JPH064584Y2 - レ−ザマ−キング用ウエハ−搬送装置 - Google Patents
レ−ザマ−キング用ウエハ−搬送装置Info
- Publication number
- JPH064584Y2 JPH064584Y2 JP1987062211U JP6221187U JPH064584Y2 JP H064584 Y2 JPH064584 Y2 JP H064584Y2 JP 1987062211 U JP1987062211 U JP 1987062211U JP 6221187 U JP6221187 U JP 6221187U JP H064584 Y2 JPH064584 Y2 JP H064584Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer transfer
- laser marking
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987062211U JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987062211U JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63167737U JPS63167737U (sh) | 1988-11-01 |
JPH064584Y2 true JPH064584Y2 (ja) | 1994-02-02 |
Family
ID=30896267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987062211U Expired - Lifetime JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH064584Y2 (sh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI607817B (zh) * | 2015-09-02 | 2017-12-11 | E&R Eng Corp | Laser printing apparatus and method |
-
1987
- 1987-04-23 JP JP1987062211U patent/JPH064584Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63167737U (sh) | 1988-11-01 |
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