JPH0690326B2 - Method for manufacturing color filter - Google Patents

Method for manufacturing color filter

Info

Publication number
JPH0690326B2
JPH0690326B2 JP60153237A JP15323785A JPH0690326B2 JP H0690326 B2 JPH0690326 B2 JP H0690326B2 JP 60153237 A JP60153237 A JP 60153237A JP 15323785 A JP15323785 A JP 15323785A JP H0690326 B2 JPH0690326 B2 JP H0690326B2
Authority
JP
Japan
Prior art keywords
photoresist
dyed
resin layer
window
dyeable resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60153237A
Other languages
Japanese (ja)
Other versions
JPS6214105A (en
Inventor
正 宮本
政則 藤田
宣裕 近藤
健二 牟田
Original Assignee
株式会社精工舎
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社精工舎 filed Critical 株式会社精工舎
Priority to JP60153237A priority Critical patent/JPH0690326B2/en
Publication of JPS6214105A publication Critical patent/JPS6214105A/en
Publication of JPH0690326B2 publication Critical patent/JPH0690326B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Color Television Image Signal Generators (AREA)
  • Optical Filters (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、液晶を用いたカラーTVや固体撮像管等に用
いられるカラーフィルタの製造方法に関するものであ
る。
Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a color filter used for a color TV using a liquid crystal, a solid-state image pickup tube, or the like.

(従来の技術) 従来のカラーフィルタの第1の製造方法として、特公昭
52−17376号,特開昭57−139712号が公知である。これ
はガラス基板などにゼラチン等の可染性樹脂層を塗布
し、これをホトレジストの窓を通して部分的に染め分け
るものである。
(Prior Art) As a first conventional manufacturing method of a color filter, Japanese Patent Publication No.
52-17376 and JP-A-57-139712 are known. In this method, a dyeable resin layer such as gelatin is applied to a glass substrate or the like, and the dyed resin layer is partially dyed through a photoresist window.

また従来のカラーフィルタの第2の製造方法として、特
開昭59−50411号が公知である。これはまず基板上の着
色用ベース上に黒色の遮光部のパターンを形成し、熱線
を着色用ベース全面に照射して黒色の遮光部を焼き固
め、または黒色の遮光部に硬膜化処理を行い、そののち
に黒色の遮光部以外の着色用ベースをそれぞれ任意の着
色材で所定の色に着色分けしていくものである。黒色遮
光部を焼き固める、または黒色遮光部に硬膜化処理を行
う工程により、黒色遮光部を境界とする互いに隣接した
着色部の間での着色材の拡散を、黒色遮光部によって防
止しある着色部の色と隣の着色部の色との混色を防止す
るものである。
As a second conventional method for manufacturing a color filter, Japanese Patent Laid-Open No. 59-50411 is known. This is done by first forming a pattern of a black light-shielding portion on the coloring base on the substrate, then irradiating heat rays to the entire surface of the coloring base to harden the black light-shielding portion, or to perform a film hardening treatment on the black light-shielding portion. After that, the coloring bases other than the black light-shielding portion are separately colored into predetermined colors with arbitrary coloring materials. By the process of baking the black light-shielding portion or hardening the black light-shielding portion, the black light-shielding portion prevents the coloring material from diffusing between the adjacent colored portions with the black light-shielding portion as a boundary. The color of the colored portion and the color of the adjacent colored portion are prevented from being mixed.

(発明が解決しようとする課題) 上記従来の第1の製造方法では、マスク合せの誤差によ
り、隣接する染色部間に未染色の間隙ができたり染色部
の中にもホトレジスト1の現象残りやゴミ,ホコリ等に
より染色されない欠陥ができ、この製造方法による基板
をカラーフィルタとして用いるとこれらの未染色部は光
をよく通し、輝いて見えその欠点が目立っていた。また
透過した白色光のために、カラーフィルタの色度を低下
させてしまうという問題があった。
(Problems to be Solved by the Invention) In the above-described first conventional manufacturing method, due to an error in mask alignment, an undyed gap is formed between adjacent dyed portions, or a phenomenon of the photoresist 1 remains in the dyed portions. Defects that are not dyed due to dust, dust, etc. are formed, and when the substrate produced by this manufacturing method is used as a color filter, these undyed parts allow light to pass through well, appear bright, and their defects are conspicuous. Further, there is a problem that the transmitted white light reduces the chromaticity of the color filter.

