JPS626138Y2 - - Google Patents
Info
- Publication number
- JPS626138Y2 JPS626138Y2 JP11778782U JP11778782U JPS626138Y2 JP S626138 Y2 JPS626138 Y2 JP S626138Y2 JP 11778782 U JP11778782 U JP 11778782U JP 11778782 U JP11778782 U JP 11778782U JP S626138 Y2 JPS626138 Y2 JP S626138Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- cooling pad
- pad
- cooling body
- covered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 33
- 239000004809 Teflon Substances 0.000 claims description 7
- 229920006362 Teflon® Polymers 0.000 claims description 7
- 229920001296 polysiloxane Polymers 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009849 vacuum degassing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11778782U JPS5924770U (ja) | 1982-08-04 | 1982-08-04 | 真空装置用冷却パツド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11778782U JPS5924770U (ja) | 1982-08-04 | 1982-08-04 | 真空装置用冷却パツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5924770U JPS5924770U (ja) | 1984-02-16 |
| JPS626138Y2 true JPS626138Y2 (enrdf_load_stackoverflow) | 1987-02-12 |
Family
ID=30271005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11778782U Granted JPS5924770U (ja) | 1982-08-04 | 1982-08-04 | 真空装置用冷却パツド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5924770U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130461U (enrdf_load_stackoverflow) * | 1988-02-19 | 1989-09-05 |
-
1982
- 1982-08-04 JP JP11778782U patent/JPS5924770U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5924770U (ja) | 1984-02-16 |
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