JPH07105585B2 - Laser processing method for electronic circuit board - Google Patents

Laser processing method for electronic circuit board

Info

Publication number
JPH07105585B2
JPH07105585B2 JP3322650A JP32265091A JPH07105585B2 JP H07105585 B2 JPH07105585 B2 JP H07105585B2 JP 3322650 A JP3322650 A JP 3322650A JP 32265091 A JP32265091 A JP 32265091A JP H07105585 B2 JPH07105585 B2 JP H07105585B2
Authority
JP
Japan
Prior art keywords
circuit pattern
copper foil
electronic circuit
laser processing
processing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3322650A
Other languages
Japanese (ja)
Other versions
JPH06216495A (en
Inventor
清彦 高岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukui Prefecture
Original Assignee
Fukui Prefecture
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukui Prefecture filed Critical Fukui Prefecture
Priority to JP3322650A priority Critical patent/JPH07105585B2/en
Publication of JPH06216495A publication Critical patent/JPH06216495A/en
Publication of JPH07105585B2 publication Critical patent/JPH07105585B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Laser Beam Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子回路基板に用いら
れる銅箔貼り絶縁基板のレーザによる回路パターン加工
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a circuit pattern processing by a laser on a copper foil-clad insulating substrate used for an electronic circuit substrate.

【0002】[0002]

【従来の技術】量産開始以前の試作用あるいは少量生産
用の電子回路基板は、エッチング加工あるいは切削加工
により製造されている。
2. Description of the Related Art Electronic circuit boards for trial production or small-scale production before the start of mass production are manufactured by etching or cutting.

【0003】しかしエッチング加工では量産と同様な工
程と時間を要し、また切削加工では絶縁不良を避けるた
め銅箔の厚み以上に切り込みを与えて絶縁基板も共に加
工することから、ガラスエポキシ複合材のように硬度が
大きい絶縁基板の場合は工具寿命の点で加工速度を大き
くできないなどの問題があった。
However, the etching process requires the same steps and time as those in mass production, and the cutting process cuts more than the thickness of the copper foil to process the insulating substrate in order to avoid insulation failure. In the case of an insulating substrate having a high hardness as described above, there is a problem that the processing speed cannot be increased in view of the tool life.

【0004】これに対して、銅に対する吸収性の大きい
YAGレーザの熱エネルギーを用いて絶縁基板上の銅箔
を除去する方式がある。図4はこの方式にもとづく加工
装置の構成図で、図5はこの方法による回路パターン加
工方式の説明図である。図4で1はYAGレーザ発振
機、2はQスイッチ、3はX−Yテーブル、4は銅箔貼
り絶縁基板、5はX−Yテーブルのモータ駆動装置で6
はX−Yテーブルの数値制御装置である。図4で8は回
路パターン、9はレーザビームの走査線、10はQスイ
ッチによりレーザ出力を停止する位置、11は開始する
位置である。このように走査線上でレーザ出力の開閉を
交互に繰り返し、さらにY軸方向に一定ピッチで走査線
を移動させることで回路パターンを形成していく。この
方式はエッチング加工のような前処理は不要であり、ま
た切削加工と異なり絶縁基板の硬度の大小によって加工
速度を変える必要はない。
On the other hand, there is a method of removing the copper foil on the insulating substrate by using the thermal energy of a YAG laser having a high absorption property for copper. FIG. 4 is a block diagram of a processing apparatus based on this method, and FIG. 5 is an explanatory view of a circuit pattern processing method by this method. In FIG. 4, 1 is a YAG laser oscillator, 2 is a Q switch, 3 is an XY table, 4 is a copper foil-bonded insulating substrate, and 5 is an XY table motor drive device.
Is a numerical controller for the XY table. In FIG. 4, 8 is a circuit pattern, 9 is a scanning line of a laser beam, 10 is a position where the laser output is stopped by the Q switch, and 11 is a position where the laser output is started. In this way, opening and closing of the laser output is alternately repeated on the scanning line, and the scanning line is moved at a constant pitch in the Y-axis direction to form a circuit pattern. This method does not require pretreatment such as etching, and unlike cutting, there is no need to change the processing speed depending on the hardness of the insulating substrate.

【0005】しかし、図5に示すとおり従来の数値制御
方式ではX−Yテーブル移動指令とレーザ出力制御指令
とを交互に出力して回路パターンを加工することから、
回路パターンの開始、終了位置では、16の速度線図の
ようにX−Yテーブルが減速、停止および加速状態とな
るため、定速状態と比べて単位時間あたりのエネルギー
が大きくなって絶縁基板を損傷するという欠点があっ
た。
However, as shown in FIG. 5, in the conventional numerical control method, the circuit pattern is processed by alternately outputting the XY table movement command and the laser output control command.
At the start and end positions of the circuit pattern, the XY table is in the decelerating, stopping and accelerating states as shown in the velocity diagram of 16, so that the energy per unit time becomes larger than that in the constant velocity state and the insulating substrate is It had the drawback of being damaged.

