JPH0644594Y2 - セラミック盤 - Google Patents
セラミック盤Info
- Publication number
- JPH0644594Y2 JPH0644594Y2 JP1986167053U JP16705386U JPH0644594Y2 JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2 JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing table
- ceramic
- transparent body
- identification mark
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986167053U JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6374267U JPS6374267U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-18 |
JPH0644594Y2 true JPH0644594Y2 (ja) | 1994-11-16 |
Family
ID=31098620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986167053U Expired - Lifetime JPH0644594Y2 (ja) | 1986-10-30 | 1986-10-30 | セラミック盤 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644594Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0683956B2 (ja) * | 1988-05-25 | 1994-10-26 | 昭和電工株式会社 | 炭化けい素セラミックス製トッププレート |
JPH0710493Y2 (ja) * | 1991-02-05 | 1995-03-08 | 株式会社エンヤシステム | ウエーハ貼付板 |
WO2007086529A1 (ja) * | 2006-01-25 | 2007-08-02 | Jsr Corporation | 化学機械研磨パッドおよびその製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5841559Y2 (ja) * | 1979-01-17 | 1983-09-20 | 株式会社スリ−ボンド | 表示体 |
JPS5944185B2 (ja) * | 1982-03-04 | 1984-10-27 | 不二越機械工業株式会社 | ポリシング用セラミツク定盤の固定装置 |
-
1986
- 1986-10-30 JP JP1986167053U patent/JPH0644594Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6374267U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-18 |
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