また上記従来の第2の製造方法では、黒色の遮光部を形
成するためにホトレジストをパターニングする工程およ
びそのためのホトマスクを必要としており製造に手間と
コストがかかるという問題があった。
Further, in the above-mentioned second conventional manufacturing method, there is a problem that the step of patterning the photoresist for forming the black light-shielding portion and the photomask for the same are required, which requires labor and cost for manufacturing.

また黒色の遮光部以外の着色用ベースをそれぞれ着色材
で所定の色に着色分けしていくときにホトレジストをパ
ターニングする工程で、ホトレジストをパターニングす
るホトマスクの位置合わせ誤差があると、ホトレジスト
の窓あけが不十分となり、着色用ベースのうち着色した
い部分の一部をホトレジストが覆ってしまい、着色した
い部分の一部を着色できず、未着色の欠陥となる。しか
も最終的にこの欠陥を黒色に染色する工程を有していな
いから、この欠陥は最後まで残り、基板をカラーフィル
タとして用いると、この欠陥部は白く光が抜けて見え各
染色部の色度が低下してしまう。このことを防止するた
めにはホトマスクの位置合わせの誤差が生じないように
ホトレジストのパターニング時のマスク合せに厳密な精
度を必要とし、カラーフィルタの製造に手間がかかると
いう問題点があった。
Also, in the process of patterning the photoresist when the coloring bases other than the black light-shielding portion are colored and colored with the respective coloring materials, if there is an alignment error in the photoresist patterning the photoresist, the window of the photoresist is opened. Is insufficient, the photoresist covers a part of the coloring base that is desired to be colored, and the part that is desired to be colored cannot be colored, resulting in an uncolored defect. Moreover, since there is no step of finally dyeing this defect black, this defect remains until the end, and when the substrate is used as a color filter, this defect part appears white and the chromaticity of each dyed part appears. Will decrease. In order to prevent this, strict precision is required for mask alignment at the time of patterning the photoresist so that an error in the alignment of the photomask does not occur, and there has been a problem that it takes time to manufacture the color filter.

本発明は上述のような従来技術の問題点を解決すること
を目的とする。
The present invention aims to solve the problems of the prior art as described above.

(問題点を解決するための手段) 上記課題を解決するために本発明によるカラーフィルタ
の製造方法は、基板上に可染性樹脂層を設けた上にホト
レジストを塗布する工程と、そののちにホトレジストを
パターニングしてホトレジストに窓開けし窓を介して可
染性樹脂層を染色・防染し、パターニング,染色,防染
の工程をくり返す工程と、そののちに隣接する窓間のホ
トレジストおよび窓部に残存するホトレジストを除去し
た後、可染性樹脂層全体を黒色に染色することにより可
染性樹脂層の未染色部を黒色に染色する工程とからな
る。
(Means for Solving the Problems) In order to solve the above problems, the method for producing a color filter according to the present invention comprises a step of applying a photoresist on a substrate and a dyeable resin layer, and then applying a photoresist. Patterning the photoresist, opening the window in the photoresist, dyeing and dyeing the dyeable resin layer through the window, repeating the patterning, dyeing and dyeing steps, and then the photoresist between the adjacent windows. After removing the photoresist remaining in the window, the entire dyeable resin layer is dyed black to dye the undyed part of the dyeable resin layer black.

(実施例) 以下、図面に従って本発明の一実施例について説明す
る。
Embodiment An embodiment of the present invention will be described below with reference to the drawings.

