JPH0666478A - Multi-layer type thermal insulation material - Google Patents

Multi-layer type thermal insulation material

Info

Publication number
JPH0666478A
JPH0666478A JP21527492A JP21527492A JPH0666478A JP H0666478 A JPH0666478 A JP H0666478A JP 21527492 A JP21527492 A JP 21527492A JP 21527492 A JP21527492 A JP 21527492A JP H0666478 A JPH0666478 A JP H0666478A
Authority
JP
Japan
Prior art keywords
heat insulating
insulating plates
plates
insulating material
high temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21527492A
Other languages
Japanese (ja)
Other versions
JP3163769B2 (en
Inventor
Yoshihiro Hashimoto
芳廣 橋本
Shinichi Yasuzawa
真一 安沢
Kiyoshi Fukazawa
潔 深沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP21527492A priority Critical patent/JP3163769B2/en
Publication of JPH0666478A publication Critical patent/JPH0666478A/en
Application granted granted Critical
Publication of JP3163769B2 publication Critical patent/JP3163769B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a thermal insulation material capable of keeping a superior thermal insulating performance for a long period of time even under a high temperature state. CONSTITUTION:Each of a plurality of thermal insulating plates 2 is formed with a plurality of projections 3. The thermal insulating plates 2 are piled up to constitute a multi-layered thermal insulating material 1 having a space between the thermal insulating plates 2 only by a height of each of the projections 3. The thermal insulating plates 2 are made of tungsten.rhenium where dispersion junction at a contact location is hardly generated between the projections 3 and other thermal insulating plates 2 under a high temperature condition.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、電気炉等に使用され
る断熱材に係り、特に、宇宙船等の宇宙航行体に設けら
れる実験用の電気炉に使用される多層式断熱材に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat insulating material used in an electric furnace or the like, and more particularly to a multi-layer heat insulating material used in an experimental electric furnace provided in a spacecraft such as a spacecraft. Is.

【0002】[0002]

【従来の技術】近年、各分野における新素材等を開発す
るために、スペースシャトル等の宇宙航行体に実験用の
電気炉を搭載し、この電気炉を用いて無重力状態での実
験が行われている。この電気炉には、軽量化、小型化及
び省電力化を図るために、複数の断熱板を積層させた多
層式断熱材が使用されており、この種の多層式断熱材と
しては、複数の突出部を形成したタンタルからなる断熱
板を複数段に積層させたものが開発されていた。
2. Description of the Related Art In recent years, in order to develop new materials and the like in various fields, an electric furnace for experiments is mounted on a spacecraft such as a space shuttle, and the electric furnace is used for experiments in a weightless state. ing. In this electric furnace, in order to reduce the weight, the size, and the power consumption, a multilayer heat insulating material in which a plurality of heat insulating plates are stacked is used. A multi-layered heat insulating plate made of tantalum having protrusions has been developed.

【0003】[0003]

【発明が解決しようとする課題】ところで、上記多層式
断熱材にあっては、高温状態となることにより、それぞ
れの断熱板同士の接触箇所、つまり、突出部の先端部
と、他の断熱板との接触箇所において、拡散接合が起こ
ることがあった。そして、この拡散接合により接合され
た接触箇所から熱が伝達されやすくなり、必要な断熱効
果が得られなくなる恐れがあった。
By the way, in the above-mentioned multi-layered heat insulating material, the high temperature state causes contact between the respective heat insulating plates, that is, the tip of the protrusion and the other heat insulating plates. Diffusion bonding sometimes occurred at the contact point with. Then, heat may be easily transferred from the contact portion joined by the diffusion joining, and the necessary heat insulating effect may not be obtained.

【0004】この発明は、上記事情に鑑みてなされたも
ので、高温状態においても良好な断熱性能を長期間維持
することが可能な多層式断熱材を提供することを目的と
している。
The present invention has been made in view of the above circumstances, and an object thereof is to provide a multi-layer heat insulating material capable of maintaining good heat insulating performance for a long time even in a high temperature state.

