JPH064898Y2 - プラズマ装置 - Google Patents

プラズマ装置

Info

Publication number
JPH064898Y2
JPH064898Y2 JP1986196798U JP19679886U JPH064898Y2 JP H064898 Y2 JPH064898 Y2 JP H064898Y2 JP 1986196798 U JP1986196798 U JP 1986196798U JP 19679886 U JP19679886 U JP 19679886U JP H064898 Y2 JPH064898 Y2 JP H064898Y2
Authority
JP
Japan
Prior art keywords
plasma
vacuum container
applicator
short
circuit plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986196798U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63103737U (enExample
Inventor
公平 大竹
文雄 高村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP1986196798U priority Critical patent/JPH064898Y2/ja
Publication of JPS63103737U publication Critical patent/JPS63103737U/ja
Application granted granted Critical
Publication of JPH064898Y2 publication Critical patent/JPH064898Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1986196798U 1986-12-23 1986-12-23 プラズマ装置 Expired - Lifetime JPH064898Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986196798U JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986196798U JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS63103737U JPS63103737U (enExample) 1988-07-05
JPH064898Y2 true JPH064898Y2 (ja) 1994-02-09

Family

ID=31155933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986196798U Expired - Lifetime JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Country Status (1)

Country Link
JP (1) JPH064898Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719567A (en) * 1981-05-22 1982-02-01 Hiroshi Adachi Ice making vessel
JPS5849295A (ja) * 1981-09-17 1983-03-23 Konishiroku Photo Ind Co Ltd 光学的情報記録媒体

Also Published As

Publication number Publication date
JPS63103737U (enExample) 1988-07-05

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