JPH0642330Y2 - 駆動装置 - Google Patents

駆動装置

Info

Publication number
JPH0642330Y2
JPH0642330Y2 JP1986129081U JP12908186U JPH0642330Y2 JP H0642330 Y2 JPH0642330 Y2 JP H0642330Y2 JP 1986129081 U JP1986129081 U JP 1986129081U JP 12908186 U JP12908186 U JP 12908186U JP H0642330 Y2 JPH0642330 Y2 JP H0642330Y2
Authority
JP
Japan
Prior art keywords
drive shaft
vacuum
chamber
drive
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986129081U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336035U (enExample
Inventor
昭 岩瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1986129081U priority Critical patent/JPH0642330Y2/ja
Publication of JPS6336035U publication Critical patent/JPS6336035U/ja
Application granted granted Critical
Publication of JPH0642330Y2 publication Critical patent/JPH0642330Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1986129081U 1986-08-25 1986-08-25 駆動装置 Expired - Lifetime JPH0642330Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129081U JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129081U JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Publications (2)

Publication Number Publication Date
JPS6336035U JPS6336035U (enExample) 1988-03-08
JPH0642330Y2 true JPH0642330Y2 (ja) 1994-11-02

Family

ID=31025334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129081U Expired - Lifetime JPH0642330Y2 (ja) 1986-08-25 1986-08-25 駆動装置

Country Status (1)

Country Link
JP (1) JPH0642330Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4496678B2 (ja) * 2001-06-29 2010-07-07 日本精工株式会社 位置決め装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148827A (en) * 1980-04-21 1981-11-18 Hitachi Ltd Shifting mechanism for sample of electron ray device

Also Published As

Publication number Publication date
JPS6336035U (enExample) 1988-03-08

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