JPH0643503Y2 - アクチエ−タ− - Google Patents

アクチエ−タ−

Info

Publication number
JPH0643503Y2
JPH0643503Y2 JP1987012938U JP1293887U JPH0643503Y2 JP H0643503 Y2 JPH0643503 Y2 JP H0643503Y2 JP 1987012938 U JP1987012938 U JP 1987012938U JP 1293887 U JP1293887 U JP 1293887U JP H0643503 Y2 JPH0643503 Y2 JP H0643503Y2
Authority
JP
Japan
Prior art keywords
piezoelectric
shaped
shim
piezoelectric vibrator
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987012938U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121785U (en, 2012
Inventor
壮征 佐藤
英憲 奥山
Original Assignee
株式会社三鈴エリ−
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社三鈴エリ− filed Critical 株式会社三鈴エリ−
Priority to JP1987012938U priority Critical patent/JPH0643503Y2/ja
Publication of JPS63121785U publication Critical patent/JPS63121785U/ja
Application granted granted Critical
Publication of JPH0643503Y2 publication Critical patent/JPH0643503Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP1987012938U 1987-01-30 1987-01-30 アクチエ−タ− Expired - Lifetime JPH0643503Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987012938U JPH0643503Y2 (ja) 1987-01-30 1987-01-30 アクチエ−タ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987012938U JPH0643503Y2 (ja) 1987-01-30 1987-01-30 アクチエ−タ−

Publications (2)

Publication Number Publication Date
JPS63121785U JPS63121785U (en, 2012) 1988-08-08
JPH0643503Y2 true JPH0643503Y2 (ja) 1994-11-14

Family

ID=30801534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987012938U Expired - Lifetime JPH0643503Y2 (ja) 1987-01-30 1987-01-30 アクチエ−タ−

Country Status (1)

Country Link
JP (1) JPH0643503Y2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006046938A1 (en) * 2004-10-21 2006-05-04 Societe De Technologie Michelin A miniaturized piezoelectric based vibrational energy harvester

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5999977A (ja) * 1982-11-26 1984-06-08 Matsushita Electric Ind Co Ltd リニアモ−タ
JPS6017279A (ja) * 1983-07-11 1985-01-29 Tamagawa Seiki Kk 電歪振動子を用いる気体ポンプ
US4648807A (en) * 1985-05-14 1987-03-10 The Garrett Corporation Compact piezoelectric fluidic air supply pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法

Also Published As

Publication number Publication date
JPS63121785U (en, 2012) 1988-08-08

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