JP2008305672A - Plate heater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To overcome the problems that warping and bending occur to degrade a thermal efficiency in a conventional plate heater of a large size with the weight becoming heavier. <P>SOLUTION: The plate heater is composed of a plurality of metal plates laminated on each other and a plurality of metal pipe heaters of a multi-angular cross-sectional shape inserted between two facing metal plates, and each of the metal plate has an insulating cover on its surface contacting with the metal pipe heater. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a plate heater, and more particularly to a large area plate heater in which a pipe heater is sandwiched between a plurality of large area metal plates.

Conventionally, a plate heater in which a heater is sandwiched between two metal plates is known as shown in Patent Documents 1 to 3.
JP-A-6-146208 JP 2002-056958 A Japanese Patent Application Laid-Open No. 2007-118779

  When a conventional plate heater is used to heat a large area glass substrate or the like, a large area plate heater is required, and the plate heater becomes heavy. For example, when used in a vacuum, the heater swells due to internal pressure. Or when used under normal pressure, there is a problem that warp and deflection occur due to thermal strain. An object of the present invention is to provide a lightweight large-area plate heater having a simple structure, low manufacturing cost, high strength, good thermal efficiency, low warpage and little distortion.

  The plate heater of the present invention comprises a plurality of metal plates stacked on each other and a plurality of metal pipe heaters having a polygonal cross-sectional shape interposed between two metal plates facing each other. An insulating coating is provided on a surface in contact with the metal pipe heater.

  Further, the substrate heating apparatus of the present invention includes an upper metal plate, an intermediate metal plate, and a lower metal plate that are stacked on each other, and between the upper metal plate and the intermediate metal plate, and between the intermediate metal plate and the lower metal plate. A plurality of metal pipe heaters having a polygonal cross-sectional shape, wherein each of the metal plates has an insulating coating on a surface in contact with the metal pipe heater.

  Further, in the substrate heating apparatus according to the present invention, the direction of the metal pipe heater inserted between the upper and intermediate plates is orthogonal to the direction of the metal pipe heater inserted between the intermediate and lower plates. It is characterized by that.

  The substrate heating apparatus of the present invention is characterized in that a fluid is caused to flow in the metal pipe heater.

  Also, the substrate heating apparatus of the present invention is characterized in that the plurality of metal pipe heaters are composed of a plurality of heater groups of independent circuits that can individually control the temperature.

  The substrate heating apparatus of the present invention is characterized in that two adjacent pipe heaters cross each other in a zigzag shape.

  In the present invention, since each metal plate and the pipe heater having a polygonal cross section are made of the same material such as stainless steel, the respective thermal expansion rates are the same, the occurrence of thermal strain due to the difference in the thermal expansion coefficient is suppressed, Warpage can be reduced and the shape of the plate heater can be stably maintained over a long period of time. Further, in the present invention, the upper metal plate, the lower metal plate, and the metal pipe heater having a polygonal cross-sectional shape are joined to each other, so that the light weight and the high strength can be obtained, and the warp and the deflection of the plate can be achieved. Can be prevented.

  In the present invention, the entire plate heater can be brought to a uniform temperature by flowing a fluid such as oxygen, nitrogen, or steam through a pipe heater having a polygonal cross section, and the plate heater can be cooled rapidly. The temperature can be lowered rapidly by flowing a coolant such as water through the pipe.

  In the present invention, since a large number of heater unit groups are provided between the plates, the temperature can be controlled in a divided manner.

  Embodiments of the present invention will be described below with reference to the drawings.

  In the present invention, as shown in FIGS. 1 and 2, two large-area metal plates on the upper and lower sides, for example, stainless steel plates (1500 × 1800 mm × 5 mm) 1 and 2 are stacked, and between these plates 1 and 2. For example, a plurality of pipe heaters 3 made of the same metal as the metal plate having a regular triangle cross section of 30 mm on a side are arranged adjacent to each other, and these are integrally fixed by an insulating material (not shown).

  The directions of the pipe heaters 3 disposed between the upper plate 1 and the lower plate 2 are the same.

  Also, as shown in FIG. 3, a plurality of, for example, four pipe heaters 3 adjacent to each other are connected in series to form a plurality of independent heater groups, and temperature control can be performed individually for each heater group. To do.

  Insulating layers 4 are formed on the surfaces of the metal plates 1 and 2 on the side in contact with the pipe heater 3. The insulating layer 4 is formed by, for example, ceramic spraying or attaching an insulating film such as a mica sheet.

  The terminal portion 5 of each pipe heater 3 is provided on one side of the two plates 1 and 2 and the pipe heater 3 integrated as shown in FIG.

  Since the plate heater according to the present invention is configured as described above, the thermal expansion coefficient of each plate and the pipe heater is the same. Therefore, the occurrence of thermal distortion and warpage of the plate due to the difference in the thermal expansion coefficient is suppressed, and the plate heater can be used for a long time. The shape stability of the plate heater can be maintained. Further, since the upper and lower plates are joined with the metal pipe heater having a triangular cross section, it is lightweight and can have high strength, and the warpage and deflection of the plate can be prevented.

  Moreover, the whole plate heater can be made into uniform temperature by flowing fluids, such as oxygen, nitrogen, and a vapor | steam, inside the pipe heater of triangular cross-sectional shape. When it is desired to rapidly cool the plate heater, a rapid temperature drop can be achieved by flowing a coolant such as water through the pipe.

  In the present invention, since a large number of heater unit groups are provided between the plates, the temperature can be controlled in a divided manner.

  In Example 2 of the present invention, as shown in FIG. 4, three large area metal plates, for example, stainless steel plates (1500 × 1800 mm × 5 mm) 1, 6, 2, are stacked to form these three plates. Among the above plates, a plurality of pipe heaters 3 made of the same metal as the metal plate having a regular triangular cross section of 30 mm on each side are disposed adjacent to each other between the overlapping plates 1 and 6 and 6 and 2, respectively, and these are insulated. It is fixed together with a material (not shown).

  Further, as shown in FIG. 4, a plurality of, for example, four pipe heaters 3 adjacent to each other are connected in series to form a plurality of independent heater groups so that the temperature can be individually controlled for each heater group. .

  An insulating layer 4 is formed on the surface of each of the plates 1, 2 and 6 on the side in contact with the pipe heater 3. The insulating layer 4 is formed by, for example, ceramic spraying or attaching an insulating film such as a mica sheet.

  Further, the direction of the pipe heater 3 disposed between the upper plate 1 and the intermediate plate 6 and the direction of the pipe heater 3 disposed between the intermediate plate 6 and the lower plate 2 are set to be orthogonal to each other.

  In this embodiment of the present invention, the intermediate plate 6 is interposed between the upper and lower metal plates 1 and 2, the pipe heater 3 having a triangular cross section is formed in two layers, and the arrangement of the upper and lower pipe heaters 3 is orthogonal to each other. Therefore, the heater area can be increased, the strength of the plate heater can be increased, and the warpage and deflection can be reduced.

  In Embodiment 3 of the present invention, as shown in FIG. 5, two adjacent pipe heaters 3 having a triangular cross section are inserted between the upper plate 1 and the intermediate plate 6 or between the lower plate 2 and the intermediate plate 6. Suppose that they cross each other in a zigzag shape.

  The operational effects in the third embodiment are the same as those in the first and second embodiments.

  The pipe heater 3 in the above embodiment may have a polygonal cross section instead of a triangular cross section.

It is a top view of the plate heater of the present invention. FIG. 2 is an enlarged perspective view of a part of the plate heater shown in FIG. 1. It is a circuit diagram of the pipe heater group of the plate heater shown in FIG. It is a partially expanded perspective view which shows the other Example of the plate heater of this invention. It is a top view which shows the other Example of the shape of the pipe heater of the plate heater of this invention.

Explanation of symbols

1 Upper plate 2 Lower plate 3 Pipe heater 4 Insulating layer 5 Terminal 6 Intermediate plate

Claims (6)

  A surface comprising a plurality of metal plates stacked on top of each other and a plurality of metal pipe heaters having a polygonal cross section interposed between two metal plates facing each other, each metal plate contacting the metal pipe heater A plate heater characterized by having an insulation coating.   A plurality of metal plates having a polygonal cross-sectional shape inserted between the upper, intermediate and lower metal plates, and between the upper and intermediate plates and between the intermediate and lower metal plates. A plate heater comprising a pipe heater, wherein each of the metal plates has an insulating coating on a surface in contact with the metal pipe heater.   The direction of the metal pipe heater inserted between the upper and intermediate plates is orthogonal to the direction of the metal pipe heater inserted between the intermediate and lower plates. Plate heater.   The plate heater according to claim 1, wherein a fluid is caused to flow in the metal pipe heater.   5. The plate heater according to claim 1, wherein the plurality of metal pipe heaters are composed of a plurality of heater groups having mutually independent circuits capable of individually controlling the temperature.   6. The plate heater according to claim 1, wherein two adjacent pipe heaters cross each other in a zigzag manner.

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