JPS61295507A - Production of color filter - Google Patents

Abstract

PURPOSE:To make the surface of the titled filter even, and to prevent a hue and a color stain of the titled filter, and to enable to coat the colored film with a photoresist so as to be an uniform thickness by removing the photoresist on a photomasking film, and then performing an anti-dyeing treatment to a dyeing film followed by removing a remained part of the photoresist, and by repeating a partial dyeing treatment to the dyeing film. CONSTITUTION:The striped photomasking film 2 is formed on the surface of a transparent substrate 1 and is laminated a dyeing film 3 thereon, and then, is coated a photoresist 4 on the prescribed film 3 followed by irradiating a light from a back side of the substrate 1. After developing the obtd. substrate 1, the photoresist on the photomasking film 2 is removed, and then the film 2 is performed the anti-dyeing treatment to form the resist printing part 5. And then, a remained photoresist 4 is removed, and the photoresist 6 is newly coated on the film 3 followed by exposing it through the photomask 7 and then developing it. Thus, the film 3 is dyed with the first color such as a red color dyestuff to form a red color filter pattern R. Similarly, by repeating a partial dyeing treatment as mentioned above, the each color filter patterns having the red R, the green G and the blue B colors on the substrate 1 are obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a color filter used in a display device such as a color television.

[Prior Art] A known method for producing a conventional color filter will be explained (Japanese Patent Laid-Open No. 57-190912). In order to prevent color mixture, a light shielding layer is provided on the glass substrate 11 as shown in FIG. A metal film 12 is formed, a photosensitive dyed film 13 is formed thereon, and only the photosensitive dyed film on the metal film is removed by irradiating this with light from the opposite direction of the substrate (7th step). figure>.

Next, a photoresist 14 is applied, exposed using a photomask 15 (FIG. 8), and developed to dye the removed portion of the dyed film 13 (FIG. 9). Then, the remaining photoresist 14 is peeled off, and the same partial dyeing process is repeated thereafter to create a color filter with three colors of red, R, green, G, and blue.

[Problems to be solved by the invention] In the conventional example described above, the metal film for light shielding is extremely thin, whereas the dyed film has a thickness of about 1 to 3 μm, so a step 16 occurs. . This difference in level causes disconnection when attaching transparent electrodes on top of the color filter in a subsequent process, and causes variations in resistance values. Another disadvantage is that when used in a liquid crystal cell, it disturbs the alignment of the liquid crystal.

[Means for Solving the Problems] This invention solves the drawbacks of the above-mentioned prior art, and involves providing a light shielding film on a substrate, and coating a dyed film and a negative photoresist thereon. The photoresist on the light shielding film is coated, exposed to light from the back side of the substrate, developed to remove the photoresist on the light shielding film, and the dyed film on the light shielding film is subjected to anti-staining treatment, and then the remaining part of the photoresist is removed. After removal, the above-mentioned partial staining process on the dyed film is repeated.

[Example] In FIG. 1, a light shielding film 2 is formed in a stripe shape on a transparent substrate 1 such as glass. As a material for the light shielding film 2, metal or metal oxide is generally used to form a fine pattern.

A dyed film 3 made of gelatin or the like is formed on this, and a negative photoresist 4 is further applied thereon.

Then, light is irradiated from the opposite side of the substrate 1. The resist on the light shielding film 2 is removed by development, and resist dyeing is applied to this area to form the resist dyeing area 5 (Fig. 2). First, treatment is performed using an aqueous chromium alum solution, and then treatment is performed using an acidic aqueous solution containing tannic acid and an aqueous antimonyl potassium tartrate solution.

Next, the remaining photoresist 4 is removed, a new photoresist 6 is applied, exposed using masks 1 to 7 (FIG. 3), developed, and dyed with a different color, for example, red. to form a red color filter pattern R (FIG. 4). Thereafter, the same partial dyeing process is repeated to form respective color filter patterns of red R1 green G1 blue B (FIG. 5).

[Effect of the invention] According to the invention, the surface of the color filter is flattened,
In addition, when resist-staining the dyed film on the light-shielding film, the holes in the photoresist above it can be self-aligned, so the resist-staining process on the dyed film can be done in the correct position, preventing color mixing and color bleeding. Furthermore, the photoresist on the dyed film can be coated to a uniform thickness.

[Brief explanation of drawings]

FIGS. 1 to 5 are cross-sectional explanatory views showing an embodiment of the present invention in order of process, and FIGS. 6 to 10 are explanatory cross-sectional views showing a conventional example in order of process. 1...Substrate 2...Light shielding film 3...Dyeing film 4...Negative photoresist. that's all

Claims (1)

[Claims] A light-shielding film is partially provided on a transparent substrate, a dyed film is applied on the surface of the substrate on which the light-shielding film is provided, and a negative photoresist is applied on top of that, exposed to light from the opposite side of the substrate, and developed. The photoresist on the light shielding film is removed and the dyed film in this area is subjected to anti-staining treatment, and then the remaining part of the photoresist is removed and the partial dyeing process to the dyed film is repeated. A method for producing a color filter, characterized by: