JPH0650750Y2 - 振動形差圧センサ - Google Patents

振動形差圧センサ

Info

Publication number
JPH0650750Y2
JPH0650750Y2 JP2623389U JP2623389U JPH0650750Y2 JP H0650750 Y2 JPH0650750 Y2 JP H0650750Y2 JP 2623389 U JP2623389 U JP 2623389U JP 2623389 U JP2623389 U JP 2623389U JP H0650750 Y2 JPH0650750 Y2 JP H0650750Y2
Authority
JP
Japan
Prior art keywords
support base
groove
sensor chip
differential pressure
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2623389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02118237U (enrdf_load_html_response
Inventor
謹爾 原田
恭一 池田
秀樹 桑山
小林　　隆
哲也 渡辺
直 西川
隆司 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP2623389U priority Critical patent/JPH0650750Y2/ja
Publication of JPH02118237U publication Critical patent/JPH02118237U/ja
Application granted granted Critical
Publication of JPH0650750Y2 publication Critical patent/JPH0650750Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2623389U 1989-03-08 1989-03-08 振動形差圧センサ Expired - Lifetime JPH0650750Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2623389U JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2623389U JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH02118237U JPH02118237U (enrdf_load_html_response) 1990-09-21
JPH0650750Y2 true JPH0650750Y2 (ja) 1994-12-21

Family

ID=31247678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2623389U Expired - Lifetime JPH0650750Y2 (ja) 1989-03-08 1989-03-08 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH0650750Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH02118237U (enrdf_load_html_response) 1990-09-21

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