まず、第2図のように、ガラスなどの透明な基板1上に
ゼラチンなどの可染性樹脂層2が設けられている。その
上にホトレジスト3を塗布する。そののち第3図のよう
に、ホトマスク4を用いてホトレジスト3を露光し,第
4図のように、ホトレジスト3を現像しこれに窓明けす
る。このときにホトレジスト3の除去が不十分である場
合にホトレジスト3の窓部3aにホトレジスト3が残留す
ることがある。
First, as shown in FIG. 2, a dyeable resin layer 2 such as gelatin is provided on a transparent substrate 1 such as glass. A photoresist 3 is applied on it. After that, as shown in FIG. 3, the photoresist 3 is exposed using the photomask 4, and as shown in FIG. 4, the photoresist 3 is developed and a window is opened. At this time, if the removal of the photoresist 3 is insufficient, the photoresist 3 may remain in the window 3a of the photoresist 3.

またホトレジスト3の窓明け後に窓部3aに対向する可染
性樹脂層2の部分にゴミ,,ホコリなどが付着することが
ある。
Further, after the window of the photoresist 3 has been opened, dust, dust, etc. may adhere to the portion of the dyeable resin layer 2 facing the window 3a.

そののちこの窓部3aに対向する可染性樹脂層2の部分を
例えば赤色に染めて染色部Rとする。このとき上述の残
留ホトレジストやゴミ,ホコリにより染色部R中に第4
図のような染色されない欠陥8aが存在する。そののち染
色部Rに防染処理をほどこす。防染処理としては、たと
えばタンニン酸含有酢酸水溶液および酒石酸アンチモニ
ルカリウム水溶液などによりおこなう。
After that, the portion of the dyeable resin layer 2 facing the window portion 3a is dyed red, for example, to form a dyed portion R. At this time, the remaining photoresist, dust, and dust as described above cause the fourth portion in the dyed portion R.
There is an unstained defect 8a as shown. After that, the dyeing portion R is subjected to a dye-proof treatment. The stain-proofing treatment is performed, for example, with an aqueous solution of tannic acid-containing acetic acid and an aqueous solution of antimony potassium tartrate.

つぎに第5図のように、別のホトマスク5を用いてホト
レジスト3を露光し,第6図のように、ホトレジスト3
を現像しこれに窓明けし、この窓部3bに対向する可染性
樹脂層2の部分を二番目の色たとえば緑色に染めて染色
部Gとする。そののち染色部Gに防染処理をほどこす。
Next, as shown in FIG. 5, the photoresist 3 is exposed by using another photoresist 5, and the photoresist 3 is exposed as shown in FIG.
Is developed, a window is opened therein, and a portion of the dyeable resin layer 2 facing the window 3b is dyed with a second color, for example, green to form a dyed portion G. After that, the dyeing part G is subjected to a dye-proof treatment.

そののち同様にして第7図のように、別のホトマスク6
を用いてホトレジスト3を露光し,第8図のように、ホ
トレジスト3を現象しこれに窓明けし、この窓部3cに対
向する可染性樹脂層2の部分を三番目の色たとえば青色
に染めて染色部Bとする。そののち染色部Bに防染処理
をほどこす。
After that, as shown in FIG. 7, another photomask 6 is similarly formed.
8 is used to expose the photoresist 3, and as shown in FIG. 8, the photoresist 3 is developed and a window is opened in the photoresist 3, and the portion of the dyeable resin layer 2 facing the window 3c is changed to a third color, for example, blue. The dyed part B is dyed. After that, the dyeing part B is subjected to a dye-proof treatment.

染色部Rと同様に染色部Gまたは染色部Bにおいてもホ
トレジスト3の窓部3b,3cにホトレジスト3が残留する
ことがある。またホトレジスト3の窓部に対向する可染
性樹脂層2の部分にゴミ,ホコリなどが付着することが
ある。
Similar to the dyed portion R, the photoresist 3 may remain in the window portions 3b and 3c of the photoresist 3 in the dyed portion G or the dyed portion B as well. Also, dust, dust, etc. may adhere to the portion of the dyeable resin layer 2 facing the window of the photoresist 3.

そのため第8図のように上述の残留ホトレジストやゴ
ミ,ホコリにより染色部B中に染色されない欠陥8bが存
在する。
Therefore, as shown in FIG. 8, there is an undyed defect 8b in the dyed portion B due to the above-described residual photoresist, dust, and dust.

第8図において隣接する染色部の間隙7は未染色部とな
っておりこの上にはホトレジスト3が付着しており、ま
た上述のように、残留ホトレジストやゴミ,ホコリによ
り各染色部中にも染色されない欠陥8a,8bが存在しこの
上にはホトレジストまたはゴミ,ホコリが付着してい
る。また間隙7,欠陥8a,8bはホトレジストまたはゴミホ
コリにおおわれているため、防染処理が施されていな
い。
In FIG. 8, the gap 7 between the adjacent dyed parts is an undyed part, and the photoresist 3 is adhered on this, and as described above, due to the residual photoresist, dust, and dust, each dyed part also has a stain. There are undyed defects 8a and 8b, on which photoresist, dust, or dust is attached. Further, since the gap 7 and the defects 8a and 8b are covered with photoresist or dust, no stain-proof treatment is applied.

そののち第1図のように可染性樹脂層2上に付着したホ
トレジスト,ゴミ,ホコリを全て剥離・除去する。それ
により可染性樹脂層2の間隙7,欠陥8a,8bは外部に露出
する。
After that, as shown in FIG. 1, all the photoresist, dust, and dust adhering to the dyeable resin layer 2 are peeled and removed. As a result, the gap 7 and the defects 8a and 8b of the dyeable resin layer 2 are exposed to the outside.

そしてこの基板1全体を黒色染色浴に入れることによ
り、可染性樹脂層2全体を黒色に染色し、防染処理され
ていない間隙7,欠陥8a,8bのみが黒色に染色される。
Then, by putting the whole substrate 1 in a black dyeing bath, the whole dyeable resin layer 2 is dyed black, and only the gap 7 and the defects 8a, 8b which have not been subjected to the dye-proof treatment are dyed black.

したがって、第1図のように可染性樹脂層2のうち染色
部R,G,Bの真の染色部以外はすべて黒色の遮光部とする
ことができ、可染性樹脂層2には非着色部は存在せず、
それは可染性樹脂層2全体を黒色に染色すれば容易に達
成できる。基板1をカラーフィルタとして用いると、白
く光が抜ける部分がなく各染色部の色度を低下するのを
防止することができる。
Therefore, as shown in FIG. 1, all of the dyeable resin layer 2 except the true dyed portions of the dyed portions R, G, B can be black light shielding portions, and the dyeable resin layer 2 is not There is no colored part,
This can be easily achieved by dyeing the entire dyeable resin layer 2 black. When the substrate 1 is used as a color filter, it is possible to prevent the chromaticity of each dyed portion from being reduced because there is no white light passage portion.

(発明の効果) 本発明で最後の工程で可染性樹脂層全体を黒色に染色す
れば黒色の遮光部を形成することができ、黒色の遮光部
を形成するためにホトレジストのパターニングおよびそ
のためのホトマスクを必要としない。
(Effect of the Invention) In the last step of the present invention, the entire dyeable resin layer is dyed in black to form a black light-shielding portion, and in order to form the black light-shielding portion, patterning of a photoresist and its use You don't need a photomask.

また、最後の工程で可染性樹脂層全体を黒色に染色すれ
ば、可染性樹脂層のうち染色部の真の染色部以外はすべ
て黒色の遮光部とすることができ、可染性樹脂層には非
着色部は存在せず、それを達成するのにホトレジストパ
ターニング時のマスク合せに厳密な精度を必要としない
から、製造が容易でありコストを安くできる。
In addition, if the entire dyeable resin layer is dyed black in the last step, all but the true dyed portion of the dyed portion of the dyeable resin layer can be black light-shielding portions. There are no non-colored parts in the layer, and strict precision in mask alignment at the time of photoresist patterning is not required to achieve this, so that the manufacturing is easy and the cost can be reduced.

