JPH0641788Y2 - Ｘ−ｙステージ - Google Patents

Ｘ−ｙステージ

Info

Publication number
JPH0641788Y2
JPH0641788Y2 JP10278088U JP10278088U JPH0641788Y2 JP H0641788 Y2 JPH0641788 Y2 JP H0641788Y2 JP 10278088 U JP10278088 U JP 10278088U JP 10278088 U JP10278088 U JP 10278088U JP H0641788 Y2 JPH0641788 Y2 JP H0641788Y2
Authority
JP
Japan
Prior art keywords
stage
air
guide shaft
air passage
linear motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10278088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227831U (cs
Inventor
秀明 渡辺
美和 御厨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP10278088U priority Critical patent/JPH0641788Y2/ja
Publication of JPH0227831U publication Critical patent/JPH0227831U/ja
Application granted granted Critical
Publication of JPH0641788Y2 publication Critical patent/JPH0641788Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP10278088U 1988-08-04 1988-08-04 Ｘ−ｙステージ Expired - Lifetime JPH0641788Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10278088U JPH0641788Y2 (ja) 1988-08-04 1988-08-04 Ｘ−ｙステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10278088U JPH0641788Y2 (ja) 1988-08-04 1988-08-04 Ｘ−ｙステージ

Publications (2)

Publication Number Publication Date
JPH0227831U JPH0227831U (cs) 1990-02-22
JPH0641788Y2 true JPH0641788Y2 (ja) 1994-11-02

Family

ID=31333005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10278088U Expired - Lifetime JPH0641788Y2 (ja) 1988-08-04 1988-08-04 Ｘ−ｙステージ

Country Status (1)

Country Link
JP (1) JPH0641788Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5122416B2 (ja) * 2008-10-15 2013-01-16 東芝機械株式会社 エアテーブル装置および軸受間隔修正方法

Also Published As

Publication number Publication date
JPH0227831U (cs) 1990-02-22

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