion d'un fil textile. |
| US5144486A (en) * | 1990-10-01 | 1992-09-01 | Spectra-Physics Laserplane, Inc. | Laser beam apparatus for providing multiple reference beams |
-
1993
- 1993-06-28 US US08/082,647 patent/US5461472A/en not_active Expired - Fee Related
-
1994
- 1994-03-16 TW TW083102280A patent/TW272255B/zh active
- 1994-06-15 EP EP94304327A patent/EP0631107A1/en not_active Ceased
- 1994-06-24 JP JP6164917A patent/JPH07139919A/ja active Pending
- 1994-06-27 KR KR1019940014802A patent/KR950001978A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP0631107A1 (en) | 1994-12-28 |
| KR950001978A (ko) | 1995-01-04 |
| TW272255B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1996-03-11 |
| US5461472A (en) | 1995-10-24 |
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