JPH068100Y2 - ウエハ移し替え突き上げ装置 - Google Patents

ウエハ移し替え突き上げ装置

Info

Publication number
JPH068100Y2
JPH068100Y2 JP1986101352U JP10135286U JPH068100Y2 JP H068100 Y2 JPH068100 Y2 JP H068100Y2 JP 1986101352 U JP1986101352 U JP 1986101352U JP 10135286 U JP10135286 U JP 10135286U JP H068100 Y2 JPH068100 Y2 JP H068100Y2
Authority
JP
Japan
Prior art keywords
wafer
shaft
push
plate
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986101352U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638243U (enrdf_load_stackoverflow
Inventor
亘 大加瀬
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP1986101352U priority Critical patent/JPH068100Y2/ja
Publication of JPS638243U publication Critical patent/JPS638243U/ja
Application granted granted Critical
Publication of JPH068100Y2 publication Critical patent/JPH068100Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1986101352U 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置 Expired - Lifetime JPH068100Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986101352U JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986101352U JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Publications (2)

Publication Number Publication Date
JPS638243U JPS638243U (enrdf_load_stackoverflow) 1988-01-20
JPH068100Y2 true JPH068100Y2 (ja) 1994-03-02

Family

ID=30972010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986101352U Expired - Lifetime JPH068100Y2 (ja) 1986-07-01 1986-07-01 ウエハ移し替え突き上げ装置

Country Status (1)

Country Link
JP (1) JPH068100Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0625137Y2 (ja) * 1989-04-14 1994-07-06 有限会社オリエント釦工業所 首振り釦
DE3931804A1 (de) * 1989-09-23 1991-04-04 Raymond A Kg Plastikknopf

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449885A (en) * 1982-05-24 1984-05-22 Varian Associates, Inc. Wafer transfer system
JPS59101847A (ja) * 1982-12-01 1984-06-12 Seiko Instr & Electronics Ltd 半導体ウエハの受取，受渡し装置
JPS615541A (ja) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd 移し替え装置
JPS624142A (ja) * 1985-06-28 1987-01-10 Dainippon Screen Mfg Co Ltd 薄板材の移し替え装置

Also Published As

Publication number Publication date
JPS638243U (enrdf_load_stackoverflow) 1988-01-20

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