【0005】[0005]

【課題を解決するための手段】第1の発明の多層式断熱
材は、複数の突出部が形成された断熱板同士を積層させ
ることにより、前記突出部の高さだけ前記断熱板同士の
間に空間が形成されてなる多層式断熱材において、前記
断熱板は、高温状態にて、前記断熱板同士の接触箇所に
おける拡散接合がほとんど起こらないタングステン・レ
ニウムからなることを特徴としている。第2の発明の多
層式断熱材は、第1の発明の断熱板同士の間に、網状に
形成されたメッシュ板が介在されてなり、該メッシュ板
は、高温状態にて、前記断熱板との接触箇所における拡
散接合がほとんど起こらないタングステン・レニウムか
らなることを特徴としている。第3の発明の多層式断熱
材は、複数の断熱板と、これら断熱板の両端部に設けら
れ、これら断熱板を所定間隔をあけて層状に支持する支
持部材とから構成されてなり、これら断熱板及び支持部
材は、高温状態にて、それぞれの接触箇所における拡散
接合がほとんど起こらないタングステン・レニウム及び
セラミックからなることを特徴としている。
In the multi-layer heat insulating material of the first invention, the heat insulating plates having a plurality of protrusions are laminated to each other so that the height between the heat insulating plates is between the heat insulating plates. In the multi-layered heat insulating material in which a space is formed, the heat insulating plate is made of tungsten / rhenium that hardly causes diffusion bonding at a contact portion between the heat insulating plates in a high temperature state. The multi-layered heat insulating material of the second invention is such that a mesh plate formed in a mesh shape is interposed between the heat insulating plates of the first invention, and the mesh plate and the heat insulating plate are in a high temperature state. It is characterized in that it is made of tungsten / rhenium, which hardly causes diffusion bonding at the contact point. The multilayer heat insulating material of the third invention comprises a plurality of heat insulating plates and support members provided at both ends of these heat insulating plates and supporting the heat insulating plates in layers at predetermined intervals. The heat insulating plate and the supporting member are characterized by being made of tungsten / rhenium and ceramic, which hardly cause diffusion bonding at their respective contact portions at high temperatures.

【0006】[0006]

【作用】第1の発明の多層式断熱材によれば、高温状態
にて、それぞれの突出部と他の断熱板との接触箇所にお
ける拡散接合が防止され、この接触箇所における熱の伝
達が最小限に抑さえられる。第2の発明の多層式断熱材
によれば、第1の発明に加えて、さらに、それぞれの断
熱板の突出部が、メッシュ板を介して他の断熱板に当接
されていることより、その接触面積が少なくされ、接触
箇所における熱の伝達が大幅に低減される。第3の発明
の多層式断熱材によれば、それぞれの断熱板同士が所定
間隔をあけて支持されていることより、それぞれの断熱
板同士の接触による熱の伝達がなくされる。また、高温
状態にて、支持部材と断熱板との接触箇所における拡散
接合が防止され、接触箇所における熱の伝達が最小限に
抑さえられる。
According to the multi-layer heat insulating material of the first aspect of the present invention, diffusion bonding at each contact point between each protrusion and another heat insulating plate is prevented at high temperature, and heat transfer at this contact point is minimized. It is suppressed to the limit. According to the multilayer heat insulating material of the second invention, in addition to the first invention, the protruding portions of each heat insulating plate are in contact with another heat insulating plate via the mesh plate, The contact area is reduced and the heat transfer at the contact location is greatly reduced. According to the multilayer heat insulating material of the third aspect of the invention, since the heat insulating plates are supported at a predetermined interval, heat transfer due to contact between the heat insulating plates is eliminated. Further, in a high temperature state, diffusion bonding at the contact portion between the support member and the heat insulating plate is prevented, and heat transfer at the contact portion is suppressed to a minimum.