【0006】[0006]

【発明が解決しようとする課題】解決しようとする問題
点は、レーザ発振機とX−Yテーブルを用いた銅箔貼り
絶縁基板の回路パタ−ン形成加工において、回路パター
ンの開始および終了位置で絶縁基板にまで損傷が及ぶこ
とである。
The problem to be solved is that, in the circuit pattern forming process of the copper foil-clad insulating substrate using the laser oscillator and the XY table, the start and end positions of the circuit pattern are The damage is even to the insulating substrate.

【0007】[0007]

【課題を解決するための手段】本発明では、絶縁基板に
対する損傷をなくするため、回路パタ−ン以外の銅箔除
去部に均一にレ−ザエネルギが照射されるようにした。
In the present invention, in order to prevent damage to the insulating substrate, the laser energy is uniformly applied to the copper foil removed portion other than the circuit pattern.

【0008】[0008]

【実施例】図1は、本発明装置の構成図であり、信号の
入出力系統を示したものである。1〜6は図4と同様で
7はコンピュ−タである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram of the device of the present invention, showing a signal input / output system. 1 to 6 are the same as those in FIG. 4, and 7 is a computer.

【0009】X−Yテーブル駆動装置からはモーターの
ロ−タリ−エンコ−ダからのパルスが、また数値制御装
置からは走査の開始と終了を表す指令信号が、それぞれ
コンピュータへ送信され、コンピュータからはQスイッ
チのゲートへレーザ出力制御指令信号を送信する。
Pulses from the rotary encoder of the motor are transmitted from the XY table drive unit, and command signals indicating the start and end of the scanning are transmitted from the numerical control unit to the computer. Sends a laser output control command signal to the gate of the Q switch.

【0010】図2は本発明による加工方式を示すもので
8〜11は図4と同様である。X−Yテ−ブル3のX軸
方向の送り量に比例してロ−タリ−エンコ−ダから入力
されるパルス12はコンピュータで計数されながら、あ
らかじめパルス数に換算された位置データ13の絶対値
と比較してパタ−ンの開始位置、終了位置に達したか否
かが判断され、さらに位置データの符号が負ならばQス
イッチ2へレーザ出力停止、符号が正ならば出力開始の
信号14が送られる。
FIG. 2 shows a processing method according to the present invention, and 8 to 11 are the same as those in FIG. The pulses 12 input from the rotary encoder in proportion to the feed amount of the XY table 3 in the X-axis direction are counted by a computer and the absolute value of the position data 13 converted into the number of pulses in advance is calculated. It is judged whether or not the start position and end position of the pattern have been reached by comparing with the value, and if the sign of the position data is negative, the laser output is stopped to the Q switch 2, and if the sign is positive, the output start signal. 14 is sent.

【0011】以上の方式で回路パターン以外の銅箔に均
一にレーザ光が照射されるわけであるが、これだけでは
銅箔の剥離が不十分なため、基板全面の走査が完了した
後、図3のように回路パターンに沿ってレーザ光を照射
してトリミングを行い、パターン部以外の除去銅箔部分
の剥離を促しバフ加工による除去を完全なものにする。
With the above method, the copper foil other than the circuit pattern is uniformly irradiated with the laser light. However, since the peeling of the copper foil is not sufficient with this alone, after the scanning of the entire surface of the substrate is completed, the process shown in FIG. As described above, trimming is performed by irradiating a laser beam along the circuit pattern to promote peeling of the removed copper foil portion other than the pattern portion and complete removal by buffing.

【0012】本例では、ランプ電流にして30.6〜3
0.8Aのレーザ出力、X方向のテーブル送り速度96
mm/秒、Y方向の送りピッチ0.8mm、Qスイッチ
周波数5KHzで全面走査した後、ランプ電流28.0
A、Qスイッチ周波数5KHz、20mm/秒の送り速
度でトリミングを行い、さらにバフで仕上げたところレ
ーザ照射部が剥離して損傷の少ない回路パターンが得ら
れた。
In this example, the lamp current is 30.6-3.
0.8A laser output, 96 table feed speed in X direction
mm / sec, Y-direction feed pitch of 0.8 mm, Q switch frequency of 5 KHz, and then full-scale scanning, then lamp current of 28.0
When trimming was performed at A and Q switch frequencies of 5 KHz and a feed rate of 20 mm / sec, and further finishing was performed with a buff, the laser irradiation part was peeled off and a circuit pattern with little damage was obtained.

【0013】以上説明したように、本発明による銅箔貼
り絶縁基板の回路パターン加工は、エッチングのような
マスク作成の前工程を設ける必要もなく、設計情報から
作成した加工情報をもとに直ちに加工に入れる利点があ
る。また薬品の品質管理、廃液処理の問題も生じること
がないため、試作基板の作成など小数生産に適した方法
である。
As described above, in the circuit pattern processing of the copper foil-clad insulating substrate according to the present invention, it is not necessary to provide a pre-process for making a mask such as etching, and immediately based on the processing information created from the design information. It has the advantage of being put into processing. Moreover, since there is no problem of quality control of chemicals and waste liquid treatment, this method is suitable for small-scale production such as production of prototype boards.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による回路パターン加工装置の構成と信
号系統を示した図である。
FIG. 1 is a diagram showing a configuration and a signal system of a circuit pattern processing device according to the present invention.

