JPH0643503Y2 - アクチエ−タ− - Google Patents
アクチエ−タ−Info
- Publication number
- JPH0643503Y2 JPH0643503Y2 JP1987012938U JP1293887U JPH0643503Y2 JP H0643503 Y2 JPH0643503 Y2 JP H0643503Y2 JP 1987012938 U JP1987012938 U JP 1987012938U JP 1293887 U JP1293887 U JP 1293887U JP H0643503 Y2 JPH0643503 Y2 JP H0643503Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- shaped
- shim
- piezoelectric vibrator
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000012530 fluid Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987012938U JPH0643503Y2 (ja) | 1987-01-30 | 1987-01-30 | アクチエ−タ− |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987012938U JPH0643503Y2 (ja) | 1987-01-30 | 1987-01-30 | アクチエ−タ− |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63121785U JPS63121785U (en, 2012) | 1988-08-08 |
JPH0643503Y2 true JPH0643503Y2 (ja) | 1994-11-14 |
Family
ID=30801534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987012938U Expired - Lifetime JPH0643503Y2 (ja) | 1987-01-30 | 1987-01-30 | アクチエ−タ− |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0643503Y2 (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002021715A (ja) * | 2000-07-10 | 2002-01-23 | Matsushita Electric Ind Co Ltd | 流体供給装置及び流体供給方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006046938A1 (en) * | 2004-10-21 | 2006-05-04 | Societe De Technologie Michelin | A miniaturized piezoelectric based vibrational energy harvester |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999977A (ja) * | 1982-11-26 | 1984-06-08 | Matsushita Electric Ind Co Ltd | リニアモ−タ |
JPS6017279A (ja) * | 1983-07-11 | 1985-01-29 | Tamagawa Seiki Kk | 電歪振動子を用いる気体ポンプ |
US4648807A (en) * | 1985-05-14 | 1987-03-10 | The Garrett Corporation | Compact piezoelectric fluidic air supply pump |
-
1987
- 1987-01-30 JP JP1987012938U patent/JPH0643503Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002021715A (ja) * | 2000-07-10 | 2002-01-23 | Matsushita Electric Ind Co Ltd | 流体供給装置及び流体供給方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS63121785U (en, 2012) | 1988-08-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2000217325A (ja) | 電磁バイブレ―タ及びそれを含むポンプ | |
JP4957480B2 (ja) | 圧電マイクロポンプ | |
JP2018042453A (ja) | 圧電アクチュエータ及びこれを使用した小型流体制御装置 | |
CN208380823U (zh) | 一种流体泵及激振元件 | |
JP5429317B2 (ja) | 圧電マイクロポンプ | |
KR100276632B1 (ko) | 초음파모터용 압전진동자, 그 장착방법 및 제조방법 및 정재파형 초음파모터 | |
CN109695562A (zh) | 一种流体泵及激振元件 | |
JPH11187638A (ja) | 鉄心可動型リニア振動子及びリニア圧縮機 | |
JPH0643503Y2 (ja) | アクチエ−タ− | |
CN101626207A (zh) | 弯振模态梁式旋转超声电机振子 | |
CN102437783A (zh) | 贴片式工字型四足直线超声电机振子 | |
CN113007077A (zh) | 一种阵列式压电隔膜泵 | |
JPH0821363A (ja) | 振動型ポンプ | |
CN107403616B (zh) | 一种低频框架驱动式四边型弯张换能器 | |
CN115355161A (zh) | 一种多腔压缩恒压输出的射流压电风扇 | |
JPS6412111B2 (en, 2012) | ||
JPH07279850A (ja) | リニアエアーポンプ | |
JP2004092588A (ja) | ポンプ | |
JP2002285968A (ja) | 電磁振動式ダイヤフラムポンプ | |
JP3171751B2 (ja) | ダイヤフラム式電磁ポンプ | |
JP2538033B2 (ja) | 平面型超音波アクチュエ―タ | |
CN213661475U (zh) | 四足压电振子、压电陶瓷驱动器及微动台 | |
JP3428854B2 (ja) | 電磁ポンプ | |
JPH0736139Y2 (ja) | 多弁式エアーポンプ | |
TW201932712A (zh) | 壓電致動器及其所適用之微型流體控制裝置 |