JPH069018Y2 - 真空装置用覗窓 - Google Patents

真空装置用覗窓

Info

Publication number
JPH069018Y2
JPH069018Y2 JP3932988U JP3932988U JPH069018Y2 JP H069018 Y2 JPH069018 Y2 JP H069018Y2 JP 3932988 U JP3932988 U JP 3932988U JP 3932988 U JP3932988 U JP 3932988U JP H069018 Y2 JPH069018 Y2 JP H069018Y2
Authority
JP
Japan
Prior art keywords
rack
shaft
shutter
vacuum
nipple
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3932988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142456U (enrdf_load_stackoverflow
Inventor
喜弘 広田
哲雄 南部
健利 五十嵐
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP3932988U priority Critical patent/JPH069018Y2/ja
Publication of JPH01142456U publication Critical patent/JPH01142456U/ja
Application granted granted Critical
Publication of JPH069018Y2 publication Critical patent/JPH069018Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3932988U 1988-03-25 1988-03-25 真空装置用覗窓 Expired - Lifetime JPH069018Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3932988U JPH069018Y2 (ja) 1988-03-25 1988-03-25 真空装置用覗窓

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3932988U JPH069018Y2 (ja) 1988-03-25 1988-03-25 真空装置用覗窓

Publications (2)

Publication Number Publication Date
JPH01142456U JPH01142456U (enrdf_load_stackoverflow) 1989-09-29
JPH069018Y2 true JPH069018Y2 (ja) 1994-03-09

Family

ID=31265838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3932988U Expired - Lifetime JPH069018Y2 (ja) 1988-03-25 1988-03-25 真空装置用覗窓

Country Status (1)

Country Link
JP (1) JPH069018Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01142456U (enrdf_load_stackoverflow) 1989-09-29

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