【0007】[0007]

【実施例】以下、本発明の多層式断熱材の実施例を図に
よって説明する。まず、図1及び図2によって第1の実
施例の多層式断熱材を説明する。図において、符号1
は、多層式断熱材であり、スペースシャトル等の宇宙航
行体に搭載される電気炉等に使用されるものである。こ
の多層式断熱材1は、複数の断熱板2、2…を積層させ
たもので、それぞれの断熱板2、2…には、突出部3、
3…が形成されており、これら突出部3、3…によって
それぞれの断熱板2、2…同士の間に所定の空間が形成
されている。
EXAMPLES Examples of the multilayer heat insulating material of the present invention will be described below with reference to the drawings. First, the multilayer heat insulating material of the first embodiment will be described with reference to FIGS. 1 and 2. In the figure, reference numeral 1
Is a multi-layered heat insulating material, which is used for an electric furnace mounted on a spacecraft such as a space shuttle. This multi-layered heat insulating material 1 is formed by stacking a plurality of heat insulating plates 2, 2, ... On each heat insulating plate 2, 2 ,.
3 are formed, and a predetermined space is formed between the heat insulating plates 2, 2 ...

【0008】この多層式断熱材1のそれぞれの断熱板
2、2…は、高温状態にて、断熱板2、2…同士の接触
箇所、つまり、突出部3、3…と他の断熱板2との接触
箇所における拡散接合がほとんど起こらないタングステ
ン・レニウムからなるもので、このタングステン・レニ
ウムを薄い板状に形成し、さらに、プレス加工等によ
り、突出部3、3…を形成したものである。
Each of the heat insulating plates 2, 2, ... Of the multi-layer heat insulating material 1 is in a high temperature state where the heat insulating plates 2, 2, ... Contact each other, that is, the protrusions 3, 3 ,. It is made of tungsten / rhenium that hardly causes diffusion bonding at the contact point with, and is formed by forming this thin film of tungsten / rhenium and further forming the protrusions 3, 3, ... By pressing or the like. .

【0009】このように、上記実施例の多層式断熱材1
によれば、高温状態において拡散接合がほとんど起こら
ないタングステン・レニウムからなる断熱板2、2…に
突出部3、3…を形成して積層させたものでるので、高
温状態にて、それぞれの突出部3、3…と他の断熱板2
との接触箇所における拡散接合をほとんど防止すること
ができ、接触箇所における熱の伝達を最小限に抑さえる
ことができる。したがって、良好な断熱効果を長期間維
持させることができ、極めて信頼性の高い電気炉を構成
することができる。
Thus, the multi-layer heat insulating material 1 of the above embodiment
According to the method, since the protrusions 3, 3, ... Are laminated on the heat insulating plates 2, 2, ... Made of tungsten / rhenium in which diffusion bonding hardly occurs in the high temperature state, the protrusions 3, 3 ,. Parts 3, 3 ... and other heat insulating plate 2
It is possible to almost prevent the diffusion bonding at the contact portion with and to minimize the heat transfer at the contact portion. Therefore, a good heat insulating effect can be maintained for a long time, and an extremely reliable electric furnace can be constructed.

【0010】次に、第2の実施例の多層式断熱材を図3
によって説明する。図に示すように、この実施例の多層
式断熱材11は、複数の断熱板2、2…と、これらの断
熱板2、2…の間に介在された網状のメッシュ板5、5
…とから構成されたものであり、このメッシュ板5、5
…は、タングステン・レニウムからなる複数の針金を編
み合わせることにより形成されたものである。
Next, the multilayer heat insulating material of the second embodiment is shown in FIG.
Explained by. As shown in the figure, the multilayer heat insulating material 11 of this embodiment includes a plurality of heat insulating plates 2, 2, ... And a mesh mesh plate 5, 5 interposed between these heat insulating plates 2, 2.
... and the mesh plates 5, 5
Is formed by braiding a plurality of wires made of tungsten and rhenium.

【0011】このように構成された多層式断熱材11に
よれば、それぞれの断熱板2、2…の突出部3、3…
を、メッシュ板5、5…を介して他の断熱板2、2…に
当接させたものであるので、接触箇所における接触面積
を大幅に少なくすることができる。これにより、接触箇
所からの熱の伝達を大幅に低減させることができ、上記
第1の実施例よりも、さらに良好な断熱効果を得ること
ができる。
According to the multi-layered heat insulating material 11 thus constructed, the protruding portions 3, 3, ... Of the heat insulating plates 2, 2 ,.
Are brought into contact with the other heat insulating plates 2, 2, ... through the mesh plates 5, 5, .. Therefore, the contact area at the contact portion can be significantly reduced. As a result, heat transfer from the contact portion can be significantly reduced, and a better heat insulating effect than that of the first embodiment can be obtained.

