JPH0227831U - - Google Patents
Info
- Publication number
- JPH0227831U JPH0227831U JP10278088U JP10278088U JPH0227831U JP H0227831 U JPH0227831 U JP H0227831U JP 10278088 U JP10278088 U JP 10278088U JP 10278088 U JP10278088 U JP 10278088U JP H0227831 U JPH0227831 U JP H0227831U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- guide shaft
- air
- air passage
- linear motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003068 static effect Effects 0.000 claims 4
- 230000002706 hydrostatic effect Effects 0.000 claims 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10278088U JPH0641788Y2 (ja) | 1988-08-04 | 1988-08-04 | Ｘ−ｙステージ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10278088U JPH0641788Y2 (ja) | 1988-08-04 | 1988-08-04 | Ｘ−ｙステージ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227831U true JPH0227831U (cs) | 1990-02-22 |
| JPH0641788Y2 JPH0641788Y2 (ja) | 1994-11-02 |
Family
ID=31333005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10278088U Expired - Lifetime JPH0641788Y2 (ja) | 1988-08-04 | 1988-08-04 | Ｘ−ｙステージ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0641788Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010096232A (ja) * | 2008-10-15 | 2010-04-30 | Toshiba Mach Co Ltd | エアテーブル装置および軸受間隔修正方法 |
-
1988
- 1988-08-04 JP JP10278088U patent/JPH0641788Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010096232A (ja) * | 2008-10-15 | 2010-04-30 | Toshiba Mach Co Ltd | エアテーブル装置および軸受間隔修正方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0641788Y2 (ja) | 1994-11-02 |
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