JPH0648831Y2 - 基板冷却装置用パッド - Google Patents
基板冷却装置用パッドInfo
- Publication number
- JPH0648831Y2 JPH0648831Y2 JP2626985U JP2626985U JPH0648831Y2 JP H0648831 Y2 JPH0648831 Y2 JP H0648831Y2 JP 2626985 U JP2626985 U JP 2626985U JP 2626985 U JP2626985 U JP 2626985U JP H0648831 Y2 JPH0648831 Y2 JP H0648831Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pad
- laminate
- front surface
- cooling plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 34
- 238000001816 cooling Methods 0.000 title claims description 25
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 239000010408 film Substances 0.000 description 12
- 229920001971 elastomer Polymers 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2626985U JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2626985U JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61145276U JPS61145276U (enrdf_load_stackoverflow) | 1986-09-08 |
| JPH0648831Y2 true JPH0648831Y2 (ja) | 1994-12-12 |
Family
ID=30522118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2626985U Expired - Lifetime JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648831Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-02-27 JP JP2626985U patent/JPH0648831Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61145276U (enrdf_load_stackoverflow) | 1986-09-08 |
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