【0012】また、このメッシュ板5、5…も、タング
ステン・レニウムから形成されていることより、高温状
態にて、メッシュ板5、5…と断熱板2、2…及び断熱
板2、2…の突出部3、3…との接触箇所における拡散
接合をほとんど防止することができる。したがって、接
触箇所における熱の伝達を最小限に抑さえることがで
き、極めて良好な断熱効果を長期間維持させることがで
きる。
Since the mesh plates 5, 5, ... Are also made of tungsten / rhenium, the mesh plates 5, 5, ..., The heat insulating plates 2, 2, ... And the heat insulating plates 2, 2 ,. It is possible to almost prevent diffusion bonding at the contact points with the protruding portions 3, 3 ,. Therefore, it is possible to suppress the heat transfer at the contact point to the minimum, and it is possible to maintain a very good heat insulating effect for a long period of time.

【0013】次に第3の実施例の多層式断熱材を図4に
よって説明する。図に示すように、この実施例の多層式
断熱材21は、複数の平坦な断熱板22、22…を所定
間隔あけて層状に支持したもので、これら断熱板22、
22…は、それぞれの側部が支持部材23、23によっ
て支持されている。
Next, the multilayer heat insulating material of the third embodiment will be explained with reference to FIG. As shown in the figure, the multilayer heat insulating material 21 of this embodiment is formed by supporting a plurality of flat heat insulating plates 22, 22, ...
22 ... is supported by support members 23, 23 on the respective side portions.

【0014】そして、この多層式断熱材21を構成する
断熱板22、22…及び支持部材23、23は、高温状
態にて、それぞれの接触箇所における拡散接合をほとん
ど起こすことのないタングステン・レニウム及びセラミ
ックから形成されている。
The heat insulating plates 22, 22, ... And the supporting members 23, 23 constituting the multi-layer heat insulating material 21 are made of tungsten / rhenium which hardly causes diffusion bonding at their respective contact portions at high temperature. It is made of ceramic.

【0015】このように構成された多層式断熱材21に
よれば、それぞれの断熱板22、22…同士が所定間隔
をあけて支持されていることより、それぞれの断熱板2
2、22…同士に接触箇所がなく、したがって、それぞ
れの断熱板22、22…同士の熱の伝達を大幅に低減さ
せることができ、極めて高い断熱効果を得ることができ
る。
According to the multi-layered heat insulating material 21 thus constructed, the heat insulating plates 22, 22 ... Are supported at a predetermined interval, so that each heat insulating plate 2 is supported.
Since there are no contact points between 2, 22, ..., Therefore, heat transfer between the respective heat insulating plates 22, 22, ... Can be significantly reduced, and an extremely high heat insulating effect can be obtained.

【0016】また、支持部材23、23がセラミック、
断熱板22、22…がタングステン・レニウムから形成
されていることより、高温状態にて、支持部材23、2
3と断熱板22、22…との接触箇所における拡散接合
をほとんど防止することができ、接触箇所における熱の
伝達を最小限に抑さえることができる。なお、第2の実
施例にて用いたメッシュ板5としては、タングステン・
レニウムからなる平板に複数の孔をあけて網状にしたも
のであっても良い。また、上記実施例の多層式断熱材
1、11、12は、電気炉以外のあらゆる装置の断熱材
として使用可能であるのは勿論である。
Further, the support members 23, 23 are made of ceramic,
Since the heat insulating plates 22, 22 ... Are made of tungsten / rhenium, the support members 23, 2 are kept in a high temperature state.
It is possible to almost prevent diffusion bonding at a contact portion between the heat insulating plate 3 and the heat insulating plates 22, 22 ... And to suppress heat transfer at the contact portion to a minimum. The mesh plate 5 used in the second embodiment is made of tungsten.
A flat plate made of rhenium may be formed into a net shape by forming a plurality of holes. Further, it goes without saying that the multi-layer heat insulating materials 1, 11 and 12 of the above-mentioned embodiment can be used as heat insulating materials for all devices other than the electric furnace.