【図2】本発明による回路パターン形成の原理を示した
説明図である。
FIG. 2 is an explanatory diagram showing the principle of circuit pattern formation according to the present invention.

【図3】本発明による回路パターン形成の原理を示した
説明図である。
FIG. 3 is an explanatory diagram showing the principle of circuit pattern formation according to the present invention.

【図4】本発明を使用しない従来の回路パターン加工装
置の構成と信号系統を示した図である。
FIG. 4 is a diagram showing a configuration and a signal system of a conventional circuit pattern processing device that does not use the present invention.

【図5】従来の方式による回路パターン形成の原理を示
した説明図である。
FIG. 5 is an explanatory diagram showing the principle of circuit pattern formation by a conventional method.

【符号の説明】[Explanation of symbols]

1 レーザ発振機 2 Qスイッチ 3 X−Yテ−ブル 4 銅箔貼り絶縁基板 5 X−Yテ−ブルモータ駆動装置 6 X−Yテ−ブル数値制御装置 7 コンピュータ 8 回路パターン 9 レーザビームの走査線 10 レーザ出力の停止位置 11 レーザ出力の開始位置 12 ロータリーエンコーダからのパルス 13 回路パターン位置データ 14 レーザ出力制御指令信号 15 X−Yテーブル速度線図 1 Laser Oscillator 2 Q Switch 3 XY Table 4 Copper Foil Insulated Substrate 5 XY Table Motor Drive Device 6 XY Table Numerical Control Device 7 Computer 8 Circuit Pattern 9 Laser Beam Scan Line 10 Laser Output Stop Position 11 Laser Output Start Position 12 Pulse from Rotary Encoder 13 Circuit Pattern Position Data 14 Laser Output Control Command Signal 15 XY Table Velocity Diagram

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 YAGレーザ発振機、Qスイッチ、X−
Yテーブルおよびコンピュータからなるレーザ加工機に
よる電子回路基板のレーザ加工方法において、あらかじ
め電子回路CADやイメージスキャナーからの情報をも
とに作成した回路パターンの位置データと、X−Yテー
ブルのロータリーエンコーダから出力されるパルスを計
数することで得られるテーブルの位置データとを比較
し、Qスイッチでレーザ出力の開閉を制御することで銅
箔貼り絶縁基板の回路パターン以外の銅箔の厚さを均一
に減じ、その後バフ加工等によって厚さの減じた銅箔を
除去することで、銅箔を支える絶縁基板を損傷すること
なく回路パターン形成を行うことを特徴とする電子回路
基板のレーザ加工方法
1. A YAG laser oscillator, a Q switch, and an X-
For laser processing machine consisting of Y table and computer
In the laser processing method of the electronic circuit board according to the above, by counting the position data of the circuit pattern created based on the information from the electronic circuit CAD or the image scanner in advance and the pulse output from the rotary encoder of the XY table, By comparing the position data of the obtained table and controlling the opening and closing of the laser output with the Q switch, the thickness of the copper foil other than the circuit pattern of the copper foil-clad insulating substrate is uniformly reduced, and then the thickness is buffed. by removing the reduced copper foil, an electronic circuit which is characterized in that the circuit pattern formed without damaging the insulating substrate supporting the copper foil
Laser processing method for substrates .
JP3322650A 1991-12-06 1991-12-06 Laser processing method for electronic circuit board Expired - Fee Related JPH07105585B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3322650A JPH07105585B2 (en) 1991-12-06 1991-12-06 Laser processing method for electronic circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3322650A JPH07105585B2 (en) 1991-12-06 1991-12-06 Laser processing method for electronic circuit board

Publications (2)

Publication Number Publication Date
JPH06216495A JPH06216495A (en) 1994-08-05
JPH07105585B2 true JPH07105585B2 (en) 1995-11-13

Family

ID=18146072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3322650A Expired - Fee Related JPH07105585B2 (en) 1991-12-06 1991-12-06 Laser processing method for electronic circuit board

Country Status (1)

Country Link
JP (1) JPH07105585B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100686806B1 (en) * 2005-12-29 2007-02-26 삼성에스디아이 주식회사 Method of pattern exposure for substrate using laser scanner

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4759172B2 (en) * 2001-07-05 2011-08-31 リコーマイクロエレクトロニクス株式会社 Substrate manufacturing method
JP5572672B2 (en) * 2012-06-27 2014-08-13 株式会社アップロード・プランズ Manufacturing method of two-dimensional array LED lighting

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253692A (en) * 1989-03-27 1990-10-12 Matsushita Electric Ind Co Ltd Pattern formation and manufacture of panel board
JPH02284778A (en) * 1989-04-25 1990-11-22 Ricoh Co Ltd Laser patterning device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100686806B1 (en) * 2005-12-29 2007-02-26 삼성에스디아이 주식회사 Method of pattern exposure for substrate using laser scanner

Also Published As

Publication number Publication date
JPH06216495A (en) 1994-08-05

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