JPH0643503Y2 - Actuator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to an actuator suitable for reciprocating a driver of a diaphragm pump, and more particularly to an actuator for reciprocating the driver by a piezoelectric vibrator.

(Prior Art) Conventionally, a vibrating fluid pump such as a diaphragm pump is provided with a suction port having a suction side check valve and a discharge port having a discharge side check valve in a casing whose one wall surface is a diaphragm. , Fix the permanent magnet to the diaphragm driver,
An electromagnet is arranged opposite to the permanent magnet to drive the driver element.

In such an electromagnetic pump, an alternating current is applied to an electromagnet to reciprocate a driver element by a suction / repulsion force acting between both magnets, and a diaphragm is vibrated to suck a fluid from a suction port through a suction side check valve, The sucked fluid is discharged from the discharge port through the discharge side check valve.

Further, the present inventor has proposed a device that utilizes the vibration of a piezoelectric vibrator instead of the drive by the electromagnet described above.
-82078 publication). This pump is a piezoelectric pump in which the outer periphery of a piezoelectric vibrator is fixed to the inner wall of a casing, and the casing is provided with a suction port having a suction side check valve and a discharge port having a discharge side check valve.

This piezoelectric pump applies an AC voltage between electrodes of a piezoelectric vibrator to vibrate the same, and sucks and discharges a fluid.

However, this piezoelectric pump has a problem that the assembly of the piezoelectric element is complicated.

As shown in the sectional view of FIG. 4, a casing 9 having a diaphragm 4 on one wall has a suction port 7 having a suction side check valve 10 and a discharge port 6 having a discharge side check valve 5. One end of the piezoelectric vibrator 1 is connected via the elastic insulating material 2 to the driver 3 of the fluid pump which is provided and which vibrates the diaphragm 4 by the reciprocating motion of the driver 3 connected thereto. The other end of the piezoelectric vibrator 1 is supported by a frame 11 via an insulating support material 15. 14 in the figure
a and 14b are lead wires.

When an AC voltage is applied between the electrodes 13a, 13b and 13c of the piezoelectric vibrator 1 (13b and 13c are connected in parallel), the piezoelectric vibrator 1 vibrates and its amplitude is cantilevered by the piezoelectric vibrator 1. The driver element 3 connected to the piezoelectric vibrator 1 resonates at the frequency of the power source and reciprocates greatly, which causes the diaphragm 4 to vibrate greatly and pump the fluid. is there. Furthermore, in order to increase the amplitude, a weight 8 that resonates at the power supply frequency is added to the vibrator 3.

In this example, in order to further increase the amplitude, the electrode 13a has shims 16 as shown in FIG.
2 and 12 are formed, and electrodes 13b and 13c are provided on the outside thereof and connected in parallel.

(Problems to be solved by the invention) Among the above, the former electromagnetic pump has a problem of electromagnetic noise because it generates a magnetic field, and the magnetic disk is an influence of the magnetic field as an air source for a device handling the magnetic disk. It cannot be used because it is easily affected.

Further, since an electromagnet is used, it is large and heavy, consumes a large amount of power, and generates heat.

In the latter piezoelectric pump, the assembly of the piezoelectric vibrator 1 is complicated,
It is troublesome.

An object of the present invention is to solve the above problems and to provide an actuator that does not affect peripheral devices, is efficient, and is easy to assemble.

(Means for Solving the Problems) In order to achieve the above-mentioned object, the plate-shaped piezoelectric body 12 is attached to the shim 16 made of a strip-shaped elastic plate-shaped body, and both ends of the shim 16 are bonded to the plate-shaped piezoelectric body 12. Make it more extended and through hole 17 at one end
The piezoelectric vibrator 1 provided with is formed, the rod-shaped driver is inserted into the through hole 17 of the piezoelectric vibrator 1, and the spacer 19 made of an elastic body is fitted to the driver 18 to form a plurality of drivers 18. An actuator is provided in which the piezoelectric vibrators 1 are combined and integrated, and the piezoelectric vibrators 1 are inserted into a frame 11 so that the ends of the shims 16 of the piezoelectric vibrators 1 are fitted and fixed in the internal recesses of the frame 1.