【0017】[0017]

【発明の効果】以上、説明したように、本発明の多層式
断熱材によれば、下記の効果を得ることができる。第1
の発明によれば、タングステン・レニウムによって断熱
板を形成したものであるので、高温状態にて、それぞれ
の断熱板の突出部と他の断熱板との接触箇所における拡
散接合をほとんど防止することができ、この接触箇所に
おける熱の伝達を最小限に抑さえることができる。第2
の発明によれば、第1の発明に加えてさらに、それぞれ
の断熱板の突出部が、タングステン・レニウムからなる
メッシュ板を介して他の断熱板に当接されていることよ
り、その接触箇所における接触面積を少なくすることが
でき、接触箇所からの熱の伝達を大幅に低減させること
ができる。第3の発明によれば、それぞれの断熱板同士
が所定間隔をあけて支持されていることより、それぞれ
の断熱板同士の接触による熱の伝達をなくすことができ
る。また、支持部材がセラミック、断熱板がタングステ
ン・レニウムから形成されていることより、高温状態に
て、支持部材と断熱板との接触箇所における拡散接合を
ほとんど防止することができ、接触箇所における熱の伝
達を最小限に抑さえることができる。即ち、本発明の多
層式断熱材を電気炉等に使用することにより、良好な断
熱効果が長期間維持される極めて信頼性の高い電気炉を
構成することができる。
As described above, according to the multilayer heat insulating material of the present invention, the following effects can be obtained. First
According to the invention, since the heat insulating plate is formed of tungsten / rhenium, it is possible to almost prevent diffusion bonding at the contact portion between the protruding portion of each heat insulating plate and another heat insulating plate in a high temperature state. It is possible to minimize the heat transfer at this contact point. Second
According to the invention, in addition to the first invention, the protruding portions of the respective heat insulating plates are in contact with other heat insulating plates via the mesh plate made of tungsten / rhenium, so that the contact points It is possible to reduce the contact area at and the heat transfer from the contact portion can be greatly reduced. According to the third aspect of the invention, since the heat insulating plates are supported with a predetermined space therebetween, it is possible to eliminate heat transfer due to contact between the heat insulating plates. Further, since the supporting member is made of ceramic and the heat insulating plate is made of tungsten / rhenium, it is possible to almost prevent diffusion bonding at the contact portion between the supporting member and the heat insulating plate at high temperature, and heat at the contact portion is prevented. The transmission of can be suppressed to a minimum. That is, by using the multilayer heat insulating material of the present invention in an electric furnace or the like, it is possible to construct an extremely reliable electric furnace that maintains a good heat insulating effect for a long period of time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の多層式断熱材の構造を
説明する多層式断熱材の側断面図である。
FIG. 1 is a side sectional view of a multi-layer heat insulating material for explaining the structure of the multi-layer heat insulating material according to the first embodiment of the present invention.

【図2】本発明の第1の実施例の多層式断熱材の構造を
説明する多層式断熱材の平面図である。
FIG. 2 is a plan view of the multilayer heat insulating material for explaining the structure of the multilayer heat insulating material according to the first embodiment of the present invention.

【図3】本発明の第2の実施例の多層式断熱材の構造を
説明する多層式断熱材の側断面図である。
FIG. 3 is a side sectional view of a multilayer heat insulating material for explaining the structure of the multilayer heat insulating material according to the second embodiment of the present invention.

【図4】本発明の第3の実施例の多層式断熱材の構造を
説明する多層式断熱材の側断面図である。
FIG. 4 is a side sectional view of a multilayer heat insulating material for explaining the structure of the multilayer heat insulating material according to the third embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1、11、21 多層式断熱材 2、22 断熱板 3 突出部 5 メッシュ板 23 支持部材 1, 11, 21 Multi-layered heat insulating material 2, 22 Heat insulating plate 3 Projection part 5 Mesh plate 23 Support member

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の突出部が形成された断熱板同士を
積層させることにより、前記突出部の高さだけ前記断熱
板同士の間に空間が形成されてなる多層式断熱材におい
て、前記断熱板は、高温状態にて、前記断熱板同士の接
触箇所における拡散接合がほとんど起こらないタングス
テン・レニウムからなることを特徴とする多層式断熱
材。
1. A multi-layered heat insulating material comprising a plurality of heat insulating plates having a plurality of protrusions stacked together to form a space between the heat insulating plates at the height of the protrusions. The multi-layered heat insulating material is characterized in that the plate is made of tungsten / rhenium that hardly causes diffusion bonding at a contact portion between the heat insulating plates in a high temperature state.
【請求項2】 前記断熱板同士の間には、網状に形成さ
れたメッシュ板が介在されてなり、該メッシュ板は、高
温状態にて、前記断熱板との接触箇所における拡散接合
がほとんど起こらないタングステン・レニウムからなる
ことを特徴とする請求項1記載の多層式断熱材。
2. A mesh plate formed in a mesh shape is interposed between the heat insulating plates, and the mesh plates are almost free from diffusion bonding at a contact point with the heat insulating plate in a high temperature state. The multi-layer insulation material according to claim 1, wherein the multi-layer heat insulation material comprises tungsten-rhenium.
【請求項3】 複数の断熱板と、これら断熱板の両端部
に設けられ、これら断熱板を所定間隔をあけて層状に支
持する支持部材とから構成されてなり、これら断熱板及
び支持部材は、高温状態にて、それぞれの接触箇所にお
ける拡散接合がほとんど起こらないタングステン・レニ
ウム及びセラミックからなることを特徴とする多層式断
熱材。
3. A plurality of heat insulating plates and a support member which is provided at both ends of these heat insulating plates and supports the heat insulating plates in layers at predetermined intervals. These heat insulating plates and support members are provided. A multi-layered heat insulating material comprising tungsten / rhenium and ceramics, which hardly cause diffusion bonding at each contact location at high temperature.
JP21527492A 1992-08-12 1992-08-12 Multi-layer insulation Expired - Fee Related JP3163769B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21527492A JP3163769B2 (en) 1992-08-12 1992-08-12 Multi-layer insulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21527492A JP3163769B2 (en) 1992-08-12 1992-08-12 Multi-layer insulation

Publications (2)

Publication Number Publication Date
JPH0666478A true JPH0666478A (en) 1994-03-08
JP3163769B2 JP3163769B2 (en) 2001-05-08

Family

ID=16669603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21527492A Expired - Fee Related JP3163769B2 (en) 1992-08-12 1992-08-12 Multi-layer insulation

Country Status (1)

Country Link
JP (1) JP3163769B2 (en)

Also Published As

Publication number Publication date
JP3163769B2 (en) 2001-05-08

Similar Documents

Publication Publication Date Title
JPH0728168B2 (en) Dielectric resonator
JP2000068564A (en) Peltier element
US4687879A (en) Tiered thermoelectric unit and method of fabricating same
JP2001508600A (en) Diamond body
JPH0666478A (en) Multi-layer type thermal insulation material
JP2525545B2 (en) Ceramic fiber-module
JPH06188464A (en) Thin film thermoelectric element and manufacture thereof
JP2006179791A (en) Semiconductor device
JPH07135034A (en) Connecting method for superconducting wire
JPH06307775A (en) Multiplelayer heat insulating structure
JPH02119284A (en) Formation of protective film for semiconductor laser end face
JPS5842243A (en) Supporting electrode plate for semiconductor element
JPS5890744A (en) Semiconductor device
JP2535402B2 (en) Thermal insulation structure for high temperature furnace
KR101680066B1 (en) High temperature superconducting current lead with asymetrical structure
JP2003234515A (en) Thermoelectric module
JPH06123560A (en) Fiber furnace
JP2004087612A (en) Heat radiating member and semiconductor device using same
JPH05275610A (en) Stereoscopic integrated circuit device
JP2008305672A (en) Plate heater
JP2006147416A (en) Heating plate and heat treatment device
JP2021040119A (en) Package structure for power device
JP2002054786A (en) Thermal conductivity adjusting method for heat insulating material
JPH03124008A (en) Coil device
JPH0252287A (en) Superconducting magnetic shield body

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20010130

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090302

Year of fee payment: 8

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090302

Year of fee payment: 8

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100302

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110302

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110302

Year of fee payment: 10

LAPS Cancellation because of no payment of annual fees