JPH0642240Y2 - 電子線照射装置 - Google Patents

電子線照射装置

Info

Publication number
JPH0642240Y2
JPH0642240Y2 JP1343689U JP1343689U JPH0642240Y2 JP H0642240 Y2 JPH0642240 Y2 JP H0642240Y2 JP 1343689 U JP1343689 U JP 1343689U JP 1343689 U JP1343689 U JP 1343689U JP H0642240 Y2 JPH0642240 Y2 JP H0642240Y2
Authority
JP
Japan
Prior art keywords
air supply
supply duct
window foil
nozzle
foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1343689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02105200U (enrdf_load_stackoverflow
Inventor
健一 水沢
神治 麻生
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP1343689U priority Critical patent/JPH0642240Y2/ja
Publication of JPH02105200U publication Critical patent/JPH02105200U/ja
Application granted granted Critical
Publication of JPH0642240Y2 publication Critical patent/JPH0642240Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP1343689U 1989-02-07 1989-02-07 電子線照射装置 Expired - Lifetime JPH0642240Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1343689U JPH0642240Y2 (ja) 1989-02-07 1989-02-07 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1343689U JPH0642240Y2 (ja) 1989-02-07 1989-02-07 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH02105200U JPH02105200U (enrdf_load_stackoverflow) 1990-08-21
JPH0642240Y2 true JPH0642240Y2 (ja) 1994-11-02

Family

ID=31223743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1343689U Expired - Lifetime JPH0642240Y2 (ja) 1989-02-07 1989-02-07 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0642240Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02105200U (enrdf_load_stackoverflow) 1990-08-21

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