JPH069018Y2 - 真空装置用覗窓 - Google Patents
真空装置用覗窓Info
- Publication number
- JPH069018Y2 JPH069018Y2 JP3932988U JP3932988U JPH069018Y2 JP H069018 Y2 JPH069018 Y2 JP H069018Y2 JP 3932988 U JP3932988 U JP 3932988U JP 3932988 U JP3932988 U JP 3932988U JP H069018 Y2 JPH069018 Y2 JP H069018Y2
- Authority
- JP
- Japan
- Prior art keywords
- rack
- shaft
- shutter
- vacuum
- nipple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000002445 nipple Anatomy 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3932988U JPH069018Y2 (ja) | 1988-03-25 | 1988-03-25 | 真空装置用覗窓 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3932988U JPH069018Y2 (ja) | 1988-03-25 | 1988-03-25 | 真空装置用覗窓 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01142456U JPH01142456U (enrdf_load_stackoverflow) | 1989-09-29 |
| JPH069018Y2 true JPH069018Y2 (ja) | 1994-03-09 |
Family
ID=31265838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3932988U Expired - Lifetime JPH069018Y2 (ja) | 1988-03-25 | 1988-03-25 | 真空装置用覗窓 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069018Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-03-25 JP JP3932988U patent/JPH069018Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01142456U (enrdf_load_stackoverflow) | 1989-09-29 |
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