JPH0646990Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0646990Y2
JPH0646990Y2 JP1987103644U JP10364487U JPH0646990Y2 JP H0646990 Y2 JPH0646990 Y2 JP H0646990Y2 JP 1987103644 U JP1987103644 U JP 1987103644U JP 10364487 U JP10364487 U JP 10364487U JP H0646990 Y2 JPH0646990 Y2 JP H0646990Y2
Authority
JP
Japan
Prior art keywords
plasma
gas
electrode
cover
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987103644U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410047U (enExample
Inventor
義和 近藤
由紀夫 津田
俊博 山本
Original Assignee
鐘紡株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 鐘紡株式会社 filed Critical 鐘紡株式会社
Priority to JP1987103644U priority Critical patent/JPH0646990Y2/ja
Priority to US07/214,179 priority patent/US4968918A/en
Priority to EP88110707A priority patent/EP0298420B1/en
Priority to DE3887933T priority patent/DE3887933T2/de
Priority to KR1019880008345A priority patent/KR950001541B1/ko
Publication of JPS6410047U publication Critical patent/JPS6410047U/ja
Application granted granted Critical
Publication of JPH0646990Y2 publication Critical patent/JPH0646990Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP1987103644U 1987-07-06 1987-07-06 プラズマ処理装置 Expired - Lifetime JPH0646990Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1987103644U JPH0646990Y2 (ja) 1987-07-06 1987-07-06 プラズマ処理装置
US07/214,179 US4968918A (en) 1987-07-06 1988-07-01 Apparatus for plasma treatment
EP88110707A EP0298420B1 (en) 1987-07-06 1988-07-05 Apparatus for plasma treatment
DE3887933T DE3887933T2 (de) 1987-07-06 1988-07-05 Plasma-Bearbeitungsgerät.
KR1019880008345A KR950001541B1 (ko) 1987-07-06 1988-07-06 플라즈마처리용 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987103644U JPH0646990Y2 (ja) 1987-07-06 1987-07-06 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6410047U JPS6410047U (enExample) 1989-01-19
JPH0646990Y2 true JPH0646990Y2 (ja) 1994-11-30

Family

ID=31334664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987103644U Expired - Lifetime JPH0646990Y2 (ja) 1987-07-06 1987-07-06 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0646990Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367422B1 (ko) * 2012-12-12 2014-02-26 (주) 파카알지비 원단 표면처리장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054428B2 (ja) * 1982-01-26 1985-11-29 株式会社山東鉄工所 低温プラズマ処理装置
JPS6031939B2 (ja) * 1982-03-23 1985-07-25 株式会社山東鉄工所 低温プラズマ処理装置
JPS59179631A (ja) * 1983-03-31 1984-10-12 Japan Synthetic Rubber Co Ltd フイルムのプラズマ重合処理装置
JPS59226028A (ja) * 1983-06-06 1984-12-19 Nitto Electric Ind Co Ltd 真空処理装置
JPS6048339A (ja) * 1983-08-26 1985-03-16 Unitika Ltd シ−ト状物の低温プラズマ処理方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101367422B1 (ko) * 2012-12-12 2014-02-26 (주) 파카알지비 원단 표면처리장치

Also Published As

Publication number Publication date
JPS6410047U (enExample) 1989-01-19

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