JPS63103737U - - Google Patents

Info

Publication number
JPS63103737U
JPS63103737U JP19679886U JP19679886U JPS63103737U JP S63103737 U JPS63103737 U JP S63103737U JP 19679886 U JP19679886 U JP 19679886U JP 19679886 U JP19679886 U JP 19679886U JP S63103737 U JPS63103737 U JP S63103737U
Authority
JP
Japan
Prior art keywords
plasma
utility
model registration
vacuum container
plasma device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19679886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH064898Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986196798U priority Critical patent/JPH064898Y2/ja
Publication of JPS63103737U publication Critical patent/JPS63103737U/ja
Application granted granted Critical
Publication of JPH064898Y2 publication Critical patent/JPH064898Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1986196798U 1986-12-23 1986-12-23 プラズマ装置 Expired - Lifetime JPH064898Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986196798U JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986196798U JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS63103737U true JPS63103737U (enExample) 1988-07-05
JPH064898Y2 JPH064898Y2 (ja) 1994-02-09

Family

ID=31155933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986196798U Expired - Lifetime JPH064898Y2 (ja) 1986-12-23 1986-12-23 プラズマ装置

Country Status (1)

Country Link
JP (1) JPH064898Y2 (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719567A (en) * 1981-05-22 1982-02-01 Hiroshi Adachi Ice making vessel
JPS5849295A (ja) * 1981-09-17 1983-03-23 Konishiroku Photo Ind Co Ltd 光学的情報記録媒体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719567A (en) * 1981-05-22 1982-02-01 Hiroshi Adachi Ice making vessel
JPS5849295A (ja) * 1981-09-17 1983-03-23 Konishiroku Photo Ind Co Ltd 光学的情報記録媒体

Also Published As

Publication number Publication date
JPH064898Y2 (ja) 1994-02-09

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