JPH0648834Y2 - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPH0648834Y2
JPH0648834Y2 JP1989016877U JP1687789U JPH0648834Y2 JP H0648834 Y2 JPH0648834 Y2 JP H0648834Y2 JP 1989016877 U JP1989016877 U JP 1989016877U JP 1687789 U JP1687789 U JP 1687789U JP H0648834 Y2 JPH0648834 Y2 JP H0648834Y2
Authority
JP
Japan
Prior art keywords
wafer
electrode
plasma cvd
wafers
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989016877U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02108335U (US06534493-20030318-C00166.png
Inventor
伸良 佐藤
Original Assignee
川崎製鉄株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 川崎製鉄株式会社 filed Critical 川崎製鉄株式会社
Priority to JP1989016877U priority Critical patent/JPH0648834Y2/ja
Publication of JPH02108335U publication Critical patent/JPH02108335U/ja
Application granted granted Critical
Publication of JPH0648834Y2 publication Critical patent/JPH0648834Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1989016877U 1989-02-17 1989-02-17 プラズマｃｖｄ装置 Expired - Fee Related JPH0648834Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989016877U JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989016877U JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH02108335U JPH02108335U (US06534493-20030318-C00166.png) 1990-08-29
JPH0648834Y2 true JPH0648834Y2 (ja) 1994-12-12

Family

ID=31230188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989016877U Expired - Fee Related JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0648834Y2 (US06534493-20030318-C00166.png)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258924A (ja) * 1984-06-06 1985-12-20 Hitachi Ltd プラズマ処理装置
JPH0719751B2 (ja) * 1984-07-02 1995-03-06 鐘淵化学工業株式会社 成膜方法
JPS6257213A (ja) * 1985-09-06 1987-03-12 Fuji Electric Corp Res & Dev Ltd プラズマｃｖｄ装置
JPH01127237U (US06534493-20030318-C00166.png) * 1988-02-24 1989-08-31

Also Published As

Publication number Publication date
JPH02108335U (US06534493-20030318-C00166.png) 1990-08-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees