JPH0711178Y2 - 多結晶シリコンシート製造装置におけるシリコン注入圧制御機構 - Google Patents
多結晶シリコンシート製造装置におけるシリコン注入圧制御機構Info
- Publication number
- JPH0711178Y2 JPH0711178Y2 JP6699190U JP6699190U JPH0711178Y2 JP H0711178 Y2 JPH0711178 Y2 JP H0711178Y2 JP 6699190 U JP6699190 U JP 6699190U JP 6699190 U JP6699190 U JP 6699190U JP H0711178 Y2 JPH0711178 Y2 JP H0711178Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- silicon
- gas
- crucible
- silicon sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 38
- 229910052710 silicon Inorganic materials 0.000 title claims description 38
- 239000010703 silicon Substances 0.000 title claims description 38
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000002347 injection Methods 0.000 title claims description 10
- 239000007924 injection Substances 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 49
- 239000012071 phase Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 239000002562 thickening agent Substances 0.000 description 3
- 238000005266 casting Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6699190U JPH0711178Y2 (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート製造装置におけるシリコン注入圧制御機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6699190U JPH0711178Y2 (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート製造装置におけるシリコン注入圧制御機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0425872U JPH0425872U (enrdf_load_stackoverflow) | 1992-03-02 |
| JPH0711178Y2 true JPH0711178Y2 (ja) | 1995-03-15 |
Family
ID=31600174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6699190U Expired - Lifetime JPH0711178Y2 (ja) | 1990-06-25 | 1990-06-25 | 多結晶シリコンシート製造装置におけるシリコン注入圧制御機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711178Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997013010A1 (en) * | 1995-09-29 | 1997-04-10 | Union Material Inc. | Method of manufacturing shaped crystals by upward pressurization type liquid injection |
-
1990
- 1990-06-25 JP JP6699190U patent/JPH0711178Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425872U (enrdf_load_stackoverflow) | 1992-03-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |