JPH0710492Y2 - ウエーハ反転貼付装置 - Google Patents

ウエーハ反転貼付装置

Info

Publication number
JPH0710492Y2
JPH0710492Y2 JP1991007967U JP796791U JPH0710492Y2 JP H0710492 Y2 JPH0710492 Y2 JP H0710492Y2 JP 1991007967 U JP1991007967 U JP 1991007967U JP 796791 U JP796791 U JP 796791U JP H0710492 Y2 JPH0710492 Y2 JP H0710492Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck
pad
reversing
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1991007967U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0496843U (enrdf_load_stackoverflow
Inventor
木 静 雄 鈴
Original Assignee
株式会社エンヤシステム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エンヤシステム filed Critical 株式会社エンヤシステム
Priority to JP1991007967U priority Critical patent/JPH0710492Y2/ja
Publication of JPH0496843U publication Critical patent/JPH0496843U/ja
Application granted granted Critical
Publication of JPH0710492Y2 publication Critical patent/JPH0710492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1991007967U 1991-01-30 1991-01-30 ウエーハ反転貼付装置 Expired - Lifetime JPH0710492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991007967U JPH0710492Y2 (ja) 1991-01-30 1991-01-30 ウエーハ反転貼付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991007967U JPH0710492Y2 (ja) 1991-01-30 1991-01-30 ウエーハ反転貼付装置

Publications (2)

Publication Number Publication Date
JPH0496843U JPH0496843U (enrdf_load_stackoverflow) 1992-08-21
JPH0710492Y2 true JPH0710492Y2 (ja) 1995-03-08

Family

ID=31740080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991007967U Expired - Lifetime JPH0710492Y2 (ja) 1991-01-30 1991-01-30 ウエーハ反転貼付装置

Country Status (1)

Country Link
JP (1) JPH0710492Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0268436U (enrdf_load_stackoverflow) * 1988-11-15 1990-05-24
JP2873314B2 (ja) * 1989-03-30 1999-03-24 住友シチックス株式会社 半導体基板の研磨方法及びその装置

Also Published As

Publication number Publication date
JPH0496843U (enrdf_load_stackoverflow) 1992-08-21

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