JPH0688225B2 - Adsorption collector - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adsorption collet device that adsorbs and conveys minute substances such as pellets used in the manufacturing process of semiconductor devices and the like.

2. Description of the Related Art Conventionally, in the process of assembling a semiconductor device, pellets are bonded to a pellet mounting portion (commonly called an island) of a lead frame. The bonding direction of the pellet to the lead frame is as shown in the plan view of FIG. 3a. In order to facilitate the wire bonding in the next step and the case of bonding the pellet 22 so that the advancing direction F of the lead frame 21 on the pellet bonder is parallel to the sides of the pellet 22, the plan view of FIG. 3b is shown. The lead frame 21 on the pellet bonder in the traveling direction F and the pellet 21
There is a case where pellet bonding is performed with an angle to the side.

Hereinafter, a conventional suction collet device will be described. A commonly used pellet bonder, after dicing, mounts a pellet group attached to an adhesive sheet on an XY table driven by a pulse motor or the like, and, for example, by an imaging means such as a vidicon, A predetermined electrical characteristic inspection is performed to image-detect the reject mark attached to the defective pellet and the shape of the pellet. Then, it is a mechanism in which only good-quality pellets are sucked by a suction collet and bonded to a predetermined position on the island of the lead frame. By the way, in the case of pellet bonding in which the advancing direction F of the lead frame 21 and the side of the pellet 22 are parallel as shown in FIG. 3A, the moving direction of the XY table on which the pellet group is mounted and the side of the pellet 22 are. And the scanning direction of the imaging means and the side of the pellet are in the same direction, and the X-
Movement of the Y table and detection of the image pickup can be easily performed.

However, as shown in FIG. 3b, a semiconductor device in which the pellet 22 is bonded with an angle between the advancing direction of the lead frame 21 and the side of the pellet 22 is shown in FIG. When pellet bonding is performed with the same pellet bonder for semiconductor device assembly in which the advancing direction F of the lead frame 21 and the sides of the pellet 22 are parallel as in a, the pellet group attached to the adhesive sheet is set to a predetermined size. Since the XY table is mounted on the XY table while being directed at an angle, the moving direction of the XY table, the scanning direction of the image pickup means, and the side of the pellet 22 are angled, and the XY table is driven and imaged by the image pickup means. A complicated method was required for the detection to detect the image.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide an adsorption collet device that adsorbs and conveys minute substances such as pellets with a simple configuration.

Means for Solving the Problems In order to achieve this object, a suction collet device of the present invention is a spring for supporting a collet shaft of a suction collet for adsorbing a minute object so as to be vertically movable and rotatable, and controlling the rotation of the collet shaft. And a rotation stopping means.

Operation With this configuration, when a minute object such as a pellet is bonded at an angle, after adsorbing the minute object to the suction collet, the collet shaft is rotated and the minute object is rotated by a predetermined angle.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

FIG. 1 is a perspective view showing the outline of the embodiment, and FIGS. 2a to 2c are plan views for explaining the rotating operation of the collet shaft in the suction collet of the embodiment of FIG.

1 is an adsorption collet that adsorbs minute substances such as pellets, and 2
Is a collet shaft that can move up and down and can fix the suction collet 1, 3 is an extendable arm, 4 is a bearing embedded in the arm 3, 5 is a block plate located above the collet shaft 2, and 6 is a block plate A rotation stopper that contacts one end of 5, a vertical movement pin 7 that vertically moves the collet shaft 2, a crank 8 for operating the vertical movement of the collet shaft 2, 9 an operating rod thereof, and 10 a block plate 5 other An oscillating pin provided at the end, 11 is a rotor provided at one end of the oscillating pin, 12 is one end hung on the oscillating pin 10, and the other end is hung on the arm 3 via a pin 13. Is a coil spring, 14 is a contact rod against which the rotor 11 attached to the tip of the swing pin 10 collides, 15 is a support pin supporting the contact rod 14, and 16 is a semiconductor pellet. Of these components, a rotation stopper 6 is screwed onto the tip 3a of the arm 3, and one end of the rotation stopper 6 is in contact with the block plate 5. Although not shown, when the vertical movement rod 9 is moved in the direction of arrow B by the collet vertical movement drive unit, the collet shaft 2 is moved upward via the crank 8.

The operation of the suction collet of the present embodiment configured as described above will be described below. Figure 2a shows semiconductor pellets
16 is a plan view showing a state in which 16 is sucked by the tip of the collet 1 (the vertical movement is omitted from the figure), and the block plate 5 is pulled by the pulling force of the coil spring 12 so as to rotate counterclockwise when viewed from above. The rotation stopper 6 is stopped at the position where it abuts. When the arm 3 moves in the direction of arrow A in FIG. 2a, the rotor 11 abuts against the contact rod 14 attached to the machine base during the movement, and the block plate 5 moves toward the coil spring 12 as the arm 3 moves. As shown in FIG. 2b, when the pulling force is overcome and the arm 3 starts rotating clockwise as viewed from above and the movement of the arm 3 in the direction of arrow A ends, that is, the pellet 16 adsorbed to the tip of the adsorption collet 1 is bonded. Lead frame island (not shown)
The rotation of the block plate 5 is completed at the point when the predetermined position is reached.

As the block plate 5 rotates, the semiconductor pellets 16 adsorbed on the tip of the adsorption collet 1 are also angled and bonded at a predetermined position as shown in FIG. 3b.

The contact rod 14 is rotatably supported by a support pin 15 on the machine base, and the arm 3 is moved in the direction of arrow A by tilting the contact rod 14 parallel to the machine base as shown in FIG. 2c. The rotor 11 does not contact the contact rod 14 and the collet does not rotate even when it is moved to the position where the semiconductor pellet 16 adsorbed at the tip of the collet 1 also does not rotate. It enables bonding in which the traveling direction of the frame and the sides of the pellet are parallel.

The rotation angle of the semiconductor pellet 16 can be easily adjusted by adjusting the rotation stopper 6.

EFFECTS OF THE INVENTION The present invention uses the same pellet bonder to bond pellets onto a lead frame in parallel with the direction of movement of the lead frame, whether the sides of the pellets are bonded in parallel or at an angle. It can be easily changed and improves the economical efficiency of pellet bonding.

[Brief description of drawings]

FIG. 1 is a perspective view of an adsorption collet device according to an embodiment of the present invention, FIGS. 2a, 2b, 2c are plan views of the same part in different states of the above embodiment, and FIGS. FIG. 3 is a plan view of a lead frame to which pellets have been bonded, respectively. 1 ... adsorption collet, 2 ... collet shaft, 3 ... arm, 5 ... block plate, 6 ... rotation stopper,
11 …… Rotor, 12 …… Coil spring, 14 …… Retaining rod, 15…
… Support pins, 16… Semiconductor pellets.

Claims (1)

[Claims] 1. An adsorption collet for adsorbing and transporting a small substance, a collet shaft for fixing the adsorption collet, a block plate for transmitting rotation to the collet shaft, and an arm for supporting the collet shaft via a bearing. A spring that connects one end of the arm and an oscillating pin fixed to one end of the block plate to rotate the block plate; and control the rotation of the block plate to suck the suction via the collet shaft. A rotation stopper that gives the collet an initial angle and a rotor provided at the tip of a swing pin fixed to one end of the block plate are brought into contact with each other to apply a force to the block plate in a direction opposite to the moving direction of the arm. The block plate has a contact rod for rotating in a direction opposite to the rotation by the spring, and the contact rod is attached to the rotor. Suction collet device, characterized in that the abutting rod which is rotatably supported by the support pin so as to be movable to a position not in contact.