また、防染処理を各色を染色するごとに行なうために隣
接する染色部間の混色が生じることを防止できる。
Moreover, since the dye-proof treatment is performed every time each color is dyed, it is possible to prevent color mixing between adjacent dyed portions.

そして本発明によるカラーフィルタは、白く光が抜ける
部分がなく各染色部の色度を低下するのを防止すること
ができる。
In addition, the color filter according to the present invention can prevent the chromaticity of each dyed portion from being reduced because there is no white light passing portion.

【図面の簡単な説明】[Brief description of drawings]

図面は本発明の実施例を示し、第1図は本発明より製造
したカラーフィルタの断面図、第2図〜第8図は製造工
程を追って示す断面図である。 1……基板、 2……可染性樹脂層、 3……ホトレジスト、 3a,3b,3c……窓部、 7,8a,8b……未染色部。
The drawings show the embodiments of the present invention. FIG. 1 is a sectional view of a color filter manufactured according to the present invention, and FIGS. 2 to 8 are sectional views showing manufacturing steps. 1 ... Substrate, 2 ... Dyeable resin layer, 3 ... Photoresist, 3a, 3b, 3c ... Window part, 7,8a, 8b ... Undyed part.

フロントページの続き (72)発明者 牟田 健二 東京都墨田区太平4丁目1番1号 株式会 社精工舎内 (56)参考文献 特開 昭56−75606(JP,A) 特開 昭59−50411(JP,A)Front page continuation (72) Inventor Kenji Muta 4-1-1 Taihei, Sumida-ku, Tokyo Inside Seikosha Co., Ltd. (56) References JP-A-56-75606 (JP, A) JP-A-59-50411 (JP, A)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】基板上に可染性樹脂層を設けた上にホトレ
ジストを塗布する工程と、 そののちに上記ホトレジストをパターニングして上記ホ
トレジストに窓開けし上記窓を介して上記可染性樹脂層
を染色・防染し上記パターニング,染色,防染の工程を
くり返す工程と、 そののちに隣接する上記窓間の上記ホトレジストおよび
上記窓部に残存するホトレジストを除去した後、上記可
染性樹脂層全体を黒色に染色することにより上記可染性
樹脂層の未染色部を黒色に染色する工程と からなることを特徴とするカラーフィルタの製造方法。
1. A step of applying a photoresist on a substrate provided with a dyeable resin layer, and thereafter patterning the photoresist to open a window in the photoresist, and the dyeable resin through the window. After the steps of dyeing / resisting a layer and repeating the above-mentioned patterning, dyeing, and resisting steps, and then removing the photoresist between the adjacent windows and the photoresist remaining in the window, the dyeability And a step of dyeing the undyed portion of the dyeable resin layer in black by dyeing the entire resin layer in black.
JP60153237A 1985-07-11 1985-07-11 Method for manufacturing color filter Expired - Fee Related JPH0690326B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60153237A JPH0690326B2 (en) 1985-07-11 1985-07-11 Method for manufacturing color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60153237A JPH0690326B2 (en) 1985-07-11 1985-07-11 Method for manufacturing color filter

Publications (2)

Publication Number Publication Date
JPS6214105A JPS6214105A (en) 1987-01-22
JPH0690326B2 true JPH0690326B2 (en) 1994-11-14

Family

ID=15558050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60153237A Expired - Fee Related JPH0690326B2 (en) 1985-07-11 1985-07-11 Method for manufacturing color filter

Country Status (1)

Country Link
JP (1) JPH0690326B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05173015A (en) * 1991-12-25 1993-07-13 Stanley Electric Co Ltd Production of color filter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944601B2 (en) * 1979-11-26 1984-10-31 富士写真フイルム株式会社 Polychromatic optical filter and its manufacturing method
JPS5950411A (en) * 1982-09-17 1984-03-23 Matsushita Electric Ind Co Ltd Production of color filter

Also Published As

Publication number Publication date
JPS6214105A (en) 1987-01-22

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