JPH06817Y2 - 常圧ｃｖｄ装置 - Google Patents

常圧ｃｖｄ装置

Info

Publication number
JPH06817Y2
JPH06817Y2 JP1987187503U JP18750387U JPH06817Y2 JP H06817 Y2 JPH06817 Y2 JP H06817Y2 JP 1987187503 U JP1987187503 U JP 1987187503U JP 18750387 U JP18750387 U JP 18750387U JP H06817 Y2 JPH06817 Y2 JP H06817Y2
Authority
JP
Japan
Prior art keywords
wafer
tray
blowing head
parallelism
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987187503U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0192126U (enrdf_load_stackoverflow
Inventor
勝之 笹原
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP1987187503U priority Critical patent/JPH06817Y2/ja
Publication of JPH0192126U publication Critical patent/JPH0192126U/ja
Application granted granted Critical
Publication of JPH06817Y2 publication Critical patent/JPH06817Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987187503U 1987-12-09 1987-12-09 常圧ｃｖｄ装置 Expired - Lifetime JPH06817Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0192126U JPH0192126U (enrdf_load_stackoverflow) 1989-06-16
JPH06817Y2 true JPH06817Y2 (ja) 1994-01-05

Family

ID=31478651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987187503U Expired - Lifetime JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH06817Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5823338B2 (ja) * 2012-04-10 2015-11-25 小島プレス工業株式会社 プラズマｃｖｄ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278477A (ja) * 1986-05-28 1987-12-03 Mitsubishi Electric Corp 自動車の車庫入れ支援システム

Also Published As

Publication number Publication date
JPH0192126U (enrdf_load_stackoverflow) 1989-06-16

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