(Operation) Since the piezoelectric vibrator 1 and the driver are integrally formed as described above, the driver 3 may be inserted and fixed in the case of assembly, and the plurality of piezoelectric vibrators 1 are provided. Easy to assemble even if

(Example) As shown in FIG. 1 (plan view) and FIG. 2 (side view), the piezoelectric vibrator 1 of the actuator of the present invention is a shim 16 made of a strip-shaped elastic plate-like body such as a metal thin plate. The plate-shaped piezoelectric body 12 is attached to the shim 16, and the shim 16 is extended from the plate-shaped piezoelectric body 12.
A through hole 17 through which the driver element 3 penetrates is formed on one side.

FIG. 2 shows two kinds of piezoelectric vibrators 1.
Is a plate-shaped piezoelectric body 12 provided only on one side of the shim 16,
(B) is a bimorph type in which plate-like piezoelectric bodies 12 are provided on both sides.

FIG. 3 is a partial sectional view of the actuator of the present invention applied to a piezoelectric pump. This example is an example using a plurality of piezoelectric vibrators 1. That is, a thin metal plate of phosphor bronze, stainless steel, steel, etc. is cut into a rectangle and a through hole is formed at one end.
17 is drilled to form shim 16. A plate-shaped piezoelectric body 12 made of piezoelectric ceramics is formed on one side or both sides of the shim 16, and aluminum is vapor-deposited on the surface of the plate-shaped piezoelectric body 12 to form the piezoelectric vibrator 1 as an electrode 20.

The rod-shaped driver element 3 made of the insulating rod 18 is inserted into the through hole 17 of the obtained piezoelectric vibrator 1 and the spacers 19a and 19b made of an elastic body are fitted, and the piezoelectric vibrators 1a and 1b are sequentially repeated. , 1c, ... Are elastically coupled to the insulating rod 18.

If necessary, the spacer 19 and the insulating rod 18 may be bonded with an adhesive.

The driving body portion in which the driver element 3 (insulating rod 18) thus obtained and the plurality of piezoelectric vibrators 1 are integrated is inserted into the frame 11, and the tip portion of the shim 16 is fitted into the fitting concave portion on the inner surface of the frame 11. It can be assembled by fitting.

It can be vibrated by applying an AC voltage from the power supply between the shim 16 and the electrode 20. In the case of the double-sided type, the electrodes 20 of the plate-shaped piezoelectric body 12 on both sides of the shim 16 are connected in parallel and an alternating voltage is similarly applied between the shim 16 and the electrode 20.

(Effects of the Invention) As described above, the piezoelectric vibrator 1 is individually formed for each shim 16, and the insulating rods 18 are alternately arranged with the spacers 19.
The spacers 19 and the shims 16 can be clamped and clamped by a fastener (not shown) after passing through the required number of sheets.
And the insulating rod 18 can be connected to each other, and energy loss in this portion can be minimized.

Further, since the assembling method is as described above, the assembling is easy.

[Brief description of drawings]

FIG. 1 is a plan view of the piezoelectric vibrator of the present invention, FIG. 2 is a side view of the same, (a) is a single-sided type, (b) is a double-sided type, and FIG. 3 is a configured actuator. Partial cross section of
FIG. 4 is a sectional view of a piezoelectric pump using a conventional actuator, and FIG. 5 is a sectional view of an example of the double-sided piezoelectric vibrator. 1: Piezoelectric vibrator, 3: Driver, 11: Frame, 12: Plate-shaped piezoelectric body, 16: Shim, 17: Through hole.

Claims (1)

[Scope of utility model registration request] 1. A piezoelectric vibrator, wherein a plate-shaped piezoelectric body is attached to a shim made of a strip-shaped elastic plate-shaped body, and both ends of the shim are extended from the plate-shaped piezoelectric body to form a through hole at one end thereof. , The rod-shaped driver element is inserted into the through hole of the piezoelectric vibrator, and a spacer made of an elastic body is fitted to the driver element to combine and integrate the driver element with a plurality of piezoelectric vibrators, and this is inserted into the frame. An actuator in which an end of a shim of the piezoelectric vibrator is fitted and fixed in an internal recess of a frame.